US5869135A
Expired / Lapsed
US
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Selective chemical vapor deposition of polymers
Assignee: Massachusetts Institute of Technology
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Filing: 1997-10-03
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Granted: 1999-02-09
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Expires: 2017-10-03
Abstract
Abstract A system for selective chemical vapor deposition of polymers onto a substrate. A substrate is provided which comprises a plurality of surface regions, wherein the surface of at least one region provides a more favorable nucleation site for at least one of a polymer or polymer precursor than at least one other region. This may be an intrinsic characteristic of the substrate or may be accomplished through surface treatment of a substrate. The substrate is subjected to chemical vapor deposition of a reactive monomer, producing a polymer coating which is substantially thicker in the regions of favorable nucleation than in the regions of unfavorable nucleation.
Inventors
- 👤 Kathleen M. Vaeth
- 👤 Klavs F. Jensen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 18:15
CPC Classifications
B; B05; B05D; B05D1/00; B05D1/60; B82; B82Y; B82Y10/00; B82Y30/00; B82Y40/00; C; C09; C09K; C09K11/00; C09K11/06; C23; C23C; C23C16/00; C23C16/04; H; H10; H10K; H10K50/00; H10K50/10; H10K50/11; H10K71/00; H10K71/10; B05D1/28; B05D1/283; H10K85/00; H10K85/10; H10K85/111; H10K85/114
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
61 words
A method of selective inhibition of growth by chemical vapor deposition of a precursor polymer of poly(p-phenylene vinylene) or a poly(p-phenylene vinylene) derivative on a substrate, the method comprising surface treatment of the CVD substrate before deposition, the surface treatment adapted to inhibit nucleation of the precursor in one or more regions of the substrate without the use of plasma processing.
Claim 2
Independent Claim
61 words
A method of selective inhibition of growth by chemical vapor deposition of a precursor polymer of poly(p-phenylene vinylene) or a poly(p-phenylene vinylene) derivative on a substrate, the method comprising surface treatment of the CVD substrate before deposition, the surface treatment adapted to inhibit nucleation of the precursor in one or more regions of the substrate without the use of plasma processing.
Claim 3
Dependent Claim
13 words
The method of claim 1, wherein the surface treatment comprises stamping self-assembled monolayers.
Claim 4
Dependent Claim
26 words
The method of claim 2, wherein the stamping is followed by solution processing to effect ion exchange on at least a portion of the substrate surface.
Claim 5
Dependent Claim
28 words
The method of claim 1, wherein the surface treatment comprises exposing the substrate surface to at least one of the group consisting of metal shavings and metal salts.
Claim 6
Dependent Claim
32 words
The method of claim 4, wherein the surface treatment comprises exposing the substrate surface to at least one of the group consisting of iron shavings, iron sulfate, copper sulfate, and silver sulfate.
Claim 7
Dependent Claim
17 words
The method of claim 1, wherein the surface treatment comprises scraping the surface with a metal tool.
Claim 8
Dependent Claim
24 words
The method of claim 1, wherein the substrate surface is selected from the group consisting of indium-tin oxide, glass, silicon, silver, gold, and aluminum.
Claim 9
Independent Claim
55 words
A method of selective inhibition of growth by chemical vapor deposition of a precursor polymer of poly(p-phenylene vinylene) or a poly(p-phenylene vinylene) derivative on a substrate, the method comprising surface treatment of the CVD substrate before deposition, the surface treatment adapted to inhibit nucleation of the precursor in one or more regions of the substrate.
Claim 10
Independent Claim
55 words
A method of selective inhibition of growth by chemical vapor deposition of a precursor polymer of poly(p-phenylene vinylene) or a poly(p-phenylene vinylene) derivative on a substrate, the method comprising surface treatment of the CVD substrate before deposition, the surface treatment adapted to inhibit nucleation of the precursor in one or more regions of the substrate.
Claim 11
Dependent Claim
13 words
The method of claim 8, wherein the surface treatment comprises stamping self-assembled monolayers.
