Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
178 words
A method for analyzing solid sample comprising the steps of: positioning a solid sample in a cell; introducing an inert carrier gas into the cell, said carrier gas having a carbon content of 1 ppm or less as impurity; a preliminary treatment step of irradiating laser beam to a sample surface of the solid sample in the inert carrier gas, said laser beam having a pulse half width of 0.001 μsec or more, a pulse energy density of 0.001 GW/cm 2 or more, and a frequency of 100 Hz or more; generating fine particles in the inert carrier gas on a condition that a rate of fine particles generation, V (μg/sec), and selection ratio, S, satisfy the following equations, the selection ratio being a ratio of a concentration of a target element for analysis within the fine particles to a concentration of the target element for analysis within the solid sample; S≦0.25 log V+1.5, S≧-0.2 log V+0.6, 0.1≦V≦100 intoducing the generated fine particles to a detector; and analyzing the concentration of the target element within the fine particles.
Claim 2
Independent Claim
178 words
A method for analyzing solid sample comprising the steps of: positioning a solid sample in a cell; introducing an inert carrier gas into the cell, said carrier gas having a carbon content of 1 ppm or less as impurity; a preliminary treatment step of irradiating laser beam to a sample surface of the solid sample in the inert carrier gas, said laser beam having a pulse half width of 0.001 μsec or more, a pulse energy density of 0.001 GW/cm 2 or more, and a frequency of 100 Hz or more; generating fine particles in the inert carrier gas on a condition that a rate of fine particles generation, V (μg/sec), and selection ratio, S, satisfy the following equations, the selection ratio being a ratio of a concentration of a target element for analysis within the fine particles to a concentration of the target element for analysis within the solid sample; S≦0.25 log V+1.5, S≧-0.2 log V+0.6, 0.1≦V≦100 intoducing the generated fine particles to a detector; and analyzing the concentration of the target element within the fine particles.
Claim 3
Dependent Claim
44 words
The method of claim 1, wherein the step of generating fine particles is carried out by irradiating laser beam having a pulse half width of 0.05-0.5 μsec, a pulse energy density of 0.01-50 GW/cm 2 , and a frequency of 100 Hz or more.
Claim 4
Dependent Claim
34 words
The method of claim 2, wherein the laser beam is irradiated while moving a focusing point of the laser beam at a speed of 0.1 mm/sec or more in parallel to the sample surface.
Claim 5
Dependent Claim
26 words
The method of claim 3, wherein the moving of the focusing point is carried out by moving a forcusing lens in parallel to the sample surface.
Claim 6
Dependent Claim
20 words
The method of claim 3, wherein the moving of the focusing point is carried out by rotating a reflection mirror.
Claim 7
Dependent Claim
20 words
The method of claim 1, wherein the inert carrier gas is a gas purified by a getter gas purification device.
Claim 8
Dependent Claim
36 words
The method of claim 1, wherein the inert carrier gas is introduced to the cell through a gas piping system which is made of at least one selected from the group consisting of metal and glass.