US5876265A
Expired / Lapsed
US
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End point polishing apparatus and polishing method
Assignee: Fujitsu Ltd
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Filing: 1997-09-26
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Granted: 1999-03-02
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Expires: 2017-09-26
Abstract
Abstract A polishing apparatus of the present invention comprises an amplifier for amplifying a first signal being input from the vibration detecting device attached on a second surface plate to then output a second signal, a gain indicator for determining unsuitableness of a gain of the amplifier based on a magnitude of the second signal output from the amplifier and then indicating correction of said gain, a gain adjuster for adjusting the gain of the amplifier based on a gain correction signal output from the gain indicator, a polishing end-point analyzing portion for determining an end-point of polishing based on change in the second signal, and a control portion for terminating drive of the first surface plate based on a polishing end-point signal being output from the polishing end-point analyzing portion.
Inventors
- 👤 Tadayuki Kojima
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 03:33
CPC Classifications
B; B24; B24B; B24B37/00; B24B37/005; B24B37/013; B24B37/04; B24B37/042; G; G05; G05B; G05B19/00; G05B19/02; G05B19/18; G05B19/416; G05B19/4163; G05B2219/00; G05B2219/30; G05B2219/45; G05B2219/45199; G05B2219/45232; G05B2219/49; G05B2219/49085
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
195 words
A polishing apparatus comprising: a first surface plate on which an abrasive cloth is placed; a first driving mechanism for rotating said first surface plate; a second surface plate for supporting a object to be polished; a second driving mechanism for rotating said second surface plate over said abrasive cloth; a vibration detecting device attached on said second surface plate; an amplifier for amplifying a first signal being input from said vibration detecting device to output a second signal; a gain indicator for determining unsuitableness of gain of said amplifier based on a magnitude of said second signal output from said amplifier and then indicating correction of said gain; a gain adjuster for adjusting gain of said amplifier based on a gain correction signal output from said gain indicator; a polishing end-point analyzing portion for determining an end-point of polishing based on change in said second signal; and a control portion for terminating drive of said first surface plate by virtue of said first driving mechanism based on a polishing end-point signal output from said polishing end-point analyzing portion and also terminating drive of said second surface plate by virtue of said second driving mechanism.
Claim 2
Dependent Claim
195 words
A polishing apparatus comprising: a first surface plate on which an abrasive cloth is placed; a first driving mechanism for rotating said first surface plate; a second surface plate for supporting a object to be polished; a second driving mechanism for rotating said second surface plate over said abrasive cloth; a vibration detecting device attached on said second surface plate; an amplifier for amplifying a first signal being input from said vibration detecting device to output a second signal; a gain indicator for determining unsuitableness of gain of said amplifier based on a magnitude of said second signal output from said amplifier and then indicating correction of said gain; a gain adjuster for adjusting gain of said amplifier based on a gain correction signal output from said gain indicator; a polishing end-point analyzing portion for determining an end-point of polishing based on change in said second signal; and a control portion for terminating drive of said first surface plate by virtue of said first driving mechanism based on a polishing end-point signal output from said polishing end-point analyzing portion and also terminating drive of said second surface plate by virtue of said second driving mechanism.
Claim 3
Dependent Claim
46 words
A polishing apparatus according to claim 1, wherein said gain indicator contains a plurality of reference values to determine said magnitude of said second signal, and modifies said gain of said amplifier based on comparison result between said plurality of reference values and said second signal.
Claim 4
Dependent Claim
23 words
A polishing apparatus according to claim 1, wherein said polishing end-point analyzing portion and said amplifier are connected via a signal transmitting means.
Claim 5
Dependent Claim
30 words
A polishing apparatus according to claim 1, wherein an input end of said gain indicator is electrically connected to an output end of said amplifier via a signal transmitting means.
Claim 6
Dependent Claim
29 words
A polishing apparatus according to claim 3 or 4, wherein said signal transmitting means consists of a rotator and a contact which is brought into contact with said rotator.
Claim 7
Dependent Claim
21 words
A polishing apparatus according to claim 3 or 4, wherein said signal transmitting means consists of a plurality of radio systems.
Claim 8
Dependent Claim
20 words
A polishing apparatus according to claim 3 or 4, wherein said signal transmitting means consists of an optical communication device.
Claim 9
Dependent Claim
25 words
A polishing apparatus according to claim 1, wherein an input end of said gain indicator is directly connected to an output end of said amplifier.
Claim 10
Dependent Claim
61 words
A polishing apparatus according to claim 1, wherein said gain indicator comprises a peak detector for detecting peaks of waveform of said second signal, and a gain indication determining portion for outputting said gain correction signal to said gain setting portion based on a peak signal output from said peak detector if a magnitude of said second signal is not suitable.
Claim 11
Dependent Claim
41 words
A polishing apparatus according to claim 1, wherein said peak detector comprises a peak holding circuit for holding a peak value of waveform of said second signal, and an A/D converter connected to an output end of said peak holding circuit.
Claim 12
Dependent Claim
44 words
A polishing apparatus according to claim 1, wherein said peak detector comprises a sample hold circuit for holding a maximum value of waveform of said second signal per unit time, and an A/D converter connected to an output end of said sample hold circuit.
Claim 13
Dependent Claim
44 words
A polishing apparatus according to claim 1, wherein said peak detector comprises a plurality of comparators, voltage applying means for applying reference set voltages having different amplitudes to said plurality of comparators independently, and counters connected to output ends of said plurality of comparators.
Claim 14
Dependent Claim
134 words
A polishing method comprising the steps of: starting polishing of a object to be polished by moving said object to be polished being supported by a second surface plate on an abrasive cloth being mounted on a first surface plate; amplifying by an amplifier a first output signal of polishing vibration which is detected by a vibration detecting device being attached to said second surface plate; determining suitableness of gain of said amplifier based on a magnitude of said second signal output from said amplifier, and modifying a magnitude of said gain of said amplifier if said gain is not set to a suitable magnitude; and determining an end-point of polishing based on change in said second signal being output from said amplifier, and terminating polishing by stopping movement of said first surface plate.
Claim 15
Dependent Claim
134 words
A polishing method comprising the steps of: starting polishing of a object to be polished by moving said object to be polished being supported by a second surface plate on an abrasive cloth being mounted on a first surface plate; amplifying by an amplifier a first output signal of polishing vibration which is detected by a vibration detecting device being attached to said second surface plate; determining suitableness of gain of said amplifier based on a magnitude of said second signal output from said amplifier, and modifying a magnitude of said gain of said amplifier if said gain is not set to a suitable magnitude; and determining an end-point of polishing based on change in said second signal being output from said amplifier, and terminating polishing by stopping movement of said first surface plate.
Claim 16
Dependent Claim
39 words
A polishing method according to claim 13, wherein suitableness in magnitude of said gain of said amplifier is determined based on whether or not an amplitude of waveform of said second signal does not reside in a set range.
Claim 17
Dependent Claim
41 words
A polishing method according to claim 13, wherein suitableness in magnitude of said gain of said amplifier is determined based on whether or not a maximum value of waveform of said second signal per unit time resides in a predetermined range.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-03-01 | 2002-08-31 | 2003-03-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-03-01 | 2006-08-31 | 2007-03-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-03-01 | 2010-08-31 | 2011-03-02 | $7700.00 | Window Closed / Lapsed |