Patent US5860847A successfully refreshed from Google Patents.
US5860847A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Polishing apparatus
Assignee: Ebara Corp
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Filing: 1996-09-06
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Granted: 1999-01-19
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Expires: 2016-09-06
Abstract
Abstract A polishing apparatus has a turntable with an abrasive cloth mounted on an upper surface thereof and a top ring disposed above the turntable for supporting a workpiece to be polished against the abrasive cloth under predetermined pressure. The turntable is rotatable by a first motor through a timing pulley connected to the first motor, and the top ring is rotatable by a second motor through a timing pulley connected to the second motor. A torque detector incorporated in the timing pulley connected to at least one of the first motor and the second motor detects an output torque produced by the at least one of the first motor and the second motor.
Inventors
- 👤 Kunihiko Sakurai
- 👤 Tetsuji Togawa
- 👤 Toyomi Nishi
- 👤 Seiji Katsuoka
- 👤 Hiromi Yajima
- 👤 Masako Kodera
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 20:59
CPC Classifications
B; B24; B24B; B24B37/00; B24B37/005; B24B37/013; H; H10; H10P; H10P52/00; B24B37/04; B24B49/00; B24B49/02; B24B49/04; B24B49/16; H10P74/00; H10P74/23; H10P74/238
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
150 words
A polishing apparatus comprising: a turntable having mounted on an upper surface thereof an abrasive cloth; a first motor having connected thereto a first timing pulley, said first motor being coupled to said turntable through said first timing pulley for rotating said turntable; a top ring positioned above said turntable for supporting a workpiece to be polished against said abrasive cloth; a second motor having connected thereto a second timing pulley, said second motor being coupled to said top ring through said second timing pulley for rotating said top ring; at least one of said first motor and said second motor having an output shaft; and a torque detector, incorporated between said output shaft and a respective at least one of said first timing pulley and said second timing pulley, operable to detect an output torque produced by said at least one of said first motor and said second motor.
Claim 2
Dependent Claim
150 words
A polishing apparatus comprising: a turntable having mounted on an upper surface thereof an abrasive cloth; a first motor having connected thereto a first timing pulley, said first motor being coupled to said turntable through said first timing pulley for rotating said turntable; a top ring positioned above said turntable for supporting a workpiece to be polished against said abrasive cloth; a second motor having connected thereto a second timing pulley, said second motor being coupled to said top ring through said second timing pulley for rotating said top ring; at least one of said first motor and said second motor having an output shaft; and a torque detector, incorporated between said output shaft and a respective at least one of said first timing pulley and said second timing pulley, operable to detect an output torque produced by said at least one of said first motor and said second motor.
Claim 3
Dependent Claim
32 words
A polishing apparatus as claimed in claim 1, wherein said first timing pulley has incorporated therein a first torque detector, and said second timing pulley has incorporated therein a second torque detector.
Claim 4
Dependent Claim
70 words
A polishing apparatus as claimed in claim 2, wherein said first motor includes a first output shaft extending into said first timing pulley, said first torque detector is interposed between said first output shaft and said first timing pulley, said second motor includes a second output shaft extending into said second timing pulley, and said second torque detector is interposed between said second output shaft and said second timing pulley.
Claim 5
Dependent Claim
43 words
A polishing apparatus as claimed in claim 1, wherein said out put shaft extends into said respective one of said first timing pulley and said second timing pulley, and said torque detector is interposed between said output shaft and said respective timing pulley.
Claim 6
Dependent Claim
58 words
A polishing apparatus as claimed in claim 4, wherein said torque detector comprises a boss fixed to said output shaft and rotatable therewith, a driven sleeve spaced radially outwardly of said boss and fixed to said respective timing pulley for rotation therewith, and a detector unit interposed radially between and connected to said boss and said driven sleeve.
Claim 7
Dependent Claim
16 words
A polishing apparatus as claimed in claim 5, wherein said detector unit includes a strain gage.
Claim 8
Dependent Claim
73 words
A polishing apparatus as claimed in claim 1, further comprising a dressing device positioned above said turntable for dressing said abrasive cloth, a third motor having connected thereto a third timing pulley, said third motor being coupled to said dressing device through said third timing pulley for rotating said dressing device, and said third timing pulley having incorporated therein another torque detector operable to detect an output torque produced by said third motor.
Claim 9
Dependent Claim
99 words
A polishing apparatus comprising: a turntable having mounted on an upper surface thereof an abrasive cloth; a top ring positioned above said turntable for supporting a workpiece to be polished against said abrasive cloth; a motor for rotating one of said turntable or said top ring, said motor including an output shaft; coupling means connected to said output shaft for transmitting rotation torque produced by said motor to said one of said turntable or said top ring; and a torque detector, interposed between said output shaft and said coupling means, for detecting an output torque produced by said motor.
