Patent US5841660A successfully refreshed from Google Patents.
US5841660A
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US
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Method and apparatus for modeling process control
Assignee: NXP USA Inc
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Filing: 1996-02-20
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Granted: 1998-11-24
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Expires: 2016-02-20
Abstract
Abstract A method for process control which uses discrete lots in which each lot is uniquely identified. The process is modeled with a precedence rule which allows concurrent processing of each discrete lot. Lots are processed simultaneously within different processing steps in such a way as to maintain the unity of the lot while tracking the lot at all times during processing.
Inventors
- 👤 Jeffrey A. Robinson
- 👤 Udey Chaudhry
- 👤 Timothy L. Olson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 11:11
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/06; H10P72/0618; G; G05; G05B; G05B19/00; G05B19/02; G05B19/418; G05B19/41865; H10P72/0612; G05B2219/00; G05B2219/30; G05B2219/31; G05B2219/31428; G05B2219/32; G05B2219/32263; G05B2219/32274; Y; Y02; Y02P; Y02P90/00; Y02P90/02
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
120 words
A computer implemented method for modeling process tracking and control, including the steps of: selecting a lot for tracking where said lot has a plurality of units identified by a first lot identifier; selecting a process model of said lot from the computer; providing a plurality of rules of precedence to control process flow; applying one of the plurality of rules of precedence for linking a plurality of recordable process steps in said process model so that said lot resides at multiple locations in said plurality of recordable process steps while maintaining identification of said lot by said first lot identifier without splitting said lot into sublots; and updating a database within the computer to reflect said rule of precedence.
Claim 2
Dependent Claim
120 words
A computer implemented method for modeling process tracking and control, including the steps of: selecting a lot for tracking where said lot has a plurality of units identified by a first lot identifier; selecting a process model of said lot from the computer; providing a plurality of rules of precedence to control process flow; applying one of the plurality of rules of precedence for linking a plurality of recordable process steps in said process model so that said lot resides at multiple locations in said plurality of recordable process steps while maintaining identification of said lot by said first lot identifier without splitting said lot into sublots; and updating a database within the computer to reflect said rule of precedence.
Claim 3
Dependent Claim
41 words
The computer implemented method of claim 1, further including the steps of: applying a rule of multiplicity for linking said plurality of process steps in said process model; and updating said database within the computer to reflect said rule of multiplicity.
Claim 4
Dependent Claim
24 words
The computer implemented method of claim 1, wherein said step of applying a rule of precedence includes the step of selecting a start-start rule.
Claim 5
Dependent Claim
47 words
The computer implemented method of claim 3 further including the steps of: applying a one to many rule of multiplicity for linking said plurality of process steps in said process model; and updating said database within the computer to reflect said one to many rule of multiplicity.
Claim 6
Dependent Claim
47 words
The computer implemented method of claim 3 further including the steps of: applying a one to one rule of multiplicity for linking said plurality of process steps in said process model; and updating said database within the computer to reflect said one to one rule of multiplicity.
Claim 7
Dependent Claim
47 words
The computer implemented method of claim 3 further including the steps of: applying a many to one rule of multiplicity for linking said plurality of process steps in said process model; and updating said database within the computer to reflect said many to one rule of multiplicity.
Claim 8
Dependent Claim
24 words
The computer implemented method of claim 1, wherein said step of applying a rule of precedence includes the step of selecting a start-finish rule.
Claim 9
Dependent Claim
24 words
The computer implemented method of claim 1, wherein said step of applying a rule of precedence includes the step of selecting a finish-finish rule.
Claim 10
Independent Claim
125 words
An apparatus for modeling process tracking and control, comprising: means for selecting a lot for tracking where said lot has a plurality of units identified by a first lot identifier; means for selecting a process model of said lot from a computer; means for providing a plurality of rules of precedence to control process flow; means for applying one of the plurality of rules of precedence for linking a plurality of recordable process steps in said process model so that said lot resides at multiple locations in said plurality of recordable process steps while maintaining identification of said lot by said first lot identifier without splitting said lot into sublots; and means for updating a database within said computer to reflect said rule of precedence.
Claim 11
Independent Claim
125 words
An apparatus for modeling process tracking and control, comprising: means for selecting a lot for tracking where said lot has a plurality of units identified by a first lot identifier; means for selecting a process model of said lot from a computer; means for providing a plurality of rules of precedence to control process flow; means for applying one of the plurality of rules of precedence for linking a plurality of recordable process steps in said process model so that said lot resides at multiple locations in said plurality of recordable process steps while maintaining identification of said lot by said first lot identifier without splitting said lot into sublots; and means for updating a database within said computer to reflect said rule of precedence.
Claim 12
Dependent Claim
109 words
A computer implemented method for modeling process tracking and control, including the steps of: selecting a lot for tracking where said lot has a plurality of units identified by a first lot identifier; selecting a concurrent process model of said lot from the computer; applying a start-start rule of precedence for linking a plurality of recordable process steps in said concurrent process model so that said lot resides at multiple locations in said plurality of recordable process steps while maintaining identification of said lot by said first lot identifier without splitting said lot into sublots; and updating a database within the computer to reflect said start-start rule of precedence.
