US5849071A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Liquid source formation of thin films using hexamethyl-disilazane
Assignee: Panasonic Holdings Corp
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Filing: 1997-06-16
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Granted: 1998-12-15
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Expires: 2017-06-16
Abstract
Abstract A precursor liquid comprising several metal 2-ethylhexanoates, such as strontium, tantalum and bismuth 2-ethylhexanoates, in a solvent such as xylenes/methyl ethyl ketone and a small amount of hexamethyl-disilazane. The liquid is dried, baked, and annealed to form a thin film of a layered superlattice material, such as strontium bismuth tantalate, on the substrate.
Inventors
- 👤 Gary F. Derbenwick
- 👤 Larry D. McMillan
- 👤 Narayan Solayappan
- 👤 Michael C. Scott
- 👤 Carlos A. Paz de Araujo
- 👤 Shinichiro Hayashi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:16
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/63; H10P14/6326; H10P14/6342; C; C23; C23C; C23C18/00; C23C18/02; C23C18/12; C23C18/1204; C23C18/1208; C23C18/1216; C23C18/1225; H10P14/66; H10P14/662; H10P14/668; H10P14/6681; H10P14/6687; H10P14/6689; H10P14/69; H10P14/692; H10P14/6938; H10P14/69398
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
39 words
A liquid precursor for forming a metal oxide, said precursor comprising: a plurality of metal moieties in effective amounts for forming a layered superlattice material upon application said precursor to a substrate and heating; and a solvent comprising hexamethyl-disilazane.
Claim 2
Dependent Claim
39 words
A liquid precursor for forming a metal oxide, said precursor comprising: a plurality of metal moieties in effective amounts for forming a layered superlattice material upon application said precursor to a substrate and heating; and a solvent comprising hexamethyl-disilazane.
Claim 3
Dependent Claim
32 words
A liquid precursor as in claim 1 wherein said solvent further includes a liquid selected from the group consisting of methyl ethyl ketone, isopropanal, methanol, tetrahydrofuran, xylene, n-butyl acetate, octane and 2-methoxyethanol.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-12-14 | 2002-06-15 | 2002-12-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-12-14 | 2006-06-15 | 2006-12-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-12-14 | 2010-06-15 | 2010-12-15 | $7700.00 | Window Closed / Lapsed |