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US5844125A
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Method and apparatus for measuring moisture content in a gas
Assignee: Entegris Inc
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Filing: 1997-10-01
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Granted: 1998-12-01
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Expires: 2017-10-01
Abstract
Abstract A device for measuring moisture concentration in a gas is provided which includes a sensing device capable of producing physical response to an energy input and having at least one surface coated with a metal hydroxide capable of adsorbing moisture. The metal hydroxide is derived from a metal coating on the sensing device.
Inventors
- 👤 John E. Pillion
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 21:15
CPC Classifications
G; G01; G01N; G01N27/00; G01N29/00; G01N29/02; G01N29/022; G01N29/036; G01N2291/00; G01N2291/02; G01N2291/028; G01N2291/02845
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
90 words
A sensing device for measuring water content in a stream of gas which comprises: a sensing device having an effective mass of a coating of a metal hydroxide composition of material formed in-situ derived from a metal composition by a conversion reaction of the metal composition with moisture in said gas stream, said coating having a mass which permits said material to produce a measurable physical response to energy input to said sensing device and means for applying energy to said sensing device and means for measuring said physical response.
Claim 2
Dependent Claim
90 words
A sensing device for measuring water content in a stream of gas which comprises: a sensing device having an effective mass of a coating of a metal hydroxide composition of material formed in-situ derived from a metal composition by a conversion reaction of the metal composition with moisture in said gas stream, said coating having a mass which permits said material to produce a measurable physical response to energy input to said sensing device and means for applying energy to said sensing device and means for measuring said physical response.
Claim 3
Dependent Claim
16 words
The device of claim 1 wherein said sensing device has said coating on two opposing surfaces.
Claim 4
Dependent Claim
13 words
The device of claim 1 wherein said sensing device is a piezoelectric material.
Claim 5
Dependent Claim
13 words
The device of claim 2 wherein said sensing device is a piezoelectric material.
Claim 6
Dependent Claim
11 words
The device of claim 1 wherein said coating is barium hydroxide.
Claim 7
Dependent Claim
11 words
The device of claim 2 wherein said coating is barium hydroxide.
Claim 8
Dependent Claim
11 words
The device of claim 3 wherein said coating is barium hydroxide.
Claim 9
Dependent Claim
11 words
The device of claim 4 wherein said coating is barium hydroxide.
Claim 10
Dependent Claim
23 words
The device of claim 1 wherein said coating includes a layer of protective material between said metal hydroxide coating and said sensing device.
Claim 11
Dependent Claim
23 words
The device of claim 2 wherein said coating includes a layer of protective material between said metal hydroxide coating and said sensing device.
Claim 12
Dependent Claim
23 words
The device of claim 3 wherein said coating includes a layer of protective material between said metal hydroxide coating and said piezoelectric material.
Claim 13
Independent Claim
105 words
The method for measuring water content in a gas stream which comprises contacting said gas stream with a sensing device having an effective mass of a metal hydroxide coating formed in-situ derived from a metal composition of material by a conversion reaction of the metal composition with moisture in said gas stream, said coating having a mass which permits said material to produce a measurable physical response to energy input to said sensing device, applying energy to said sensing device, and measuring said physical response and comparing said physical response to a standard relationship correlating said physical response to moisture content in said gas stream.
Claim 14
Independent Claim
105 words
The method for measuring water content in a gas stream which comprises contacting said gas stream with a sensing device having an effective mass of a metal hydroxide coating formed in-situ derived from a metal composition of material by a conversion reaction of the metal composition with moisture in said gas stream, said coating having a mass which permits said material to produce a measurable physical response to energy input to said sensing device, applying energy to said sensing device, and measuring said physical response and comparing said physical response to a standard relationship correlating said physical response to moisture content in said gas stream.
Claim 15
Dependent Claim
13 words
The method of claim 12 wherein said sensing device is a piezoelectric crystal.
Claim 16
Dependent Claim
26 words
The method of claim 12 wherein said sensing device is a capacitor having two plates and said metal hydroxide coating is positioned between said two plates.
Claim 17
Dependent Claim
11 words
The method of claim 12 wherein said coating is barium hydroxide.
Claim 18
Dependent Claim
21 words
The method of claim 12 wherein said coating includes a protective layer between said metal hydroxide coating and said sensing device.
Claim 19
Dependent Claim
11 words
The method of claim 13 wherein said coating is barium hydroxide.
Claim 20
Dependent Claim
21 words
The method of claim 13 wherein said coating includes a protective layer between said metal hydroxide coating and said sensing device.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-11-30 | 2002-06-01 | 2002-12-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-11-30 | 2006-06-01 | 2006-12-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-11-30 | 2010-06-01 | 2010-12-01 | $7700.00 | Window Closed / Lapsed |