US5871658A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Optical emisson spectroscopy (OES) method for monitoring and controlling plasma etch process when forming patterned layers
Assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Filing: 1997-01-13
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Granted: 1999-02-16
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Expires: 2017-01-13
Abstract
Abstract A method for monitoring and controlling a plasma etch method for forming a patterned layer. There is first provided a substrate having a blanket layer formed thereover, the blanket layer having a patterned photoresist layer formed thereupon. There is then etched through a plasma etch method while employing the patterned photoresist layer as a patterned photoresist etch mask layer the blanket layer to form a patterned layer. The plasma etch method is monitored through an optical emission spectroscopy (OES) method which monitors a minimum of a first plasma etchant component which relates to a chemical etching of the blanket layer and a second plasma etchant component which relates to a physical sputter etching of the blanket layer and the patterned photoresist layer. While etching through the plasma etch method there is adjusted at least one of a first control parameter which controls the first plasma etchant component concentration and a second control parameter which controls the second plasma etchant component concentration to provide through the plasma etch method from the blanket layer a patterned layer with a pre-determined blanket layer to patterned photoresist layer plasma etch selectivity. There is also disclosed an apparatus through which the method may be practiced.
Inventors
- 👤 Hun-Jan Tao
- 👤 Chia Shiung Tsai
- 👤 Chen-Hua Yu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 12:02
CPC Classifications
B; B24; B24B; B24B37/00; B24B37/005; B24B37/013; H; H10; H10P; H10P74/00; H10P74/23; H10P74/238
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
183 words
A method for monitoring and controlling a plasma etch method for forming a patterned layer comprising: providing a substrate, the substrate having a blanket layer formed thereover, the blanket layer having a patterned photoresist layer formed thereupon; etching, through a plasma etch method while employing the patterned photoresist layer as a patterned photoresist etch mask layer, the blanket layer to form a patterned layer, the plasma etch method being monitored through an optical emission spectroscopy (OES) method which monitors a minimum of a first plasma etchant component which relates to a chemical etching of the blanket layer and a second plasma etchant component which relates to a physical sputter etching of the blanket layer and the patterned photoresist layer; and adjusting while etching through the plasma etch method, at least one of a first control parameter which controls the first plasma etchant component concentration and a second control parameter which controls the second plasma etchant component concentration to provide through the plasma etch method from the blanket layer a patterned layer with a pre-determined blanket layer to patterned photoresist layer plasma etch selectivity.
Claim 2
Independent Claim
183 words
A method for monitoring and controlling a plasma etch method for forming a patterned layer comprising: providing a substrate, the substrate having a blanket layer formed thereover, the blanket layer having a patterned photoresist layer formed thereupon; etching, through a plasma etch method while employing the patterned photoresist layer as a patterned photoresist etch mask layer, the blanket layer to form a patterned layer, the plasma etch method being monitored through an optical emission spectroscopy (OES) method which monitors a minimum of a first plasma etchant component which relates to a chemical etching of the blanket layer and a second plasma etchant component which relates to a physical sputter etching of the blanket layer and the patterned photoresist layer; and adjusting while etching through the plasma etch method, at least one of a first control parameter which controls the first plasma etchant component concentration and a second control parameter which controls the second plasma etchant component concentration to provide through the plasma etch method from the blanket layer a patterned layer with a pre-determined blanket layer to patterned photoresist layer plasma etch selectivity.
Claim 3
Dependent Claim
24 words
The method of claim 1 wherein the substrate is chosen from a group of substrates consisting of dielectric substrates, semiconductor substrates and conductor substrates.
Claim 4
Dependent Claim
29 words
The method of claim 1 wherein the blanket layer is chosen from a group of blanket layers consisting of blanket dielectric layers, blanket semiconductor layers and blanket conductor layers.
Claim 5
Dependent Claim
23 words
The method of claim 1 wherein the plasma etch method is a high density plasma (HDP) reactive ion etch (RIE) plasma etch method.
Claim 6
Independent Claim
193 words
A method for monitoring and controlling a plasma etch method for forming a patterned dielectric layer comprising: providing a substrate, the substrate having a blanket dielectric layer formed thereover, the blanket dielectric layer having a patterned photoresist layer formed thereupon; etching, through a plasma etch method while employing the patterned photoresist layer as a patterned photoresist etch mask layer, the blanket dielectric layer to form a patterned dielectric layer, the plasma etch method being monitored through an optical emission spectroscopy (OES) method which monitors a minimum of a first plasma etchant component which relates to a chemical etching of the blanket dielectric layer and a second plasma etchant component which relates to a physical sputter etching of the blanket dielectric layer and the patterned photoresist layer; and adjusting, while etching through the plasma etch method, at least one of a first control parameter which controls the first plasma etchant component concentration and a second control parameter which controls the second plasma etchant component concentration to provide through the plasma etch method from the blanket dielectric layer a patterned dielectric layer with a pre-determined blanket dielectric layer to patterned photoresist layer plasma etch selectivity.
Claim 7
Independent Claim
193 words
A method for monitoring and controlling a plasma etch method for forming a patterned dielectric layer comprising: providing a substrate, the substrate having a blanket dielectric layer formed thereover, the blanket dielectric layer having a patterned photoresist layer formed thereupon; etching, through a plasma etch method while employing the patterned photoresist layer as a patterned photoresist etch mask layer, the blanket dielectric layer to form a patterned dielectric layer, the plasma etch method being monitored through an optical emission spectroscopy (OES) method which monitors a minimum of a first plasma etchant component which relates to a chemical etching of the blanket dielectric layer and a second plasma etchant component which relates to a physical sputter etching of the blanket dielectric layer and the patterned photoresist layer; and adjusting, while etching through the plasma etch method, at least one of a first control parameter which controls the first plasma etchant component concentration and a second control parameter which controls the second plasma etchant component concentration to provide through the plasma etch method from the blanket dielectric layer a patterned dielectric layer with a pre-determined blanket dielectric layer to patterned photoresist layer plasma etch selectivity.
Claim 8
Dependent Claim
17 words
The method of claim 5 wherein the blanket dielectric layer is a blanket silicon oxide dielectric layer.
Claim 9
Dependent Claim
23 words
The method of claim 6 wherein the plasma etch method is a high density plasma (HDP) reactive ion etch (RIE) plasma etch method.
Claim 10
Dependent Claim
38 words
The method of claim 7 wherein: the first plasma etchant component is dicarbon (C2) derived from a hexafluoroethane (C2F6) plasma etchant gas; and the first control parameter is a radio frequency power employed within the plasma etch method.
Claim 11
Dependent Claim
39 words
The method of claim 8 wherein: the second plasma etchant component is silicon (Si) derived from physical sputter etching of the blanket dielectric layer; and the second control parameter is a bias voltage employed within the plasma etch method.
Claim 12
Dependent Claim
56 words
The method of claim 9 wherein at least one of the first control parameter and the second control parameter is adjusted to provide an optical emission spectrum (OES) relative intensity ratio of dicarbon (C2) emission at about 516.9 nanometers wavelength to silicon (Si) emission at about 287.8 nanometers wavelength of from about 0.3:1 to about 1.2:1.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2002-02-15 | 2002-08-17 | 2003-02-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-02-15 | 2006-08-17 | 2007-02-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-02-15 | 2010-08-17 | 2011-02-16 | $7700.00 | Window Closed / Lapsed |