Claim 12
Dependent Claim
28 words
The method of claim 8, wherein the surface treatment comprises exposing the substrate surface to at least one of the group consisting of metal shavings and metal salts.
Claim 13
Dependent Claim
30 words
The method of claim 10, wherein the surface treatment comprises exposing the substrate surface to at least one of the group consisting of iron shavings, iron sulfate, and copper sulfate.
Claim 14
Dependent Claim
17 words
The method of claim 8, wherein the surface treatment comprises scraping the surface with a metal tool.
Claim 15
Dependent Claim
24 words
The method of claim 8, wherein the substrate surface is selected from the group consisting of indium-tin oxide, glass, silicon, silver, gold, and aluminum.
Claim 16
Independent Claim
55 words
A method of selective enhancement of growth by chemical vapor deposition of a precursor polymer of poly(p-phenylene vinylene) or a poly(p-phenlylene vinylene) derivative on a substrate, the method comprising surface treatment of the CVD substrate before deposition, the surface treatment adapted to promote nucleation of the precursor in one or more regions of the substrate.
Claim 17
Independent Claim
55 words
A method of selective enhancement of growth by chemical vapor deposition of a precursor polymer of poly(p-phenylene vinylene) or a poly(p-phenlylene vinylene) derivative on a substrate, the method comprising surface treatment of the CVD substrate before deposition, the surface treatment adapted to promote nucleation of the precursor in one or more regions of the substrate.
Claim 18
Dependent Claim
17 words
The method of claim 14, wherein the surface treatment comprises priming the substrate with an organic layer.
Claim 19
Dependent Claim
11 words
The method of claim 15, wherein the organic layer comprises COOH.
Claim 20
Dependent Claim
12 words
The method of claim 15, wherein the organic layer comprises poly(vinyl carbazole).
Claim 21
Dependent Claim
24 words
The method of claim 14, wherein the substrate surface is selected from the group consisting of indium-tin oxide, glass, silicon, silver, gold, and aluminum.
Claim 22
Independent Claim
118 words
A method of making an electronic device comprising electroluminescent polymers, the method comprising one or more of (i) selective enhancement of the growth by chemical vapor deposition of a precursor polymer of poly(p-phenylene vinylene) or a poly(p-phenylene vinylene) derivative on a substrate by surface treatment of the CVD substrate, the surface treatment adapted to promote nucleation of the precursor in one or more regions of the substrate, and (ii) selective inhibition of the growth by chemical vapor deposition of a precursor polymer of poly(p-phenylene vinylene) or a poly(p-phenylene vinylene) derivative on a substrate by surface treatment of the CVD substrate, the surface treatment adapted to inhibit nucleation of the precursor in one or more regions of the substrate.
Claim 23
Independent Claim
118 words
A method of making an electronic device comprising electroluminescent polymers, the method comprising one or more of (i) selective enhancement of the growth by chemical vapor deposition of a precursor polymer of poly(p-phenylene vinylene) or a poly(p-phenylene vinylene) derivative on a substrate by surface treatment of the CVD substrate, the surface treatment adapted to promote nucleation of the precursor in one or more regions of the substrate, and (ii) selective inhibition of the growth by chemical vapor deposition of a precursor polymer of poly(p-phenylene vinylene) or a poly(p-phenylene vinylene) derivative on a substrate by surface treatment of the CVD substrate, the surface treatment adapted to inhibit nucleation of the precursor in one or more regions of the substrate.
Claim 24
Dependent Claim
28 words
The method of claim 19, wherein the method further comprises a thermal conversion step adapted to transform the precursor polymer into poly(p-phenylene vinylene) or a poly(p-phenylene vinylene) derivative.
Claim 25
Dependent Claim
14 words
The method of claim 19, wherein the surface treatment comprises stamping a self-assembled monolayer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2002-02-08 | 2002-08-10 | 2003-02-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-02-08 | 2006-08-10 | 2007-02-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-02-08 | 2010-08-10 | 2011-02-09 | $7700.00 | Window Closed / Lapsed |