US5844149A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for analyzing solid specimen and apparatus therefor
Assignee: JFE Steel Corp
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Filing: 1996-12-12
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Granted: 1998-12-01
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Expires: 2016-12-12
Abstract
Abstract A method for analyzing a solid specimen comprises the steps of: preparing a pulsed laser beam having a frequency of at least 100 Hz and a half width of 1 mu sec or less; determining a laser irradiation region; irradiating the pulsed laser beam in an inert gas stream and vaporizing a part of the solid specimen to generate fine particles; transferring said fine particles to a detector; and performing elemental analysis in the detector. An apparatus comprises: laser oscillating device including a semiconductor laser; converging device for converging a laser beam; irradiating device for irradiating the converged laser beam to generate fine particles; an analyzer for performing elemental analysis; and transfer device for transferring the fine particles to said analyzer.
Inventors
- 👤 Takanori Akiyoshi
- 👤 Akiko Sakashita
- 👤 Yohichi Ishibashi
- 👤 Tadashi Mochizuki
- 👤 Shigeomi Sato
- 👤 Toshiya Maekawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 15:11
CPC Classifications
G; G01; G01N; G01N21/00; G01N21/62; G01N21/71; G01N21/718; G01N1/00; G01N1/02; G01N1/22
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
166 words
A method for analyzing a solid specimen comprising the steps of: (a) preparing a pulsed laser beam having a frequency of at least 100 Hz and a half width of 1 μsec or less; (b) determining a laser irradiation region so that an energy density satisfies the following equation: Q>t.sup.1/2 ×α/r where Q represents the energy density (J/cm 2 ); t represents the pulse half width; α represents a parameter inherent in the solid specimen; and r represents an absorption coefficient of the laser beam; (c) irradiating the pulsed laser beam having said irradiation region on a surface of the solid specimen in an inert gas stream and vaporizing a part of the solid specimen to generate fine particles; (d) repeating the step (c) on the same surface that the pulsed laser beam is irradiated at the step (c) to generate further fine particles; (e) transferring said fine particles formed in steps (c) and (d) to a detector; and (f) performing elemental analysis in the detector.
Claim 2
Independent Claim
166 words
A method for analyzing a solid specimen comprising the steps of: (a) preparing a pulsed laser beam having a frequency of at least 100 Hz and a half width of 1 μsec or less; (b) determining a laser irradiation region so that an energy density satisfies the following equation: Q>t.sup.1/2 ×α/r where Q represents the energy density (J/cm 2 ); t represents the pulse half width; α represents a parameter inherent in the solid specimen; and r represents an absorption coefficient of the laser beam; (c) irradiating the pulsed laser beam having said irradiation region on a surface of the solid specimen in an inert gas stream and vaporizing a part of the solid specimen to generate fine particles; (d) repeating the step (c) on the same surface that the pulsed laser beam is irradiated at the step (c) to generate further fine particles; (e) transferring said fine particles formed in steps (c) and (d) to a detector; and (f) performing elemental analysis in the detector.
Claim 3
Dependent Claim
31 words
A method according to claim 1, wherein the step (c) of irradiating the pulsed laser beam comprises irradiating the pulsed laser beam from a laser oscillating means including a semiconductor laser.
Claim 4
Dependent Claim
56 words
A method according to claim 2, wherein said laser oscillating means comprises: a semiconductor laser for emitting the laser beam; a laser rod for receiving the laser beam from said semiconductor laser and oscillating a single mode laser beam by optical amplification; and an optical transfer cable for connecting said semiconductor laser with said laser rod.
Claim 5
Dependent Claim
49 words
A method according to claim 2, wherein said laser oscillating means comprises: a semiconductor laser for emitting a laser beam as pumping light; a laser rod for receiving and optically amplifying said laser beam from said semiconductor laser; and resonators arranged at the both sides of said laser rod.
Claim 6
Dependent Claim
26 words
A method according to claim 4, wherein said laser oscillating means further comprises an optical transfer cable for connecting said semiconductor laser with said laser rod.
Claim 7
Dependent Claim
34 words
A method according to claim 1, wherein the step (c) of irradiating the pulsed laser beam comprises irradiating the pulsed laser beam by scanning two-dimensionally so that the irradiation regions are overlapped each other.
Claim 8
Dependent Claim
19 words
A method according to claim 1, wherein said laser irradiation region has a diameter of 10 to 500 μm.
Claim 9
Dependent Claim
22 words
A method according to claim 1, wherein the step (d) of repeating the step (c) is carried out at least two times.
Claim 10
Independent Claim
130 words
A method for analyzing a solid specimen including an element in the form of a solid solution and the element in the form of a compound, comprising the steps of: continuously moving a position of a solid specimen to be analyzed at a predetermined speed; irradiating a pulsed laser beam on the solid specimen to generate fine particles; repeatedly measuring a composition of the fine particles at a minute time interval to obtain a plurality of momentary values, the momentary values being of a waveform having peaks and troughs; determining an amount of the element existing in the form of the solid solution based on the momentary values of the troughs; and determining an amount of the element existing in the form of the compound based on the momentary values.
Claim 11
Independent Claim
130 words
A method for analyzing a solid specimen including an element in the form of a solid solution and the element in the form of a compound, comprising the steps of: continuously moving a position of a solid specimen to be analyzed at a predetermined speed; irradiating a pulsed laser beam on the solid specimen to generate fine particles; repeatedly measuring a composition of the fine particles at a minute time interval to obtain a plurality of momentary values, the momentary values being of a waveform having peaks and troughs; determining an amount of the element existing in the form of the solid solution based on the momentary values of the troughs; and determining an amount of the element existing in the form of the compound based on the momentary values.
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