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US5770933A Expired / Lapsed US ⏱️ 0.0 years remaining

Blower motor with adjustable timing

Assignee: Cymer Inc
•
Filing: 1997-11-13
•
Granted: 1998-06-23
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Expires: 2017-11-13
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Abstract

Abstract A brushless DC motor with an adjustable timing feature is provided. The timing adjustment allows a specific motor's performance to be optimized by compensating for individual variations both in the characteristics of the rotor position sensors as well as in their locations. The rotor position sensors may be affixed to a heat sink within a portion of the motor housing. To improve the cooling efficiency of the heat sink at least a portion of the motor housing to which the heat sink is thermally coupled is cooled through either active or passive cooling. The rotor position sensors may be enclosed by a structure which improves their thermal and electrical isolation. A means of monitoring and controlling the speed of the motor is also provided.

Inventors

  • 👤 Donald Glenn Larson
  • 👤 Tom Arthur Watson

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-25 17:21
CPC Classifications
H; H02; H02P; H02P6/00; H02P6/06; F; F04; F04D; F04D27/00; F04D27/004; H01; H01S; H01S3/00; H01S3/02; H01S3/03; H01S3/036; H02K; H02K29/00; H02K29/06; H02K29/08; F05; F05D; F05D2270/00; F05D2270/30; F05D2270/335; Y; Y02; Y02B; Y02B30/00; Y02B30/70

