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US5835141A
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Single-polysilicon CMOS active pixel image sensor
Assignee: Bell Semiconductor LLC
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Filing: 1996-07-03
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Granted: 1998-11-10
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Expires: 2016-07-03
Abstract
Abstract A single-polysilicon active pixel, methods for operating and making same, and an imaging device employing same are disclosed. The single-polysilicon active pixel comprises a photo site located on a substrate for generating and storing charge carriers, the charge carriers being generated from photonic energy incident upon the photo site and semiconductor substrate, a photo gate, a transfer transistor and output and reset electronics. The gate of the transfer transistor and the photo gate are defined in a single layer of polysilicon disposed on the semiconductor substrate. The source of transfer transistor is a doped region of substrate, referred to as a coupling diffusion, which provides the electrical coupling between the photo gate and the transfer transistor. The coupling diffusion allows for the transfer of a signal stored in a photo site under the photo gate to the output electronics for processing. A plurality of such single-polysilicon active pixels can be arranged to form an imaging system. The single-polysilicon active pixel may be operated by biasing the transfer transistor to the low operating voltage of the pixel, for example, 0 volts. By virtue of the structure of the single-polysilicon active pixel, this mode of operation results in the same timing as if the transfer transistor were clocked, but neither a clock nor the associated driving circuitry arc required. However, there is little no tendency for image lag as occurs in double polysilicon active pixels when they are operated in a manner which avoids clocking the transfer gate.
Inventors
- 👤 Bryan David Ackland
- 👤 Alexander George Dickinson
- 👤 El-Sayed Ibrarhim Eid
- 👤 David Andrew Inglis
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 01:16
CPC Classifications
H; H10; H10F; H10F39/00; H10F39/80; H10F39/803; H04; H04N; H04N25/00; H04N25/70; H04N25/76; H10F30/00; H10F30/20; H10F30/21; H10F30/28; H10F30/282; H10F39/10; H10F39/12; H10F39/18
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
188 words
A CMOS active pixel for converting an optical signal to an electronic signal, comprising: a semiconductor substrate wherein charge carriers are generated from incident photonic energy; a photo gate for collecting the charge carriers, the photo gate having a contact electrically connected to a first region of polysilicon; a transfer transistor gate for transferring charge between the photo gate and output electronics, the transfer transistor gate having a contact electrically connected to a second region of polysilicon, said second region of polysilicon having a first side and a second side; a transfer transistor comprising the transfer transistor gate, a first diffusion region and a second diffusion region, wherein the first diffusion region is within the substrate between the first region of polysilicon and the first side of the second region of polysilicon, and wherein the second diffusion region is within the substrate nearest the second side of the second region of polysilicon; reset electronics electrically connected to the second diffusion region; and output electronics, electrically connected to the second diffusion region, which receive the charge transferred by the transfer transistor gate and conduct the signal to processing electronics.
Claim 2
Dependent Claim
188 words
A CMOS active pixel for converting an optical signal to an electronic signal, comprising: a semiconductor substrate wherein charge carriers are generated from incident photonic energy; a photo gate for collecting the charge carriers, the photo gate having a contact electrically connected to a first region of polysilicon; a transfer transistor gate for transferring charge between the photo gate and output electronics, the transfer transistor gate having a contact electrically connected to a second region of polysilicon, said second region of polysilicon having a first side and a second side; a transfer transistor comprising the transfer transistor gate, a first diffusion region and a second diffusion region, wherein the first diffusion region is within the substrate between the first region of polysilicon and the first side of the second region of polysilicon, and wherein the second diffusion region is within the substrate nearest the second side of the second region of polysilicon; reset electronics electrically connected to the second diffusion region; and output electronics, electrically connected to the second diffusion region, which receive the charge transferred by the transfer transistor gate and conduct the signal to processing electronics.
Claim 3
Dependent Claim
24 words
The CMOS active pixel of claim 1 wherein the photo gate and the transfer transistor gate are formed from a single layer of polysilicon.
Claim 4
Dependent Claim
36 words
The single polysilicon CMOS active pixel of claim 2 wherein the output electronics comprise a voltage follower transistor electrically connected to a select transistor, wherein the voltage follower transistor is electrically connected to the second diffusion.
Claim 5
Dependent Claim
17 words
The single polysilicon CMOS active pixel of claim 2 wherein the reset electronics comprises a reset transistor.
Claim 6
Dependent Claim
229 words
A single-polysilicon active pixel imaging device comprising: an array of single-polysilicon active pixels arranged in a first group and a second group; a first common conductor coupled to the active pixels in the first group for conducting control signals; a second common conductor coupled to the active pixels in the second group for selectively transmitting signals to processing electronics; wherein, each of the single-polysilicon active pixels comprises: a semiconductor substrate wherein charge carriers are generated from incident photonic energy; a photo gate for collecting the charge carriers, the photo gate having a contact electrically connected to a first region of polysilicon; a transfer transistor gate for transferring charge between the photo gate and output electronics, the transfer transistor gate having a contact electrically connected to a second region of polysilicon, said second region of polysilicon having a first side and a second side; a transfer transistor comprising the transfer transistor gate, a first diffusion region and a second diffusion region, wherein the first diffusion region is within the substrate between the first region of polysilicon and the first side of the second region of polysilicon, and wherein the second diffusion region is within the substrate nearest the second side of the second region of polysilicon; and an amplifying arrangement for selectively receiving signals from the plurality of active pixels and selectively providing output signals to the second common conductor.
