US5835226A
Expired / Lapsed
US
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Method for determining optical constants prior to film processing to be used improve accuracy of post-processing thickness measurements
Assignee: LSI Corp
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Filing: 1997-11-13
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Granted: 1998-11-10
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Expires: 2017-11-13
Abstract
Abstract A method for determining the thickness of a film in a film stack using reflectance spectroscopy is provided in which one of the films in the stack has unknown optical constants. Conventional methods of using reflectance measurements to determine the thickness of a film require knowledge of the thicknesses and optical constants of all underlying films. An embodiment involves forming a test layer across a substrate having a known thickness and known optical constants. The thickness of the layer is determined using reflectance measurements. A first layer of the same material is then formed across a second layer at the same conditions that the test layer was formed. Thus, the test layer and the first layer can be assumed to have the same thicknesses. A spectral response curve may be determined for the first layer. The first layer is then processed so that its thickness is no longer known. The second layer has unknown optical constants, making it difficult to use reflectance measurements to find the unknown thickness. The values of the unknown optical constants may be guessed and used with the known thickness of unprocessed first layer to create a model spectral response curve. The optical constants may be repeatably varied until the model response curve matches the measured response curve. When this happens, the reasonable optical constants have been found and may be used in determining the thickness of the processed first layer.
Inventors
- 👤 Michael J. Berman
- 👤 Jayashree Kalpathy-Cramer
- 👤 Eric J. Kirchner
- 👤 Thomas Frederick Allen Bibby, Jr.
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 08:40
CPC Classifications
G; G01; G01B; G01B11/00; G01B11/02; G01B11/06; G01B11/0616; G01B11/0625
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
176 words
A method for determining optical constants of an underlying layer of material formed at an elevation level below a layer of material, comprising: forming a layer of material of first pre-defined optical constants at predetermined conditions upon an underlying layer of material; forming another layer of material of said first pre-defined optical constants at said predetermined conditions upon another underlying layer of material of second pre-defined optical constants, wherein said another layer of material is of substantially the same composition as said layer of material; knowing said first pre-defined optical constants and said second pre-defined optical constants, measuring light reflectance from said another layer of material to determine a thickness of said another layer of material; correlating the thickness of said another layer of material to be proportional to a first thickness of said layer of material having substantially the same composition; and knowing the first pre-defined optical constants and the first thickness of said layer of material, measuring light reflectance from said layer of material to determine optical constants of said underlying layer of material.
Claim 2
Independent Claim
176 words
A method for determining optical constants of an underlying layer of material formed at an elevation level below a layer of material, comprising: forming a layer of material of first pre-defined optical constants at predetermined conditions upon an underlying layer of material; forming another layer of material of said first pre-defined optical constants at said predetermined conditions upon another underlying layer of material of second pre-defined optical constants, wherein said another layer of material is of substantially the same composition as said layer of material; knowing said first pre-defined optical constants and said second pre-defined optical constants, measuring light reflectance from said another layer of material to determine a thickness of said another layer of material; correlating the thickness of said another layer of material to be proportional to a first thickness of said layer of material having substantially the same composition; and knowing the first pre-defined optical constants and the first thickness of said layer of material, measuring light reflectance from said layer of material to determine optical constants of said underlying layer of material.
Claim 3
Dependent Claim
52 words
The method of claim 1, further comprising measuring reflectance from said layer of material subsequent to processing said layer of material for determining a post-processing thickness of said processed layer of material using said optical constants of said underlying layer of material derived from measuring light reflectance from said layer of material.
Claim 4
Dependent Claim
14 words
The method of claim 2, wherein processing comprises chemical-mechanical polishing said layer of material.
Claim 5
Dependent Claim
21 words
The method of claim 1, wherein measuring reflectance comprises measuring reflected intensity of light over a predetermined range of light wavelengths.
Claim 6
Dependent Claim
57 words
The method of claim 1, wherein measuring reflectance comprises measuring reflected intensity of light over a predetermined range of light wavelengths to form a measured spectral response curve, wherein determining said optical constants comprises fitting said measured response curve with a model response curve, said model response curve being formed by varying values for said optical constants.
Claim 7
Dependent Claim
24 words
The method of claim 1, wherein said first pre-defined optical constants comprise index of refraction and extinction coefficient of said another layer of material.
Claim 8
Dependent Claim
25 words
The method of claim 1, wherein said second pre-defined optical constants comprise index of refraction and extinction coefficient of said another underlying layer of material.
Claim 9
Dependent Claim
13 words
The method of claim 1, wherein said another layer of material comprises oxide.
Claim 10
Dependent Claim
14 words
The method of claim 1, wherein said another underlying layer of material comprises silicon.
Claim 11
Dependent Claim
12 words
The method of claim 1, wherein said layer of material comprises oxide.
Claim 12
Dependent Claim
14 words
The method of claim 1, wherein said underlying layer of material comprises titanium nitride.
Claim 13
Dependent Claim
16 words
The method of claim 1, wherein said another underlying layer of material has a predetermined thickness.
Claim 14
Dependent Claim
15 words
The method of claim 1, wherein said underlying layer of material has a predetermined thickness.
Claim 15
Independent Claim
161 words
A method for determining optical constants of an underlying layer of material formed at an elevation level below a layer of material, comprising: forming a layer of material to a first thickness upon an underlying layer of material; forming another layer of material to said first thickness upon another underlying layer of material of pre-defined optical constants, wherein said another layer of material is of substantially the same composition as said layer of material; knowing the first thickness and the pre-defined optical constants, measuring light reflectance from said another layer of material to determine the optical constants of said another layer of material; correlating the optical constants of said another layer of material to be equivalent to optical constants of said layer of material having substantially the same composition; and knowing the optical constants and the first thickness of said layer of material, measuring light reflectance from said layer of material to determine optical constants of said underlying layer of material.
Claim 16
Independent Claim
161 words
A method for determining optical constants of an underlying layer of material formed at an elevation level below a layer of material, comprising: forming a layer of material to a first thickness upon an underlying layer of material; forming another layer of material to said first thickness upon another underlying layer of material of pre-defined optical constants, wherein said another layer of material is of substantially the same composition as said layer of material; knowing the first thickness and the pre-defined optical constants, measuring light reflectance from said another layer of material to determine the optical constants of said another layer of material; correlating the optical constants of said another layer of material to be equivalent to optical constants of said layer of material having substantially the same composition; and knowing the optical constants and the first thickness of said layer of material, measuring light reflectance from said layer of material to determine optical constants of said underlying layer of material.
References Cited (Backward Citations)
US4984894A
Cited
US5663797A
Cited
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