US5848089A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Excimer laser with magnetic bearings supporting fan
Assignee: Cymer LLC
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Filing: 1997-07-11
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Granted: 1998-12-08
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Expires: 2017-07-11
Abstract
Abstract An electric discharge gas laser having a laser cavity in which is contained a laser gas and a fan for circulating the laser gas. The fan is supported by an active magnetic bearing system and driven by a brushless DC motor in which the rotor of the motor and at least two magnetic bearings sealed within the gas environment of the laser cavity and the motor stator and the coils of the bearing magnets are located outside the gas environment.
Inventors
- 👤 Kamal Sarkar
- 👤 Richard C. Ujazdowski
- 👤 Palash P. Das
- 👤 Donald G. Larson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 19:56
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/7055; G03F7/70575; F; F16; F16C; F16C32/00; F16C32/04; F16C32/0406; F16C32/044; F16C32/047; H; H01; H01S; H01S3/00; H01S3/02; H01S3/03; H01S3/036; H01S3/04; H01S3/041; H01S3/14; H01S3/22; H01S3/223; H01S3/225
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
197 words
An electric discharge gas laser comprising A. a housing structure having walls forming an internal laser cavity; B. a gas located within the laser cavity, said gas being capable of lasing action; C. a pair of elongated spaced electrodes located within the laser cavity and forming an electrical discharge region between the electrodes for stimulating gas within the discharge region to lasing action in accordance with an electrical discharge between the electrodes; D. a rotating fan having a shaft located within the laser cavity for circulating the gas through the discharge region; E. a brushless DC motor comprising a stator and a rotor for providing rotation to the fan; F. at least two magnetic bearings, each comprising stator and a rotor and position sensors for providing radial support to said shaft; G. said rotors of said motor and said at least two magnetic bearings, each being coupled directly or indirectly to said shaft; and H. at least one sealing member interposed between said rotors and said stators to enclose said rotors with said sealing member sealed to the housing structure to have said rotors effectively sealed within the gas environment and the stators without the gas environment.
Claim 2
Dependent Claim
197 words
An electric discharge gas laser comprising A. a housing structure having walls forming an internal laser cavity; B. a gas located within the laser cavity, said gas being capable of lasing action; C. a pair of elongated spaced electrodes located within the laser cavity and forming an electrical discharge region between the electrodes for stimulating gas within the discharge region to lasing action in accordance with an electrical discharge between the electrodes; D. a rotating fan having a shaft located within the laser cavity for circulating the gas through the discharge region; E. a brushless DC motor comprising a stator and a rotor for providing rotation to the fan; F. at least two magnetic bearings, each comprising stator and a rotor and position sensors for providing radial support to said shaft; G. said rotors of said motor and said at least two magnetic bearings, each being coupled directly or indirectly to said shaft; and H. at least one sealing member interposed between said rotors and said stators to enclose said rotors with said sealing member sealed to the housing structure to have said rotors effectively sealed within the gas environment and the stators without the gas environment.
Claim 3
Dependent Claim
21 words
A laser as in claim 1 wherein at least one of said at least two magnetic bearings is a thrust bearing.
Claim 4
Dependent Claim
21 words
A laser as in claim 2 wherein at least one of said at least two magnetic bearings is a radial bearing.
Claim 5
Dependent Claim
24 words
A laser as in claim 3 and further comprising an electronic fan control unit providing high speed active control to said radial magnetic bearings.
Claim 6
Dependent Claim
38 words
A laser as in claim 3 and further comprising an electronic fan control unit providing high speed active control to said radial magnetic bearings and active control to said thrust bearing system and active control to said motor.
Claim 7
Dependent Claim
20 words
A laser as in claim 5 wherein said control unit is programmed to operate said fan at periodically varying speeds.
Claim 8
Dependent Claim
18 words
A laser as in claim 1 wherein at least one of said magnetic bearings is a conical bearing.
Claim 9
Dependent Claim
17 words
A laser as in claim 1 wherein said at least two magnetic bearings are two conical bearings.
Claim 10
Dependent Claim
21 words
A laser as in claim 1 wherein said at least two magnetic bearings are two radial bearings and two thrust bearings.
Claim 11
Dependent Claim
25 words
A laser as in claim 1 wherein said gas comprises a halogen and a noble gas and a buffer gas to provide an excimer laser.
Claim 12
Dependent Claim
24 words
A laser as in claim 10 wherein said halogen is fluorine, said buffer gas is neon and said noble gas is krypton or argon.
Claim 13
Dependent Claim
23 words
A laser as in claim 1 and further comprising a control unit programmed to minimize acoustic and/or shock wave disturbances within the gas.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-12-07 | 2002-06-08 | 2002-12-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-12-07 | 2006-06-08 | 2006-12-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-12-07 | 2010-06-08 | 2010-12-08 | $7700.00 | Window Closed / Lapsed |