Claim 13
Dependent Claim
109 words
A computer implemented method for modeling process tracking and control, including the steps of: selecting a lot for tracking where said lot has a plurality of units identified by a first lot identifier; selecting a concurrent process model of said lot from the computer; applying a start-start rule of precedence for linking a plurality of recordable process steps in said concurrent process model so that said lot resides at multiple locations in said plurality of recordable process steps while maintaining identification of said lot by said first lot identifier without splitting said lot into sublots; and updating a database within the computer to reflect said start-start rule of precedence.
Claim 14
Dependent Claim
96 words
A computer implemented method for modeling a semiconductor manufacturing process, comprising the steps of: processing a lot comprising a plurality of semiconductor devices where the lot is identified by a first lot identifier through a plurality of process steps; providing a plurality of rules of precedence to control process flow; and selecting one from among the plurality of rules of precedence to control process flow of the lot between first and second steps of the plurality of processing steps while maintaining identification of the lot comprising the plurality of semiconductor devices by the first lot identifier.
Claim 15
Dependent Claim
96 words
A computer implemented method for modeling a semiconductor manufacturing process, comprising the steps of: processing a lot comprising a plurality of semiconductor devices where the lot is identified by a first lot identifier through a plurality of process steps; providing a plurality of rules of precedence to control process flow; and selecting one from among the plurality of rules of precedence to control process flow of the lot between first and second steps of the plurality of processing steps while maintaining identification of the lot comprising the plurality of semiconductor devices by the first lot identifier.
Claim 16
Dependent Claim
35 words
The computer implemented method of claim 11 wherein one of the plurality of rules of precedence includes starting a unit of the lot in the second step once the lot has finished the first step.
Claim 17
Dependent Claim
39 words
The computer implemented method of claim 11 wherein one of the plurality of rules of precedence includes starting a unit of the lot in the second step after having started a unit of the lot in the first step.
Claim 18
Dependent Claim
32 words
The computer implemented method of claim 11 wherein one of the plurality of rules of precedence includes finishing the lot in the first step before finishing the lot in the second step.
Claim 19
Dependent Claim
35 words
The computer implemented method of claim 11 wherein one of the plurality of rules of precedence includes starting a unit of the lot in the second step before finishing the lot in the first step.
Claim 20
Dependent Claim
95 words
A computer implemented method of manufacturing a semiconductor device, comprising the steps of: processing a lot comprising a plurality of semiconductor devices where the lot is identified by a first lot identifier through a plurality of process steps; providing a plurality of rules of precedence to control process flow; and selecting one from among the plurality of rules of precedence to control process flow of the lot between first and second steps of the plurality of processing steps while maintaining identification of the lot comprising the plurality of semiconductor devices by the first lot identifier.
Claim 21
Dependent Claim
95 words
A computer implemented method of manufacturing a semiconductor device, comprising the steps of: processing a lot comprising a plurality of semiconductor devices where the lot is identified by a first lot identifier through a plurality of process steps; providing a plurality of rules of precedence to control process flow; and selecting one from among the plurality of rules of precedence to control process flow of the lot between first and second steps of the plurality of processing steps while maintaining identification of the lot comprising the plurality of semiconductor devices by the first lot identifier.
Claim 22
Dependent Claim
35 words
The computer implemented method of claim 16 wherein one of the plurality of rules of precedence includes starting a unit of the lot in the second step once the lot has finished the first step.
Claim 23
Dependent Claim
39 words
The computer implemented method of claim 16 wherein one of the plurality of rules of precedence includes starting a unit of the lot in the second step after having started a unit of the lot in the first step.
Claim 24
Dependent Claim
32 words
The computer implemented method of claim 16 wherein one of the plurality of rules of precedence includes finishing the lot in the first step before finishing the lot in the second step.
Claim 25
Dependent Claim
35 words
The computer implemented method of claim 16 wherein one of the plurality of rules of precedence includes starting a unit of the lot in the second step before finishing the lot in the first step.
Claim 26
Dependent Claim
102 words
A computer implemented method for modeling a semiconductor manufacturing process, comprising the steps of: processing a lot comprising a plurality of semiconductor devices where the lot is identified by a first lot identifier through a plurality of process steps; and applying a start-start rule of precedence in which with a first semiconductor device of the lot residing at a first step of the plurality of process steps a second semiconductor device of the lot starts a second step of the plurality of process steps while maintaining identification of the lot comprising the first and second semiconductor devices by the first lot identifier.
Claim 27
Dependent Claim
102 words
A computer implemented method for modeling a semiconductor manufacturing process, comprising the steps of: processing a lot comprising a plurality of semiconductor devices where the lot is identified by a first lot identifier through a plurality of process steps; and applying a start-start rule of precedence in which with a first semiconductor device of the lot residing at a first step of the plurality of process steps a second semiconductor device of the lot starts a second step of the plurality of process steps while maintaining identification of the lot comprising the first and second semiconductor devices by the first lot identifier.
Claim 28
Dependent Claim
75 words
The computer implemented method of claim 21 further including the steps of: providing a plurality of rules of precedence including the start-start rule of precedence to control process flow; and selecting one from among the plurality of rules of precedence to control process flow of the lot between third and fourth steps of the plurality of processing steps while maintaining identification of the lot comprising the plurality of semiconductor devices by the first lot identifier.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-11-23 | 2002-05-25 | 2002-11-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-11-23 | 2006-05-25 | 2006-11-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-11-23 | 2010-05-25 | 2010-11-24 | $7700.00 | Window Closed / Lapsed |