Claims Analysis

Total Claims: 21
Claim 1
Independent Claim 222 words
A laser gas circulating system, comprising: a laser cavity; at least two discharge electrodes mounted within said laser cavity, said discharge electrodes defining a laser discharge area; a fan mounted within said laser cavity, said fan coupled to a drive shaft, said drive shaft extending through an exterior surface of said laser cavity, wherein said fan circulates a gas within said laser cavity through said laser discharge area; and a brushless DC motor mounted to said exterior surface of said laser cavity, said motor comprising: a rotor coupled to said fan drive shaft; a stator surrounding a central axis of said rotor; a sealing member interposed between said rotor and said stator, said sealing member partially enclosing said rotor, said sealing member sealed to said exterior surface of said laser cavity, said sealing member preventing said stator from being exposed to said gas; a stator housing surrounding said stator; a stator housing end cap releasably attached to an end portion of said stator housing, wherein said end cap is finned for improved cooling; at least one sensor mounted to said end cap at a location proximate to said rotor and proximate to said stator, said sensor providing rotor position information; and an insulator between said sensor and said rotor and said stator, wherein said insulator is fixably attached to said end cap.
Claim 2
Dependent Claim 222 words
A laser gas circulating system, comprising: a laser cavity; at least two discharge electrodes mounted within said laser cavity, said discharge electrodes defining a laser discharge area; a fan mounted within said laser cavity, said fan coupled to a drive shaft, said drive shaft extending through an exterior surface of said laser cavity, wherein said fan circulates a gas within said laser cavity through said laser discharge area; and a brushless DC motor mounted to said exterior surface of said laser cavity, said motor comprising: a rotor coupled to said fan drive shaft; a stator surrounding a central axis of said rotor; a sealing member interposed between said rotor and said stator, said sealing member partially enclosing said rotor, said sealing member sealed to said exterior surface of said laser cavity, said sealing member preventing said stator from being exposed to said gas; a stator housing surrounding said stator; a stator housing end cap releasably attached to an end portion of said stator housing, wherein said end cap is finned for improved cooling; at least one sensor mounted to said end cap at a location proximate to said rotor and proximate to said stator, said sensor providing rotor position information; and an insulator between said sensor and said rotor and said stator, wherein said insulator is fixably attached to said end cap.
Claim 3
Dependent Claim 24 words
The laser gas circulating system of claim 1, wherein said insulator thermally insulates said sensor from heat generated by said rotor and said stator.
Claim 4
Dependent Claim 22 words
The laser gas circulating system of claim 1, wherein said insulator electrically insulates said sensor from a voltage applied to said stator.
Claim 5
Dependent Claim 29 words
The laser gas circulating system of claim 1, wherein said insulator is a cup fixably attached to said end cap, wherein said cup is comprised of a polyimide material.
Claim 6
Dependent Claim 20 words
The laser gas circulating system of claim 1, wherein said location of said sensor relative to said stator is adjustable.
Claim 7
Dependent Claim 19 words
The laser gas circulating system of claim 5, wherein said adjustment can be made while said motor is running.
Claim 8
Dependent Claim 15 words
The laser gas circulating system of claim 1, wherein said sensor is a Hall sensor.
Claim 9
Dependent Claim 251 words
A laser gas circulating system, comprising: a laser cavity; at least two discharge electrodes mounted within said laser cavity, said discharge electrodes defining a laser discharge area; a fan mounted within said laser cavity, said fan coupled to a drive shaft, said drive shaft extending through an exterior surface of said laser cavity, wherein said fan circulates a gas within said laser cavity through said laser discharge area; and a brushless DC motor mounted to said exterior surface of said laser cavity, said motor comprising: a rotor coupled to said fan drive shaft; a stator surrounding a central axis of said rotor; a sealing member interposed between said rotor and said stator, said sealing member partially enclosing said rotor, said sealing member sealed to said exterior surface of said laser cavity, said sealing member preventing said stator from being exposed to said gas; at least one non-contacting sensor adjustably mounted at a location proximate to said rotor and proximate to said stator, said sensor providing rotor information, said rotor information used to control a phase timing of the motor, wherein adjustment of said sensor location alters said sensor location relative to said stator, said adjustment changing said phase timing; a rotatable end cap, said sensors coupled to said end cap, wherein adjustment of said sensor location is performed by rotating said end cap with respect to said stator; and at least one locating pin indirectly coupled to said stator, said locating pin complementally fitted to a slot within said end cap.
Claim 10
Dependent Claim 251 words
A laser gas circulating system, comprising: a laser cavity; at least two discharge electrodes mounted within said laser cavity, said discharge electrodes defining a laser discharge area; a fan mounted within said laser cavity, said fan coupled to a drive shaft, said drive shaft extending through an exterior surface of said laser cavity, wherein said fan circulates a gas within said laser cavity through said laser discharge area; and a brushless DC motor mounted to said exterior surface of said laser cavity, said motor comprising: a rotor coupled to said fan drive shaft; a stator surrounding a central axis of said rotor; a sealing member interposed between said rotor and said stator, said sealing member partially enclosing said rotor, said sealing member sealed to said exterior surface of said laser cavity, said sealing member preventing said stator from being exposed to said gas; at least one non-contacting sensor adjustably mounted at a location proximate to said rotor and proximate to said stator, said sensor providing rotor information, said rotor information used to control a phase timing of the motor, wherein adjustment of said sensor location alters said sensor location relative to said stator, said adjustment changing said phase timing; a rotatable end cap, said sensors coupled to said end cap, wherein adjustment of said sensor location is performed by rotating said end cap with respect to said stator; and at least one locating pin indirectly coupled to said stator, said locating pin complementally fitted to a slot within said end cap.
