US5838565A
Expired / Lapsed
US
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Manufacturing control method for IC plant batch sequential machine
Assignee: Vanguard International Semiconductor Corp
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Filing: 1997-05-15
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Granted: 1998-11-17
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Expires: 2017-05-15
Abstract
Abstract A method of operating a batch sequential machine in a manufacturing plant to optimize processing of lots of work through a plurality of series of processing stations which perform various functions comprising the following steps. Collect interval-times (I i ,j) for processing of lots through individual processing stations. Form a matrix of reduced times for processing lots through the processing stations. Determine permutations of the reduced times for a series of combinations of the processing stations for performing required processing tasks. Select the combination of interval-times providing the maximum reduction of total processing time.
Inventors
- 👤 Hung-Ming Hsieh
- 👤 Yirn-Sheng Pan
- 👤 Horng-Huei Tseng
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 15:19
CPC Classifications
G; G06; G06Q; G06Q10/00; G06Q10/06; G05; G05B; G05B19/00; G05B19/02; G05B19/418; G05B19/41865; G05B2219/00; G05B2219/30; G05B2219/31; G05B2219/31386; G05B2219/32; G05B2219/32015; G05B2219/32077; G05B2219/32096; G05B2219/32304; Y; Y02; Y02P; Y02P90/00; Y02P90/02
Claims Analysis
Total Claims: 33
Claim 1
Independent Claim
148 words
A method of operating a batch sequential machine in a manufacturing plant subsequent to preventative maintenance steps to optimize processing of lots of work through a plurality of series of processing stations which perform various processing functions, comprising the following steps: providing a batch sequential machine in a manufacturing plant, providing a data processing system having memory means for data storage, providing central processing means for a) accessing data from said memory means, b) receiving data from data input means and c) supplying data to said memory means, collecting interval-times (I i ,j) for processing of lots through individual processing stations, forming a matrix of reduced times for processing lots through said processing stations, determining permutations of said reduced times for a series of combinations of said processing stations for performing required processing tasks, and selecting the combination of interval-times providing the maximum reduction of total processing time.
Claim 2
Independent Claim
148 words
A method of operating a batch sequential machine in a manufacturing plant subsequent to preventative maintenance steps to optimize processing of lots of work through a plurality of series of processing stations which perform various processing functions, comprising the following steps: providing a batch sequential machine in a manufacturing plant, providing a data processing system having memory means for data storage, providing central processing means for a) accessing data from said memory means, b) receiving data from data input means and c) supplying data to said memory means, collecting interval-times (I i ,j) for processing of lots through individual processing stations, forming a matrix of reduced times for processing lots through said processing stations, determining permutations of said reduced times for a series of combinations of said processing stations for performing required processing tasks, and selecting the combination of interval-times providing the maximum reduction of total processing time.
Claim 3
Dependent Claim
38 words
A method in accordance with claim 1 wherein forming a matrix of reduced times for processing lots through said processing stations is performed in accordance with the equation: C.sub.i C.sub.j =R.sub.ij =(I.sub.ij,1 -I.sub.i,1)+(I.sub.ij,2 -I.sub.i,2)+. . . +(I.sub.ij,M -I.sub.iM).
Claim 4
Dependent Claim
29 words
A method in accordance with claim 2 wherein, individual reduced total time is calculated in accordance with the equation: T.sub.i =R.sub.i,1 +R.sub.i,2 +. . . +R.sub.i,N, i=1 to N|.
Claim 5
Dependent Claim
28 words
A method in accordance with claim 3 wherein the combination of maximum reduction of time is calculated in accordance with the equation: Optimum Combination=Max (T.sub.i, i=1 to N|).
Claim 6
Dependent Claim
29 words
A method in accordance with claim 2 wherein the combination of maximum reduction of time is calculated in accordance with the equation: Optimum Combination=Max (T.sub.i, i=1 to N|). 6.
Claim 7
Dependent Claim
47 words
A method in accordance with claim 1 wherein N is the number of recipe routes in a plant, F s is Furnace run size, C s is Chemical station run size, and the number M of cluster recipes is calculated according to the equation: M=F.sub.s /C.sub.s =6/2=3.
Claim 8
Dependent Claim
37 words
A method in accordance with claim 6 wherein forming matrix of reduced times for processing lots through said processing stations is performed in accordance with the equation: C.sub.i C.sub.j =R.sub.ij =(I.sub.ij,1 -I.sub.i,1)+(I.sub.ij,2 -I.sub.i,2)+. . . +(I.sub.ij,M -I.sub.iM).
Claim 9
Dependent Claim
30 words
A method in accordance with claim 7 wherein, following forming of said matrix of reduced times the combinations are expanded to N| and data on the expanded combinations is processed.
Claim 10
Dependent Claim
29 words
A method in accordance with claim 8 wherein, individual reduced total time is calculated in accordance with the equation: T.sub.i =R.sub.i,1 +R.sub.i,2 +. . . +R.sub.i,N, i=1 to N|.
Claim 11
Dependent Claim
29 words
A method in accordance with claim 9 wherein the combination of maximum reduction of time is calculated in accordance with the equation: Optimum Combination=Max (T.sub.i, i=1 to N|). 11.
Claim 12
Dependent Claim
28 words
A method in accordance with claim 8 wherein the combination of maximum reduction of time is calculated in accordance with the equation: Optimum Combination=Max (T.sub.i, i=1 to N|).
Claim 13
Dependent Claim
29 words
A method in accordance with claim 7 wherein, individual reduced total time is calculated in accordance with the equation: T.sub.i =R.sub.i,1 +R.sub.i,2 +. . . +R.sub.i,N, i=1 to N|.
Claim 14
Dependent Claim
28 words
A method in accordance with claim 12 wherein the combination of maximum reduction of time is calculated in accordance with the equation: Optimum Combination=Max (T.sub.i, i=1 to N|).