Claim 10
Dependent Claim
99 words
A polishing apparatus comprising: a turntable having mounted on an upper surface thereof an abrasive cloth; a top ring positioned above said turntable for supporting a workpiece to be polished against said abrasive cloth; a motor for rotating one of said turntable or said top ring, said motor including an output shaft; coupling means connected to said output shaft for transmitting rotation torque produced by said motor to said one of said turntable or said top ring; and a torque detector, interposed between said output shaft and said coupling means, for detecting an output torque produced by said motor.
Claim 11
Dependent Claim
31 words
A polishing apparatus as claimed in claim 8, wherein said output shaft extends into said coupling means, and said torque detector is positioned between said output shaft and said coupling means.
Claim 12
Dependent Claim
57 words
A polishing apparatus as claimed in claim 9, wherein said torque detector comprises a boss fixed to said output shaft and rotatable therewith, a driven sleeve spaced radially outwardly of said boss and fixed to said coupling means for rotation therewith, and a detector unit interposed radially between and connected to said boss and said driven sleeve.
Claim 13
Dependent Claim
16 words
A polishing apparatus as claimed in claim 10, wherein said detector unit includes a strain gage.
Claim 14
Independent Claim
130 words
A method for polishing a workpiece, :said method comprising: pressing said workpiece by a top ring against an abrasive cloth on an upper surface of a turntable; transmitting rotation of an output shaft of a first motor to said turntable through a first coupling device mounted on said output shaft; transmitting rotation of an output shaft of a second motor to said top ring through a second coupling device mounted on said output shaft of said second motor; and detecting an output torque produced by at least one of said first motor and said second motor by a torque detector incorporated between said at least one of said first motor and said second motor and a respective at least one of said first coupling device and said second coupling device.
Claim 15
Independent Claim
130 words
A method for polishing a workpiece, :said method comprising: pressing said workpiece by a top ring against an abrasive cloth on an upper surface of a turntable; transmitting rotation of an output shaft of a first motor to said turntable through a first coupling device mounted on said output shaft; transmitting rotation of an output shaft of a second motor to said top ring through a second coupling device mounted on said output shaft of said second motor; and detecting an output torque produced by at least one of said first motor and said second motor by a torque detector incorporated between said at least one of said first motor and said second motor and a respective at least one of said first coupling device and said second coupling device.
Claim 16
Dependent Claim
57 words
A method as claimed in claim 12, comprising detecting both an output torque produced by said first motor by a first torque detector incorporated between said first motor and said first coupling device and an output torque produced by said second motor by a second torque detector incorporated between said second motor and said second coupling device.
Claim 17
Independent Claim
151 words
A method for detecting an end point of a polishing operation of polishing a workpiece, wherein said polishing operation includes pressing said workpiece by a top ring against an abrasive cloth on an upper surface of a turntable while rotating said turntable by transmitting rotation of an output shaft of a first motor to said turntable and rotating said top ring by transmitting rotation of an output shaft of a second motor to said top ring, said method comprising: detecting an output torque produced by at least one of said first motor and said second motor by a torque detector incorporated between a respective at least one of said output shaft of said first motor and said output shaft of said second motor and a coupling device mounted thereon; and detecting an occurrence of a change in the thus detected output torque indicative of an end point of said polishing operation.
Claim 18
Independent Claim
151 words
A method for detecting an end point of a polishing operation of polishing a workpiece, wherein said polishing operation includes pressing said workpiece by a top ring against an abrasive cloth on an upper surface of a turntable while rotating said turntable by transmitting rotation of an output shaft of a first motor to said turntable and rotating said top ring by transmitting rotation of an output shaft of a second motor to said top ring, said method comprising: detecting an output torque produced by at least one of said first motor and said second motor by a torque detector incorporated between a respective at least one of said output shaft of said first motor and said output shaft of said second motor and a coupling device mounted thereon; and detecting an occurrence of a change in the thus detected output torque indicative of an end point of said polishing operation.
Claim 19
Dependent Claim
97 words
A method as claimed in claim 14, comprising detecting both a first output torque produced by said first motor by a first torque detector incorporated between a first coupling device mounted on said output shaft of said first motor and a second output torque produced by said second motor by a second torque detector incorporated between a second coupling device mounted on said output shaft of said second motor, and detecting an occurrence of a change both of said first output torque and said second output torque as indicative of said end point of said polishing operation.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-01-18 | 2002-07-20 | 2003-01-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-01-18 | 2006-07-20 | 2007-01-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-01-18 | 2010-07-20 | 2011-01-19 | $7700.00 | Window Closed / Lapsed |