Claim 11
Dependent Claim 15 words
The laser gas circulating system of claim 8, wherein said locating pin is a bolt.
Claim 12
Dependent Claim 257 words
A laser gas circulating system, comprising: a laser cavity; at least two discharge electrodes mounted within said laser cavity, said discharge electrodes defining a laser discharge area; a fan mounted within said laser cavity, said fan coupled to a drive shaft, said drive shaft extending through an exterior surface of said laser cavity, wherein said fan circulates a gas within said laser cavity through said laser discharge area; and a brushless DC motor mounted to said exterior surface of said laser cavity, said motor comprising: a rotor coupled to said fan drive shaft; a stator surrounding a central axis of said rotor; a sealing member interposed between said rotor and said stator, said sealing member partially enclosing said rotor, said sealing member sealed to said exterior surface of said laser cavity, said sealing member preventing said stator from being exposed to said gas; at least one non-contacting sensor adjustably mounted at a location proximate to said rotor and proximate to said stator, said sensor providing rotor information, said rotor information used to control a phase timing of the motor, wherein adjustment of said sensor location alters said sensor location relative to said stator, said adjustment changing said phase timing; a rotatable end cap, said sensors coupled to said end cap, wherein adjustment of said sensor location is performed by rotating said end cap with respect to said stator; and a stator housing, said stator housing having a plurality of timing marks on its circumference, said timing marks adjacent to a single indicator marking on said end cap.
Claim 13
Dependent Claim 257 words
A laser gas circulating system, comprising: a laser cavity; at least two discharge electrodes mounted within said laser cavity, said discharge electrodes defining a laser discharge area; a fan mounted within said laser cavity, said fan coupled to a drive shaft, said drive shaft extending through an exterior surface of said laser cavity, wherein said fan circulates a gas within said laser cavity through said laser discharge area; and a brushless DC motor mounted to said exterior surface of said laser cavity, said motor comprising: a rotor coupled to said fan drive shaft; a stator surrounding a central axis of said rotor; a sealing member interposed between said rotor and said stator, said sealing member partially enclosing said rotor, said sealing member sealed to said exterior surface of said laser cavity, said sealing member preventing said stator from being exposed to said gas; at least one non-contacting sensor adjustably mounted at a location proximate to said rotor and proximate to said stator, said sensor providing rotor information, said rotor information used to control a phase timing of the motor, wherein adjustment of said sensor location alters said sensor location relative to said stator, said adjustment changing said phase timing; a rotatable end cap, said sensors coupled to said end cap, wherein adjustment of said sensor location is performed by rotating said end cap with respect to said stator; and a stator housing, said stator housing having a plurality of timing marks on its circumference, said timing marks adjacent to a single indicator marking on said end cap.
Claim 14
Dependent Claim 33 words
The laser gas circulating system of claim 10, further comprising at least one locating pin rigidly coupled to said stator housing, said locating pin complementally fitted to a slot within said end cap.
Claim 15
Dependent Claim 239 words
A laser gas circulating system, comprising: a laser cavity; at least two discharge electrodes mounted within said laser cavity, said discharge electrodes defining a laser discharge area; a fan mounted within said laser cavity, said fan coupled to a drive shaft, said drive shaft extending through an exterior surface of said laser cavity, wherein said fan circulates a gas within said laser cavity through said laser discharge area; and a brushless DC motor mounted to said exterior surface of said laser cavity, said motor comprising: a rotor coupled to said fan drive shaft; a stator surrounding a central axis of said rotor; a sealing member interposed between said rotor and said stator, said sealing member partially enclosing said rotor, said sealing member sealed to said exterior surface of said laser cavity, said sealing member preventing said stator from being exposed to said gas; at least one non-contacting sensor adjustably mounted at a location proximate to said rotor and proximate to said stator, said sensor providing rotor information, said rotor information used to control a phase timing of the motor, wherein adjustment of said sensor location alters said sensor location relative to said stator, said adjustment changing said phase timing; and a rotatable end cap, said sensors coupled to said end cap, wherein adjustment of said sensor location is performed by rotating said end cap with respect to said stator, and wherein said end cap is finned for improved cooling.
Claim 16
Dependent Claim 239 words
A laser gas circulating system, comprising: a laser cavity; at least two discharge electrodes mounted within said laser cavity, said discharge electrodes defining a laser discharge area; a fan mounted within said laser cavity, said fan coupled to a drive shaft, said drive shaft extending through an exterior surface of said laser cavity, wherein said fan circulates a gas within said laser cavity through said laser discharge area; and a brushless DC motor mounted to said exterior surface of said laser cavity, said motor comprising: a rotor coupled to said fan drive shaft; a stator surrounding a central axis of said rotor; a sealing member interposed between said rotor and said stator, said sealing member partially enclosing said rotor, said sealing member sealed to said exterior surface of said laser cavity, said sealing member preventing said stator from being exposed to said gas; at least one non-contacting sensor adjustably mounted at a location proximate to said rotor and proximate to said stator, said sensor providing rotor information, said rotor information used to control a phase timing of the motor, wherein adjustment of said sensor location alters said sensor location relative to said stator, said adjustment changing said phase timing; and a rotatable end cap, said sensors coupled to said end cap, wherein adjustment of said sensor location is performed by rotating said end cap with respect to said stator, and wherein said end cap is finned for improved cooling.
