Patent US3956994A successfully refreshed from Google Patents.
Patent US5868857A successfully refreshed from Google Patents.
US5868857A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Rotating belt wafer edge cleaning apparatus
Assignee: Analog Devices Inc
•
Filing: 1996-12-30
•
Granted: 1999-02-09
•
Expires: 2016-12-30
Abstract
Abstract An apparatus for cleaning edges and/or bevel areas of substrates. In one embodiment, the present invention provides a cleaning mechanism that cleans particles off the edge of the wafer based upon friction at the contact point between the wafer and a rotating belt.
Inventors
- 👤 Monsour Moinpour
- 👤 Ilan Berman
- 👤 Young C. Park
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 03:17
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0402; H10P72/0406; B; B08; B08B; B08B1/00; B08B1/30; B24; B24B; B24B21/00; B24B37/00; B24B37/04; B24B9/00; B24B9/02; B24B9/06; B24B9/065; Y; Y10; Y10S; Y10S134/00; Y10S134/902
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
121 words
An apparatus for cleaning an edge of a wafer comprising: a first roller having a first axis of rotation; a second roller having a second axis of rotation; a third roller having a third axis of rotation, said third axis of rotation being fixed in relationship to said first and second axes of rotation; an abrasive belt rotatably coupled to said first, second and third rollers; a motor coupled to said third roller to rotate said abrasive belt about said first, second and third rollers; means for rotating said wafer about a fourth axis of rotation; and a pivoting mechanism for pivoting said first and second rollers about said third axis to engage and disengage said abrasive belt with said edge.
Claim 2
Independent Claim
121 words
An apparatus for cleaning an edge of a wafer comprising: a first roller having a first axis of rotation; a second roller having a second axis of rotation; a third roller having a third axis of rotation, said third axis of rotation being fixed in relationship to said first and second axes of rotation; an abrasive belt rotatably coupled to said first, second and third rollers; a motor coupled to said third roller to rotate said abrasive belt about said first, second and third rollers; means for rotating said wafer about a fourth axis of rotation; and a pivoting mechanism for pivoting said first and second rollers about said third axis to engage and disengage said abrasive belt with said edge.
Claim 3
Dependent Claim
34 words
The apparatus of claim 1 wherein said first, second and third axes of rotation are parallel and wherein said first, second and third axes of rotation are oblique to said fourth axis of rotation.
Claim 4
Dependent Claim
13 words
The apparatus of claim 1 wherein said motor comprises a variable speed motor.
Claim 5
Dependent Claim
15 words
The apparatus of claim 1 wherein said abrasive belt comprises a combination of abrasive materials.
Claim 6
Dependent Claim
24 words
The apparatus of claim 1 further comprising a water jet propelling water at a contact area between said abrasive belt and said wafer edge.
Claim 7
Dependent Claim
26 words
The apparatus of claim 1 further comprising a jet propelling at least one chemical at a contact area between said abrasive belt and said wafer edge.
Claim 8
Independent Claim
98 words
A method for cleaning an edge of a wafer, said method comprising the steps of: rotating an abrasive belt along a first, second and third roller having a first, second and third axis of rotation, respectively, said third axis being fixed in relationship to said first and second axes; rotating said wafer about a fourth axis of rotation; and cleaning said edge of said wafer by pivoting said first and second rollers around said third axis to engage said abrasive belt with said wafer edge to create friction at the contact point between said edge and said belt.
Claim 9
Independent Claim
98 words
A method for cleaning an edge of a wafer, said method comprising the steps of: rotating an abrasive belt along a first, second and third roller having a first, second and third axis of rotation, respectively, said third axis being fixed in relationship to said first and second axes; rotating said wafer about a fourth axis of rotation; and cleaning said edge of said wafer by pivoting said first and second rollers around said third axis to engage said abrasive belt with said wafer edge to create friction at the contact point between said edge and said belt.
Claim 10
Dependent Claim
25 words
The method of claim 7 further comprising the step of delivering a cleaning fluid to a contact area between said belt and said wafer edge.
Claim 11
Dependent Claim
15 words
The method of claim 7 wherein said abrasive belt comprises a combination of abrasive materials.
References Cited (Backward Citations)
US329863A
Cited
US2929088A
Cited
DE2055153A1
Cited
US4027686A
Cited
US3995343A
Cited
US4202071A
Cited
US4292767A
Cited
FR2488157A1
Cited
US4326553A
Cited
US4488382A
Cited
JPS60143634A
Cited
US4656790A
Cited
US4656790B1
Cited
US5012618A
Cited
US5013367A
Cited
US5142725A
Cited
WO1992003313A1
Cited
US5148569A
Cited
US5241792A
Cited
US5144711A
Cited
US5128281A
Cited
US5351360A
Cited
US5485644A
Cited
US5350428A
Cited
US5733181A
Cited
US5595522A
Cited
US5643044A
Cited
US5651160A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-02-08 | 2002-08-10 | 2003-02-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-02-08 | 2006-08-10 | 2007-02-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-02-08 | 2010-08-10 | 2011-02-09 | $7700.00 | Window Closed / Lapsed |