US5840897A
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Metal complex source reagents for chemical vapor deposition
Assignee: Entegris Inc
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Filing: 1995-06-07
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Granted: 1998-11-24
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Expires: 2015-06-07
Abstract
Abstract A metalorganic complex of the formula:MAyXwherein: M is a y-valent metal; A is a monodentate or multidentate organic ligand coordinated to M which allows complexing of MAy with X; y is an integer having a value of 2, 3 or 4; each of the A ligands may be the same or different; and X is a monodentate or multidentate ligand coordinated to M and containing one or more atoms independently selected from the group consisting of atoms of the elements C, N, H, S, O and F. The metal M may be selected from the group consisting of Cu, Ba, Sr, La, Nd, Ce, Pr, Sm, Eu, Th, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu, Bi, Tl, Y, Pb, Ni, Pd, Pt, Al, Ga, In, Ag, Au, Co, Rh, Ir, Fe, Ru, Sn, Li, Na, K, Rb, Cs, Ca, Mg, Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, and W. A may be selected from the group consisting of beta -diketonates and their sulfur and nitrogen analogs, beta -ketoesters and their sulfur and nitrogen analogs, cyclopentadienyls, alkyls, perfluoroalkyls, alkoxides, perfluoroalkoxides, and Schiff bases. X may for example comprise a ligand such as tetraglyme, tetrahydrofuran, bipyridine, crown ether, or thioether.
Inventors
- 👤 Peter S. Kirlin
- 👤 Duncan W. Brown
- 👤 Thomas H. Baum
- 👤 Brian A. Vaarstra
- 👤 Robin A. Gardiner
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:00
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/06; C23C16/18; C07; C07F; C07F5/00; C06; C06F; C06F5/00; C07D; C07D213/00; C07D213/02; C07D213/04; C07D213/06; C07D213/22; C07F19/00; C07F19/005; C07F3/00; C07F3/003; C07F5/003; C07F7/00; C07F7/003; C07F9/00; C07F9/005; C23C16/22; C23C16/30; C23C16/305; C23C16/40; C23C16/408; C23C16/409; C23C16/44; C23C16/448; C23C16/4481; C23C16/4483; C23C16/455; C23C16/45561; H; H01; H01B; H01B12/00; H10; H10N; H10N60/00; H10N60/01; H10N60/0268; H10N60/0296; H10N60/0436; H10N60/0464
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
109 words
A metalorganic complex of the formula: MA.sub.y X wherein: M is a y-valent metal selected from the group consisting of Pd, Pt, Rh, Ir, Ru, V, Nb, Ta, Cr, Mo, and W; A is a monodentate or multidentate organic ligand coordinated to M which allows complexing of MA y with X; y is an integer having a value of 2, 3 or 4; each of the A ligands may be the same or different; and X is a monodentate or multidentate ligand coordinated to M and containing one or more atoms independently selected from the group consisting of atoms of the elements C, N, H, S, O and F.
Claim 2
Dependent Claim
109 words
A metalorganic complex of the formula: MA.sub.y X wherein: M is a y-valent metal selected from the group consisting of Pd, Pt, Rh, Ir, Ru, V, Nb, Ta, Cr, Mo, and W; A is a monodentate or multidentate organic ligand coordinated to M which allows complexing of MA y with X; y is an integer having a value of 2, 3 or 4; each of the A ligands may be the same or different; and X is a monodentate or multidentate ligand coordinated to M and containing one or more atoms independently selected from the group consisting of atoms of the elements C, N, H, S, O and F.
Claim 3
Dependent Claim
37 words
A complex according to claim 1, wherein A is selected from the group consisting of β-diketonates and their sulfur and nitrogen analogs, β-ketoesters and their sulfur and nitrogen analogs, cyclopentadienyls, alkyls, perfluoroalkyls, alkoxides, perfluoroalkoxides, and Schiff bases.
Claim 4
Dependent Claim
21 words
A complex according to claim 1, wherein A is selected from the group consisting of β-diketonates, β-thioketonates, β-ketoesters, β-thioesters, and cyclopentadienyls.
Claim 5
Dependent Claim
11 words
A complex according to claim 1, wherein A is a β-diketonate.
Claim 6
Dependent Claim
38 words
A complex according to claim 1, wherein A is selected from the group consisting of: (i) 2,2,6,6-tetramethyl-3,5-heptanedionate; (ii) 1,1,1,5,5,5-hexafluoro-2,4-pentanedionate; (iii) 1,1,1,2,2,3,3-heptafluoro-7,7-dimethyl-4,6-octanedionate; (iv) cyclopentadienyl; (v) 4,4'-(ethane-1,2-diyldiimino) bis (3-pentene-2-one); (vi) pentamethylcyclopentadienyl and other substituted cyclopentadienyls; (vii) 2,4-pentanedionate; and (viii) 1,1,1-trifluoro-2,4-pentanedionate.
Claim 7
Dependent Claim
29 words
A compound according to claim 1, wherein X is selected from the group consisting of: (i) oxyhydrocarbyl ligands; (ii) nitrogenous oxyhydrocarbyl ligands; (iii) fluorooxyhydrocarbyl ligands; and (iv) thiooxyhydrocarbyl ligands.
Claim 8
Dependent Claim
126 words
A complex according to claim 1, wherein X is selected from the group consisting of: (a) amines and polyamines; (b) bipyridines; (c) ligands of the formula: ##STR2## wherein G is --O--, --S--, or --NR--, wherein R is H or hydrocarbyl; (d) crown ethers; (e) thioethers; and (f) ligands of the formula: R.sup.0 (C(R.sup.1).sub.2 C(R.sup.2).sub.2 O).sub.n R.sup.0 wherein: R 0 =H, methyl, ethyl, n-propyl, cyanato, perfluoroethyl, perfluoro-n-propyl, or vinyl; R 1 =H, F, or a sterically acceptable hydrocarbyl substituent; R 2 =H, F, or a sterically acceptable hydrocarbyl substituent; n=2, 3, 4, 5, or 6; and each R 0 , R 1 , and R 2 may be the same as or different from the other R 0 , R 1 , and R 2 , respectively.
Claim 9
Dependent Claim
26 words
A complex according to claim 1, wherein X is selected from the group consisting of tetraglyme, tetrahydrofuran, bipydridine, 18-crown-6 ethers, and sulfur analogs of the foregoing.
Claim 10
Dependent Claim
23 words
A complex according to claim 1, wherein: A is a β-diketonate; and X is tetraglyme, 18-crown-6 ether, bipyridine, or a sulfur analog thereof.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-11-23 | 2002-05-25 | 2002-11-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-11-23 | 2006-05-25 | 2006-11-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-11-23 | 2010-05-25 | 2010-11-24 | $7700.00 | Window Closed / Lapsed |