Patent US5841110A successfully refreshed from Google Patents.
US5841110A
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Method and apparatus for improved temperature control in rapid thermal processing (RTP) systems
Assignee: Mattson Thermal Products GmbH
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Filing: 1997-08-27
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Granted: 1998-11-24
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Expires: 2017-08-27
Abstract
Abstract A method for Rapid Thermal Processing (RTP) is presented, wherein the broadband reflectivity of an object is measured, and the results of the measurement used by the RTP system to adjust the RTP system parameters used in processing the object.
Inventors
- 👤 Zsolt Nenyei
- 👤 Heinrich Walk
- 👤 Michael Maurer
- 👤 Thomas Knarr
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 21:02
CPC Classifications
G; G01; G01J; G01J5/00; B; B23; B23K; B23K1/00; B23K1/012; B23K1/015; B23K2101/00; B23K2101/36; B23K2101/40
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
53 words
A method of rapid thermal processing (RTP) of an object using an RTP system, the object having a surface with a reflectivity, comprising; measuring the--spectrally integrated--reflectivity of the surface of the object in a broad band of wavelengths; and adjusting a system parameter of the RTP system in response to the measured--spectrally integrated--reflectivity.
Claim 2
Independent Claim
53 words
A method of rapid thermal processing (RTP) of an object using an RTP system, the object having a surface with a reflectivity, comprising; measuring the--spectrally integrated--reflectivity of the surface of the object in a broad band of wavelengths; and adjusting a system parameter of the RTP system in response to the measured--spectrally integrated--reflectivity.
Claim 3
Dependent Claim
26 words
The method of claim 1, where the system parameter is an emissivity correction to an optical pyrometer, the optical pyrometer measuring the temperature of the object.
Claim 4
Dependent Claim
25 words
The method of claim 1, where the system parameter is a calibration file to calibrate a temperature measurement of the object by an optical pyrometer.
Claim 5
Dependent Claim
23 words
The method of claim 1, where the system parameter is file of lamp power vs time settings for an "open loop" heating cycle.
Claim 6
Dependent Claim
47 words
The method of claim 1, where the RTP system further comprises an auxiliary plate between the object and at least one heating lamp of the system, and the system parameter comprises a file of temperature of the object as a function of temperature of the auxiliary plate.
Claim 7
Dependent Claim
45 words
The method of claim 1, where the RTP system further comprises an auxiliary plate between the object and at least one heating lamp of the system, and the system parameter is a file of lamp power vs time settings for an "open loop" heating cycle.
Claim 8
Dependent Claim
18 words
The method of claim 1, where the reflectivity is measured in the process line as an ex-situ process.
Claim 9
Dependent Claim
18 words
The method of claim 1, where the reflectivity is measured in the process line as an in-situ process.
Claim 10
Independent Claim
85 words
A method of rapid thermal processing (RTP) of an object using an RTP system, the object having a surface with a reflectivity, comprising the following steps in order; a) introducing the object into a reaction chamber of an RTP system; b) irradiating the object with radiation from radiation sources of the RTP system; c) measuring the--spectrally integrated--reflectivity of the surface of the object in a broad band of wavelengths; and d) adjusting a system parameter of the RTP system in response to the measured reflectivity.
Claim 11
Independent Claim
85 words
A method of rapid thermal processing (RTP) of an object using an RTP system, the object having a surface with a reflectivity, comprising the following steps in order; a) introducing the object into a reaction chamber of an RTP system; b) irradiating the object with radiation from radiation sources of the RTP system; c) measuring the--spectrally integrated--reflectivity of the surface of the object in a broad band of wavelengths; and d) adjusting a system parameter of the RTP system in response to the measured reflectivity.
Claim 12
Dependent Claim
21 words
The method of claim 9 further comprising; e) further irradiating the object with radiation from radiation sources of the RTP system.
Claim 13
Dependent Claim
17 words
The method of claim 10, where the irradiation from the irradiation sources is reduced during step c).
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-11-23 | 2002-05-25 | 2002-11-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-11-23 | 2006-05-25 | 2006-11-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-11-23 | 2010-05-25 | 2010-11-24 | $7700.00 | Window Closed / Lapsed |