Claim 17
Dependent Claim 240 words
A laser gas circulating system, comprising: a laser cavity; at least two discharge electrodes mounted within said laser cavity, said discharge electrodes defining a laser discharge area; a fan mounted within said laser cavity, said fan coupled to a drive shaft, said drive shaft extending through an exterior surface of said laser cavity, wherein said fan circulates a gas within said laser cavity through said laser discharge area; and a brushless DC motor mounted to said exterior surface of said laser cavity, said motor comprising: a rotor coupled to said fan drive shaft; a stator surrounding a central axis of said rotor; a sealing member interposed between said rotor and said stator, said sealing member partially enclosing said rotor, said sealing member sealed to said exterior surface of said laser cavity, said sealing member preventing said stator from being exposed to said gas; at least one non-contacting sensor adjustably mounted at a location proximate to said rotor and proximate to said stator, said sensor providing rotor information, said rotor information used to control a phase timing of the motor, wherein adjustment of said sensor location alters said sensor location relative to said stator, said adjustment changing said phase timing; and a rotatable end cap, said sensors coupled to said end cap, wherein adjustment of said sensor location is performed by rotating said end cap with respect to said stator, and wherein said end cap is actively cooled with thermoelectric coolers.
Claim 18
Dependent Claim 240 words
A laser gas circulating system, comprising: a laser cavity; at least two discharge electrodes mounted within said laser cavity, said discharge electrodes defining a laser discharge area; a fan mounted within said laser cavity, said fan coupled to a drive shaft, said drive shaft extending through an exterior surface of said laser cavity, wherein said fan circulates a gas within said laser cavity through said laser discharge area; and a brushless DC motor mounted to said exterior surface of said laser cavity, said motor comprising: a rotor coupled to said fan drive shaft; a stator surrounding a central axis of said rotor; a sealing member interposed between said rotor and said stator, said sealing member partially enclosing said rotor, said sealing member sealed to said exterior surface of said laser cavity, said sealing member preventing said stator from being exposed to said gas; at least one non-contacting sensor adjustably mounted at a location proximate to said rotor and proximate to said stator, said sensor providing rotor information, said rotor information used to control a phase timing of the motor, wherein adjustment of said sensor location alters said sensor location relative to said stator, said adjustment changing said phase timing; and a rotatable end cap, said sensors coupled to said end cap, wherein adjustment of said sensor location is performed by rotating said end cap with respect to said stator, and wherein said end cap is actively cooled with thermoelectric coolers.
Claim 19
Dependent Claim 213 words
A laser gas circulating system, comprising: a laser cavity; at least two discharge electrodes mounted within said laser cavity, said discharge electrodes defining a laser discharge area; a fan mounted within said laser cavity, said fan coupled to a drive shaft, said drive shaft extending through an exterior surface of said laser cavity, wherein said fan circulates a gas within said laser cavity through said laser discharge area; and a brushless DC motor mounted to said exterior surface of said laser cavity, said motor comprising: a rotor coupled to said fan drive shaft; a stator surrounding a central axis of said rotor; a sealing member interposed between said rotor and said stator, said sealing member partially enclosing said rotor, said sealing member sealed to said exterior surface of said laser cavity, said sealing member preventing said stator from being exposed to said gas; at least one non-contacting sensor adjustably mounted at a location proximate to said rotor and proximate to said stator, said sensor providing rotor information, said rotor information used to control a phase timing of the motor, wherein adjustment of said sensor location alters said sensor location relative to said stator, said adjustment changing said phase timing; and an insulator interposed between said non-contacting sensor and said rotor and said stator.
Claim 20
Dependent Claim 213 words
A laser gas circulating system, comprising: a laser cavity; at least two discharge electrodes mounted within said laser cavity, said discharge electrodes defining a laser discharge area; a fan mounted within said laser cavity, said fan coupled to a drive shaft, said drive shaft extending through an exterior surface of said laser cavity, wherein said fan circulates a gas within said laser cavity through said laser discharge area; and a brushless DC motor mounted to said exterior surface of said laser cavity, said motor comprising: a rotor coupled to said fan drive shaft; a stator surrounding a central axis of said rotor; a sealing member interposed between said rotor and said stator, said sealing member partially enclosing said rotor, said sealing member sealed to said exterior surface of said laser cavity, said sealing member preventing said stator from being exposed to said gas; at least one non-contacting sensor adjustably mounted at a location proximate to said rotor and proximate to said stator, said sensor providing rotor information, said rotor information used to control a phase timing of the motor, wherein adjustment of said sensor location alters said sensor location relative to said stator, said adjustment changing said phase timing; and an insulator interposed between said non-contacting sensor and said rotor and said stator.
Claim 21
Dependent Claim 17 words
The laser gas circulating system of claim 14, wherein said insulator is comprised of a polyimide material.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2001-06-22 2001-12-22 2002-06-23 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2005-06-22 2005-12-22 2006-06-23 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2009-06-22 2009-12-22 2010-06-23 $7700.00 Window Closed / Lapsed

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