Claim 7
Dependent Claim
229 words
A single-polysilicon active pixel imaging device comprising: an array of single-polysilicon active pixels arranged in a first group and a second group; a first common conductor coupled to the active pixels in the first group for conducting control signals; a second common conductor coupled to the active pixels in the second group for selectively transmitting signals to processing electronics; wherein, each of the single-polysilicon active pixels comprises: a semiconductor substrate wherein charge carriers are generated from incident photonic energy; a photo gate for collecting the charge carriers, the photo gate having a contact electrically connected to a first region of polysilicon; a transfer transistor gate for transferring charge between the photo gate and output electronics, the transfer transistor gate having a contact electrically connected to a second region of polysilicon, said second region of polysilicon having a first side and a second side; a transfer transistor comprising the transfer transistor gate, a first diffusion region and a second diffusion region, wherein the first diffusion region is within the substrate between the first region of polysilicon and the first side of the second region of polysilicon, and wherein the second diffusion region is within the substrate nearest the second side of the second region of polysilicon; and an amplifying arrangement for selectively receiving signals from the plurality of active pixels and selectively providing output signals to the second common conductor.
Claim 8
Dependent Claim
17 words
The single-polysilicon active pixel imaging device of claim 5 wherein the active pixel has a N-channel configuration.
Claim 9
Dependent Claim
37 words
The single-polysilicon active pixel imaging device of claim 5 wherein the amplifying arrangement comprises a voltage follower transistor electrically connected to a select transistor, wherein the voltage follower transistor is electrically coupled to the second diffusion region.
Claim 10
Dependent Claim
26 words
The single-polysilicon active pixel imaging device of claim 7 further comprising a reset transistor electrically coupled to the second diffusion region and the first common conductor.
Claim 11
Dependent Claim
25 words
The single-polysilicon active pixel imaging device of claim 8 further comprising a load transistor coupled to the voltage follower transistor in a source follower configuration.
Claim 12
Dependent Claim
15 words
The single-polysilicon active pixel imaging device of claim 5 wherein the amplifying arrangement is CMOS.
Claim 13
Dependent Claim
15 words
The single-polysilicon active pixel imaging device of claim 7 wherein the amplifying arrangement is CMOS.
Claim 14
Dependent Claim
23 words
The single-polysilicon active pixel imaging device of claim 5 wherein the first group forms a row and the second group forms a column.
Claim 15
Dependent Claim
17 words
The single-polysilicon active pixel imaging device of claim 12 further comprising a plurality of rows and columns.
Claim 16
Dependent Claim
33 words
The single-polysilicon active pixel imaging device of claim 5 wherein the amplifying arrangement comprises an amplifier and a switch for selectively transmitting the output signal from the amplifier to the second common conductor.
Claim 17
Independent Claim
180 words
A method for operating a single-polysilicon CMOS n-channel active pixel having a photo gate, a clock, and a transfer transistor which has a transfer transistor gate and a diffusion node, the single-polysilicon CMOS active pixel operable by a first voltage and a second voltage, comprising the steps of: (a) biasing the transfer transistor to the second voltage; (b) clocking the photo gate to the first voltage, the first voltage on the photo gate being maintained until a first desired period of time has elapsed, wherein a signal is stored in a first region during the first desired period of time; (c) resetting the diffusion node to a third voltage based on the first voltage; (d) clocking the photo gate to the second voltage when the first desired period of time has elapsed, and maintaining the second voltage until a second desired period of time has elapsed, wherein, during the second desired period of time, the signal is transferred out of the first region to the diffusion node changing the third voltage on the diffusion node; and (e) repeating steps (b)-(d).
Claim 18
Independent Claim
180 words
A method for operating a single-polysilicon CMOS n-channel active pixel having a photo gate, a clock, and a transfer transistor which has a transfer transistor gate and a diffusion node, the single-polysilicon CMOS active pixel operable by a first voltage and a second voltage, comprising the steps of: (a) biasing the transfer transistor to the second voltage; (b) clocking the photo gate to the first voltage, the first voltage on the photo gate being maintained until a first desired period of time has elapsed, wherein a signal is stored in a first region during the first desired period of time; (c) resetting the diffusion node to a third voltage based on the first voltage; (d) clocking the photo gate to the second voltage when the first desired period of time has elapsed, and maintaining the second voltage until a second desired period of time has elapsed, wherein, during the second desired period of time, the signal is transferred out of the first region to the diffusion node changing the third voltage on the diffusion node; and (e) repeating steps (b)-(d).
Claim 19
Dependent Claim
17 words
The method of claim 15 wherein the first voltage has a higher potential than the second voltage.
Claim 20
Dependent Claim
19 words
The method of claim 15 wherein the first voltage is 5 volts and the second voltage is 0 volts.
Claim 21
Dependent Claim
12 words
The method of claim 15 wherein the second voltage is 0 volts.
Claim 22
Dependent Claim
16 words
The method of claim 15 wherein the first desired period of time is about 30 milliseconds.
Claim 23
Dependent Claim
39 words
The method of claim 15 wherein the step of resetting the diffusion node comprises activating a reset transistor, which reset transistor has a drain biased to the first voltage and has a source electrically connected to the diffusion node.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-11-09 | 2002-05-11 | 2002-11-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-11-09 | 2006-05-11 | 2006-11-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-11-09 | 2010-05-11 | 2010-11-10 | $7700.00 | Window Closed / Lapsed |