US5863017A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Stabilized laser platform and module interface
Assignee: Cymer Inc
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Filing: 1996-01-05
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Granted: 1999-01-26
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Expires: 2016-01-05
Abstract
Abstract A laser system support structure is provided having an independent, kinematically mounted chamber and optics platform. Swivel-type mounts are used to couple the platform at three points to the laser support frame, thereby allowing the platform to remain static while the support frame, via the swivel mounts, deflects around the platform in response to external forces. The independent platform design provides secondary benefits of creating a compartmentalization of laser system components, leading to a modular type design. Each laser system module is mounted to the support structure on an extension rail, to allow removal of the module from the support frame for easy access during servicing.
Inventors
- 👤 Donald Glenn Larson
- 👤 Anthony John deRuyter
- 👤 Curtiss Lynn Mixon
- 👤 Jerry Rudy Gerent
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 22:38
CPC Classifications
H; H01; H01S; H01S3/00; H01S3/02; H10; H10W; H10W99/00; G; G02; G02B; G02B7/00; H01S3/14; H01S3/22; H01S3/223; H01S3/225
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
99 words
A laser system support structure comprising: a support base having a plurality of internal support members attached thereto; a plurality of vertical frame members fixedly attached to said support base, said vertical frame members interconnected to each other by a set of horizontal cross members; and a laser component platform comprising a plurality of swivel-type mounts mounted to said horizontal cross members to isolate said component platform from external forces acting on said support structure and allow said component platform to remain static while said swivel-type mounts react to deflections in said support structure in response to external forces.
Claim 2
Dependent Claim
99 words
A laser system support structure comprising: a support base having a plurality of internal support members attached thereto; a plurality of vertical frame members fixedly attached to said support base, said vertical frame members interconnected to each other by a set of horizontal cross members; and a laser component platform comprising a plurality of swivel-type mounts mounted to said horizontal cross members to isolate said component platform from external forces acting on said support structure and allow said component platform to remain static while said swivel-type mounts react to deflections in said support structure in response to external forces.
Claim 3
Dependent Claim
20 words
The laser system support structure of claim 1 wherein each of said swivel-type mounts is a cup and roller combination.
Claim 4
Dependent Claim
16 words
The laser support structure of claim 1 wherein said swivel-type mount is a three point mount.
Claim 5
Dependent Claim
18 words
The laser system support structure of claim 3 wherein the component platform is a chamber and optics platform.
Claim 6
Dependent Claim
18 words
The laser system support structure of claim 1 wherein the component platform is a chamber and optics platform.
Claim 7
Dependent Claim
67 words
The laser system support structure of claim 5 wherein the chamber and optics platform further comprises a rail mount system mounted on said platform, wherein a laser discharge chamber is coupled in rolling engagement on said rail system, said rail system having a set of extension rails to allow said chamber to be positioned clear of the system support structure when said extension rails are fully extended.
Claim 8
Dependent Claim
23 words
The laser system support structure of claim 6 wherein a beam delivery interface mount is fixedly attached to said chamber and optics platform.
Claim 9
Dependent Claim
23 words
The laser system support structure of claim 6 wherein a beam delivery interface mount is fixedly attached to said chamber and optics platform.
Claim 10
Dependent Claim
74 words
A laser system support structure comprising: a support base having a plurality of internal support members attached thereto; a plurality of vertical frame members fixedly attached to said support base, said vertical frame members interconnected to each other by a set of horizontal cross members; and a laser component platform comprising a three point mount mounted to said horizontal cross members to isolate said component platform from external forces acting on said support structure.
Claim 11
Dependent Claim
74 words
A laser system support structure comprising: a support base having a plurality of internal support members attached thereto; a plurality of vertical frame members fixedly attached to said support base, said vertical frame members interconnected to each other by a set of horizontal cross members; and a laser component platform comprising a three point mount mounted to said horizontal cross members to isolate said component platform from external forces acting on said support structure.
Claim 12
Dependent Claim
19 words
The laser system support structure of claim 9 wherein the swivel-type kinematic mount is a ball and cup configuration.
Claim 13
Dependent Claim
87 words
A laser system support structure comprising: a support base having a plurality of internal support members attached thereto; a plurality of vertical frame members fixedly attached to a peripheral edge of said support base, said vertical members serially coupled by a horizontal cross member; a laser component platform kinematically mounted to said horizontal cross members by a swivel-type mount at three points to isolate said component platform from external forces acting on said support structure; and an external interface mount fixedly coupled to said laser component platform.
Claim 14
Dependent Claim
87 words
A laser system support structure comprising: a support base having a plurality of internal support members attached thereto; a plurality of vertical frame members fixedly attached to a peripheral edge of said support base, said vertical members serially coupled by a horizontal cross member; a laser component platform kinematically mounted to said horizontal cross members by a swivel-type mount at three points to isolate said component platform from external forces acting on said support structure; and an external interface mount fixedly coupled to said laser component platform.
Claim 15
Dependent Claim
32 words
The laser system support structure of claim 11 wherein the laser component platform segregates the support structure into laser component compartments, wherein compatible laser components can be grouped together in said compartments.
Claim 16
Dependent Claim
31 words
The laser system support structure of claim 12 wherein said laser component platform is a chamber and optics platform, and said external interface mount is a beam delivery equipment interface mount.
Claim 17
Dependent Claim
18 words
The laser system support structure of claim 13 wherein compatible laser components are each housed in separate modules.
Claim 18
Dependent Claim
63 words
The laser system support structure of claim 14 wherein each module further comprises a mounting hinge, said module is pivotly mounted to said support structure by said hinge coupled to an extension rail mounted on said platform, whereby said module can be slidably withdrawn from said support structure and pivotly rotated about said hinge to allow access to all areas of said module.
Claim 19
Dependent Claim
19 words
The laser system support structure of claim 15 wherein the support structure segregates high voltage components from utility components.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-01-25 | 2002-07-27 | 2003-01-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-01-25 | 2006-07-27 | 2007-01-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-01-25 | 2010-07-27 | 2011-01-26 | $7700.00 | Window Closed / Lapsed |