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US5838951A Expired / Lapsed US ⏱️ 0.0 years remaining

Wafer map conversion method

Assignee: Amkor Technology Singapore Holding Pte Ltd
•
Filing: 1996-08-28
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Granted: 1998-11-17
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Expires: 2016-08-28
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Abstract

Abstract A wafer map conversion method capable of converting a format file, which includes data about a wafer obtained by category grades through a wafer testing device and all information associated with the wafer in accordance with a certain format, into a configuration file or standard file which can be practically applied to a die bonding device, thereby easily checking the content of the process through a processing mode translated from the configuration file or standard file. Practically, the die bonding process for good-grade dies by grade levels can be achieved based on BCE data. It is also possible to perform the die bonding process in accordance with a certain map format without requiring any test for the wafer memory and dies. Only selected dies can be processed without requiring an alignment and test for every die. Accordingly, a great improvement in the process quality is obtained. An improvement in yield in processing rate (UPH) is also achieved. The efficiency of the equipment used for the die bonding process is also enhanced. In addition, it is unnecessary to perform the ink dotting process after the probe test. As a result, the manufacturing cost is greatly reduced.

Inventors

  • 👤 Chee Jung Song

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-02 11:17
CPC Classifications
H; H10; H10P; H10P74/00; H10P74/23; H10W; H10W46/00; H10W46/601

Claims Analysis

Total Claims: 14
Claim 1
Independent Claim 112 words
A wafer map conversion method comprising: preparing a wafer map format file including a header portion recorded with basic information about a wafer and a data portion recorded with category grades of dies of the wafer; converting the wafer map format file to create a converted file by translating the wafer map format file, the converted file including a variety of information about the wafer recorded by items and category grades and actual positions of the dies recorded in accordance with the type of the wafer; and forming, using the converted file, a processing mode which displays category grades and actual positions of the dies, and information about the wafer and dies.
Claim 2
Dependent Claim 112 words
A wafer map conversion method comprising: preparing a wafer map format file including a header portion recorded with basic information about a wafer and a data portion recorded with category grades of dies of the wafer; converting the wafer map format file to create a converted file by translating the wafer map format file, the converted file including a variety of information about the wafer recorded by items and category grades and actual positions of the dies recorded in accordance with the type of the wafer; and forming, using the converted file, a processing mode which displays category grades and actual positions of the dies, and information about the wafer and dies.
Claim 3
Dependent Claim 41 words
The wafer map conversion method in accordance with claim 1, wherein the converted file is a configuration file which is formed by directly translating items of the wafer map format file, which have various formats, without any processing for those items.
Claim 4
Dependent Claim 40 words
The wafer map conversion method in accordance with claim 1, wherein the converted file is a standard file which is formed by translating items of the wafer map format file after standardizing the items in accordance with a desired format.
Claim 5
Dependent Claim 21 words
The wafer map conversion method in accordance with claim 1, wherein converting includes editing a die for a wafer mapping process.
Claim 6
Dependent Claim 21 words
The wafer map conversion method in accordance with claim 1, wherein converting includes selecting one or more dies to be processed.
Claim 7
Dependent Claim 20 words
The wafer map conversion method in accordance with claim 1, wherein converting includes rotating map data by a desired angle.
Claim 8
Dependent Claim 30 words
The wafer map conversion method in accordance with claim 1, wherein converting includes determining an actual direction of the wafer based on map data in accordance with a processing condition.
Claim 9
Dependent Claim 18 words
The wafer map conversion method in accordance with claim 1, further comprising editing using a wafer map converter.
Claim 10
Dependent Claim 20 words
The wafer map conversion method in accordance with claim 2, wherein the configuration file is a row type configuration file.
Claim 11
Dependent Claim 20 words
The wafer map conversion method in accordance with claim 2, wherein the configuration file is an array type configuration file.
Claim 12
Dependent Claim 20 words
The wafer map conversion method in accordance with claim 2, wherein the configuration file is a Cartesian type configuration file.
Claim 13
Dependent Claim 26 words
The wafer map conversion method in accordance with claim 5, further comprising bonding one or more dies after selecting one or more dies to be processed.
Claim 14
Dependent Claim 48 words
The wafer map conversion method in accordance with claim 1, wherein forming a processing mode further comprises forming first and second areas, said first area including information representing grade levels and actual positions of the dies, and said second area including information about the dies and the wafer.

References Cited (Backward Citations)

US4915565A Cited
US5172053A Cited
US5532499A Cited
US5390131A Cited
US5360747A Cited
US5585737A Cited
US5511005A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2001-11-16 2002-05-18 2002-11-17 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2005-11-16 2006-05-18 2006-11-17 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2009-11-16 2010-05-18 2010-11-17 $7700.00 Window Closed / Lapsed

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