US5841186A
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Composite dielectric films
Assignee: United Microelectronics Corp
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Filing: 1997-08-19
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Granted: 1998-11-24
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Expires: 2017-08-19
Abstract
Abstract Composite TiO 2 /Ta 2 O 5 films by in-situ sequential CVD deposition are presented for a storage capacitor of a three-dimensional cell in DRAM applications. The capacitor with the Ta 2 O 5 /TiO 2 /Ta 2 O 5 alternating layer structure has comparable leakage current density and higher capacitance per unit area as compared to a capacitor with Ta 2 O 5 and TiO 2 single layer structures.
Inventors
- 👤 Shi-Chung Sun
- 👤 Tsai-Fu Chen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 05:46
CPC Classifications
H; H10; H10D; H10D1/00; H10D1/60; H10D1/68
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
55 words
A composite dielectric film comprising: an n+ polysilicon phosphorus-doped bottom electrode formed using rapid thermal nitration in ammonia at about 900° C. for about 60 seconds; a titanium dioxide layer on the n + Polysilicon bottom electrode; a tantalum Pentaoxide layer on the titanium dioxide layer; and a top electrode over the tantalum pentaoxide layer.
Claim 2
Dependent Claim
55 words
A composite dielectric film comprising: an n+ polysilicon phosphorus-doped bottom electrode formed using rapid thermal nitration in ammonia at about 900° C. for about 60 seconds; a titanium dioxide layer on the n + Polysilicon bottom electrode; a tantalum Pentaoxide layer on the titanium dioxide layer; and a top electrode over the tantalum pentaoxide layer.
Claim 3
Dependent Claim
81 words
A composite dielectric film comprising: an n+ Polysilicon bottom electrode; a titanium dioxide layer formed on the n+ polysilicon bottom electrode using low pressure chemical vapor deposition: from a mixture of tetra-isopropyl-titanate and oxygen gas; vaporizing the tetra-isopropyl-titanate at about 60° C., and introducing the vaporized tetra-isopropyl-titanate into a reactor chamber using argon gas; and at a deposition temperature of about 450° C.; a tantalum pentaoxide layer on the titanium dioxide layer; and a top electrode over the tantalum pentaoxide layer.
Claim 4
Dependent Claim
81 words
A composite dielectric film comprising: an n+ Polysilicon bottom electrode; a titanium dioxide layer formed on the n+ polysilicon bottom electrode using low pressure chemical vapor deposition: from a mixture of tetra-isopropyl-titanate and oxygen gas; vaporizing the tetra-isopropyl-titanate at about 60° C., and introducing the vaporized tetra-isopropyl-titanate into a reactor chamber using argon gas; and at a deposition temperature of about 450° C.; a tantalum pentaoxide layer on the titanium dioxide layer; and a top electrode over the tantalum pentaoxide layer.
Claim 5
Dependent Claim
91 words
A composite dielectric film according to claim 1, comprising: an n+ Polysilicon bottom electrode; a titanium dioxide layer on the n+ polysilicon bottom electrode; a tantalum pentaoxide layer formed on the titanium dioxide layer using low pressure chemical vapor deposition: from a mixture of pentaethoxy tantalum and oxygen gas; vaporizing the pentaethoxy tantalum at a temperature of about 100° C., and introducing the vaporized pentaethoxy tantalum into a reactor chamber using argon gas; and at a deposition temperature of about 350° C., and a top electrode over the tantalum pentaoxide layer.
Claim 6
Dependent Claim
23 words
The composite dielectric film according to claim 1, wherein the top electrode is a reactively sputtered and deposited titanium nitride and aluminum electrode.
Claim 7
Dependent Claim
57 words
A composite dielectric film, comprising: a phosphorus doped polysilicon bottom electrode; a first titanium dioxide layer on the phosphorus doped polysilicon bottom electrode; a tantalum pentaoxide layer on the first titanium dioxide layer; a second titanium dioxide layer on the tantalum pentaoxide layer; and a titanium nitride and aluminum top electrode over the second titanium dioxide layer.
Claim 8
Dependent Claim
57 words
A composite dielectric film, comprising: a phosphorus doped polysilicon bottom electrode; a first titanium dioxide layer on the phosphorus doped polysilicon bottom electrode; a tantalum pentaoxide layer on the first titanium dioxide layer; a second titanium dioxide layer on the tantalum pentaoxide layer; and a titanium nitride and aluminum top electrode over the second titanium dioxide layer.
Claim 9
Dependent Claim
57 words
A composite dielectric film, comprising: a phosphorus doped polysilicon bottom electrode; a first tantalum pentaoxide layer on the phosphorus doped polysilicon bottom electrode; a titanium dioxide layer on the first tantalum pentaoxide layer; a second tantalum pentaoxide layer on the titanium dioxide layer; and a titanium nitride and aluminum top electrode over the second tantalum pentaoxide layer.
Claim 10
Dependent Claim
57 words
A composite dielectric film, comprising: a phosphorus doped polysilicon bottom electrode; a first tantalum pentaoxide layer on the phosphorus doped polysilicon bottom electrode; a titanium dioxide layer on the first tantalum pentaoxide layer; a second tantalum pentaoxide layer on the titanium dioxide layer; and a titanium nitride and aluminum top electrode over the second tantalum pentaoxide layer.
Claim 11
Dependent Claim
23 words
The composite dielectric film according to claim 2, wherein the top electrode is a reactively sputtered and deposited titanium nitride and aluminum electrode.
Claim 12
Dependent Claim
23 words
The composite dielectric film according to claim 3, wherein the top electrode is a reactively sputtered and deposited titanium nitride and aluminum electrode.
References Cited (Backward Citations)
US4987102A
Cited
US5406446A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2001-11-23 | 2002-05-25 | 2002-11-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-11-23 | 2006-05-25 | 2006-11-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-11-23 | 2010-05-25 | 2010-11-24 | $7700.00 | Window Closed / Lapsed |