Patent US5830041A successfully refreshed from Google Patents.
US5830041A
Expired / Lapsed
US
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Method and apparatus for determining endpoint during a polishing process
Assignee: Ebara Corp
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Filing: 1996-11-04
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Granted: 1998-11-03
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Expires: 2016-11-04
Abstract
Abstract A method and apparatus for determining a planar end point on a workpiece such as a semiconductor wafer in a polishing process for polishing the workpiece to a flat mirror finish. The workpiece having an uneven surface is held by a top ring and pressed against a polishing platen. The workpiece is moved relative to the polishing platen to polish the workpiece, and a change in a frictional force between the workpiece and the polishing platen is detected. A reference time when the workpiece having an uneven surface is polished to a flat surface is determined based on the change of the frictional force between the workpiece and the polishing platen. The time when a certain period of polishing time from the reference time elapses is determined as an endpoint on the workpiece.
Inventors
- 👤 Tamami Takahashi
- 👤 Fumihiko Sakata
- 👤 Norio Kimura
- 👤 Masako Kodera
- 👤 Atsushi Shigeta
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 17:40
CPC Classifications
B; B24; B24B; B24B37/00; B24B37/005; B24B37/013; H; H10; H10P; H10P52/00; B24B49/00; B24B49/16
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
137 words
A method of determining an endpoint of a process of polishing a semiconductor wafer including unexposed wiring pattern portions covered by an exposed insulating layer having an uneven exposed surface, said method comprising: pressing said exposed uneven surface against a polishing platen while moving said semiconductor wafer and said platen relative to each other, thereby polishing said surface; detecting a frictional force between said surface and said platen; determining a reference time as a time of a change in the detected frictional force representative of said exposed uneven surface having been polished to a flat surface; and determining said endpoint as a certain period of time of continued polishing after said reference time at which a predetermined thickness portion of said exposed insulating layer remains covering said wiring pattern portions without said wiring pattern portions being exposed.
Claim 2
Independent Claim
137 words
A method of determining an endpoint of a process of polishing a semiconductor wafer including unexposed wiring pattern portions covered by an exposed insulating layer having an uneven exposed surface, said method comprising: pressing said exposed uneven surface against a polishing platen while moving said semiconductor wafer and said platen relative to each other, thereby polishing said surface; detecting a frictional force between said surface and said platen; determining a reference time as a time of a change in the detected frictional force representative of said exposed uneven surface having been polished to a flat surface; and determining said endpoint as a certain period of time of continued polishing after said reference time at which a predetermined thickness portion of said exposed insulating layer remains covering said wiring pattern portions without said wiring pattern portions being exposed.
Claim 3
Dependent Claim
34 words
A method as claimed in claim 1, wherein said detecting comprises determining a change in current of a driving motor driving said platen or a holding member pressing said semiconductor wafer against said platen.
Claim 4
Dependent Claim
37 words
A method as claimed in claim 1, wherein said certain period of time is variable and is determined base don an amount of polishing and a polishing time of a least one other previously polished semiconductor wafer.
Claim 5
Dependent Claim
40 words
A method as claimed in claim 3, wherein said at least one other previously polished semiconductor wafer comprises at least one semiconductor wafer that has been polished immediately prior to said polishing of said semiconductor wafer having said uneven surface.
Claim 6
Dependent Claim
45 words
A method as claimed in claim 3, wherein said certain period of time is determined based on an average of polishing rates of a plurality of semiconductor wafers that have been polished immediately prior to said polishing of said semiconductor wafer having said uneven surface.
Claim 7
Independent Claim
181 words
An apparatus for polishing and for determining an endpoint of polishing of a semiconductor wafer including unexposed wiring pattern portions covered by an exposed insulating layer having an uneven exposed surface, said apparatus comprising: a polishing platen; a top ring for pressing the uneven exposed surface of the semiconductor wafer against said polishing platen, while the semiconductor wafer and said platen are moved relative to each other, thereby polishing the surface; a detector operable to detect a frictional force between the surface and said platen; and processing means, operably connected to said detector and operable in response to detection of the frictional force thereby, for determining a reference time as a time of a change in the detected frictional force representative of the uneven exposed surface having been polished to a flat surface, and for determining an endpoint of polishing of the semiconductor wafer as a certain period of time of continued polishing after said reference time at which a predetermined thickness portion of the exposed insulating layer remains covering the wiring pattern portions without the wiring pattern portions being exposed.
Claim 8
Independent Claim
181 words
An apparatus for polishing and for determining an endpoint of polishing of a semiconductor wafer including unexposed wiring pattern portions covered by an exposed insulating layer having an uneven exposed surface, said apparatus comprising: a polishing platen; a top ring for pressing the uneven exposed surface of the semiconductor wafer against said polishing platen, while the semiconductor wafer and said platen are moved relative to each other, thereby polishing the surface; a detector operable to detect a frictional force between the surface and said platen; and processing means, operably connected to said detector and operable in response to detection of the frictional force thereby, for determining a reference time as a time of a change in the detected frictional force representative of the uneven exposed surface having been polished to a flat surface, and for determining an endpoint of polishing of the semiconductor wafer as a certain period of time of continued polishing after said reference time at which a predetermined thickness portion of the exposed insulating layer remains covering the wiring pattern portions without the wiring pattern portions being exposed.
Claim 9
Dependent Claim
30 words
An apparatus as claimed in claim 6, wherein said detector comprises means for determining a change in current of a driving motor for rotating said top ring or said platen.
Claim 10
Dependent Claim
39 words
An apparatus as claimed in claim 6, wherein said processing means comprises means for varying said certain period of time based on an amount of polishing and a polishing time of at least one other previously polished semiconductor wafer.
Claim 11
Dependent Claim
53 words
An apparatus as claimed in claim 8, wherein said means is operable to determine said certain period of time based on said amount of polishing and said polishing time of at least one other semiconductor wafer that has been polished immediately prior to said polishing of the semiconductor wafer having the uneven surface.
Claim 12
Dependent Claim
49 words
An apparatus as claimed in claim 8, wherein said means is operable to determine said certain period of time based on an average of polishing rates of a plurality of semiconductor wafers that have been polished immediately prior to said polishing of the semiconductor wafer having the uneven surface.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-11-02 | 2002-05-04 | 2002-11-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-11-02 | 2006-05-04 | 2006-11-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-11-02 | 2010-05-04 | 2010-11-03 | $7700.00 | Window Closed / Lapsed |