Claim 15
Dependent Claim
31 words
A method in accordance with claim 7 wherein the combination of maximum reduction of time is calculated in accordance with the equation: Optimum Combination=Max (T i , i=1 to N|). 15.
Claim 16
Dependent Claim
30 words
A method in accordance with claim 6 wherein, following forming of said matrix of reduced times the combinations are expanded to N| and data on the expanded combinations is processed.
Claim 17
Dependent Claim
29 words
A method in accordance with claim 15 wherein, individual reduced total time is calculated in accordance with the equation: T.sub.i =R.sub.i,1 +R.sub.i,2 +. . . +R.sub.i,N, i=1 to N|.
Claim 18
Dependent Claim
29 words
A method in accordance with claim 16 wherein the combination of maximum reduction of time is calculated in accordance with the equation: Optimum Combination=Max (T.sub.i, i=1 to N|). 18.
Claim 19
Dependent Claim
28 words
A method in accordance with claim 15 wherein the combination of maximum reduction of time is calculated in accordance with the equation: Optimum Combination=Max (T.sub.i, i=1 to N|).
Claim 20
Dependent Claim
29 words
A method in accordance with claim 6 wherein, individual reduced total time is calculated in accordance with the equation: T.sub.i =R.sub.i,1 +R.sub.i,2 +. . . +R.sub.i,N, i=1 to N|.
Claim 21
Dependent Claim
29 words
A method in accordance with claim 19 wherein the combination of maximum reduction of time is calculated in accordance with the equation: Optimum Combination=Max (T.sub.i, i=1 to N|). 21.
Claim 22
Dependent Claim
28 words
A method in accordance with claim 6 wherein the combination of maximum reduction of time is calculated in accordance with the equation: Optimum Combination=Max (T.sub.i, i=1 to N|).
Claim 23
Dependent Claim
29 words
A method in accordance with claim 1 wherein, individual reduced total time is calculated in accordance with the equation: T.sub.i =R.sub.i,1 +R.sub.i,2 +. . . +R.sub.i,N, i=1 to N|.
Claim 24
Dependent Claim
28 words
A method in accordance with claim 22 wherein the combination of maximum reduction of time is calculated in accordance with the equation: Optimum Combination=Max (T.sub.i, i=1 to N|).
Claim 25
Dependent Claim
29 words
A method in accordance with claim 1 wherein the combination of maximum reduction of time is calculated in accordance with the equation: Optimum Combination=Max (T.sub.i, i=1 to N|). 25.
Claim 26
Dependent Claim
118 words
A production scheduling apparatus for operating a manufacturing plant subsequent to preventative maintenance steps, comprising a data processing system having memory means for data storage, central processing means for a) accessing data from said memory means, b) receiving data from data input means and c) supplying data to said memory means, means for collecting interval-times (I i ,j) for processing of lots through individual processing stations, means for forming a matrix of reduced times for processing lots through said processing stations, means for determining permutations of said reduced times for a series of combinations of said processing stations for performing required processing tasks, and means for selecting the combination of interval-times for maximum reduction of total processing time.
Claim 27
Dependent Claim
118 words
A production scheduling apparatus for operating a manufacturing plant subsequent to preventative maintenance steps, comprising a data processing system having memory means for data storage, central processing means for a) accessing data from said memory means, b) receiving data from data input means and c) supplying data to said memory means, means for collecting interval-times (I i ,j) for processing of lots through individual processing stations, means for forming a matrix of reduced times for processing lots through said processing stations, means for determining permutations of said reduced times for a series of combinations of said processing stations for performing required processing tasks, and means for selecting the combination of interval-times for maximum reduction of total processing time.
Claim 28
Dependent Claim
37 words
Apparatus in accordance with claim 25 wherein forming a matrix of reduced times for processing lots through said processing stations is performed in accordance with the equation: C.sub.i C.sub.j =R.sub.ij =(I.sub.ij,1 -I.sub.i,1)+(I.sub.ij,2 -I.sub.i,2)+. . . +(I.sub.ij,M -I.sub.iM).
Claim 29
Dependent Claim
51 words
Apparatus in accordance with claim 26 wherein N is the number of recipe routes in a plant, F s is Furnace run size, C s is Chemical station run size, and said apparatus including means for calculating the number M of cluster recipes according to the equation: M=F.sub.s /C.sub.s =6/2=3. 28.
Claim 30
Dependent Claim
41 words
Apparatus in accordance with claim 27 wherein means is provided for forming a matrix of reduced times for processing lots through said processing stations is performed in accordance with the equation: C.sub.i C.sub.j =R.sub.ij =(I.sub.ij,1 -I.sub.i,1)+(I.sub.ij,2 -I.sub.i,2)+. . . +(I.sub.ij,M -I.sub.iM).
Claim 31
Dependent Claim
31 words
Apparatus in accordance with claim 28 wherein, means is provided for expanding the combinations of said matrix of reduced times to N| and means for processing data on the expanded combinations.
Claim 32
Dependent Claim
34 words
Apparatus in accordance with claim 29 wherein means is provided for calculating the combination of individual reduced total time in accordance with the equation: Ti.sub. =R.sub.i,1 +R.sub.i,2 +. . . +R.sub.i,N, i=1 to N|.
Claim 33
Dependent Claim
30 words
Apparatus in accordance with claim 30 wherein means is provided for calculating the combination of maximum reduction of time in accordance with the equation: Optimum Combination=Max (T.sub.i, i=1 to N|).
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-11-16 | 2002-05-18 | 2002-11-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-11-16 | 2006-05-18 | 2006-11-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-11-16 | 2010-05-18 | 2010-11-17 | $7700.00 | Window Closed / Lapsed |