US5825437A
Expired / Lapsed
US
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Structure of a liquid crystal display device and a method of manufacturing same
Assignee: LG Display Co Ltd
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Filing: 1996-02-13
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Granted: 1998-10-20
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Expires: 2016-02-13
Abstract
Abstract A liquid crystal display device comprising a substrate; a first metal layer including an aluminum alloy having a first refractory metal with a first melting temperature over the substrate; and a second metal layer including a pure aluminum or an aluminum alloy having a second refractory metal with a second melting temperature lower than the first melting temperature over the first metal layer. The above liquid crystal display device of the present invention prevents the occurrence of hillocks on the aluminum gate metal. A method of manufacturing a liquid crystal display device is disclosed including the steps of forming a first metal layer of an aluminum alloy including a refractory metal having a first melting temperature on a substrate; and forming a second metal layer of a pure aluminum or an aluminum alloy including a refractory metal having a second melting temperature lower than the first melting temperature on the first metal layer.
Inventors
- 👤 Hyun Sik Seo
- 👤 In Woo Kim
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 00:34
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/136; G02F1/1362; G02F1/136286; H; H10; H10D; H10D86/00; H10D86/40; H10D86/441; H10D86/60; G02F1/136295
Claims Analysis
Total Claims: 44
Claim 1
Independent Claim
69 words
A liquid crystal display apparatus comprising: a substrate; a first metal layer over said substrate, said first metal layer including an aluminum alloy having a first metal with a first melting temperature; and a second metal layer over said first metal layer, said second metal layer including a pure aluminum or an aluminum alloy having a second metal with a second melting temperature lower than said first melting temperature.
Claim 2
Dependent Claim
69 words
A liquid crystal display apparatus comprising: a substrate; a first metal layer over said substrate, said first metal layer including an aluminum alloy having a first metal with a first melting temperature; and a second metal layer over said first metal layer, said second metal layer including a pure aluminum or an aluminum alloy having a second metal with a second melting temperature lower than said first melting temperature.
Claim 3
Dependent Claim
20 words
The liquid crystal display of claim 1, wherein said first melting temperature is greater than or equal to 1500° C.
Claim 4
Dependent Claim
17 words
The liquid crystal display of claim 1, wherein said second melting temperature is less than 1500° C.
Claim 5
Dependent Claim
27 words
The liquid crystal display of claim 1, wherein said first metal includes at least one of refractory metals including tantalum, titanium, molybdenum, tungsten, niobium, zirconium, and vanadium.
Claim 6
Dependent Claim
19 words
The liquid crystal display of claim 1, wherein said second metal includes at least one of silicon and copper.
Claim 7
Dependent Claim
34 words
The liquid crystal display of claim 1, wherein said aluminum alloy of said first metal layer includes approximately 0.1˜2 atomic % of at least one of tantalum, titanium, molybdenum, tungsten, niobium, zirconium, and vanadium.
Claim 8
Dependent Claim
18 words
The liquid crystal display of claim 1, wherein said aluminum alloy of the first metal layer includes aluminum-tantalum.
Claim 9
Dependent Claim
63 words
The liquid crystal display of claim 1, further comprising: a first anodizing layer at least partially covering a sidewall of said first metal layer; and a second anodizing layer at least partially covering a sidewall of second metal layer, said sidewall of each of the first and second metal layers having a non-zero angle with respect to the lateral direction of the substrate.
Claim 10
Dependent Claim
72 words
A contact pad in a liquid crystal device, comprising: a substrate, a first metal layer over said substrate said first metal layer including an aluminum alloy having a first metal with a first melting temperature; and a second metal layer over said first metal layer, said second metal layer including a pure aluminum or an aluminum alloy having a second metal with a second melting temperature lower than said first melting temperature.
Claim 11
Dependent Claim
72 words
A contact pad in a liquid crystal device, comprising: a substrate, a first metal layer over said substrate said first metal layer including an aluminum alloy having a first metal with a first melting temperature; and a second metal layer over said first metal layer, said second metal layer including a pure aluminum or an aluminum alloy having a second metal with a second melting temperature lower than said first melting temperature.
Claim 12
Dependent Claim
19 words
The contact pad of claim 9, wherein said first melting temperature is greater than or equal to 1500° C.
Claim 13
Dependent Claim
16 words
The contact pad of claim 9, wherein said second melting temperature is less than 1500° C.
Claim 14
Dependent Claim
26 words
The contact pad of claim 9, wherein said first metal includes at least one of refractory metals including tantalum, titanium, molybdenum, tungsten, niobium, zirconium, and vanadium.
Claim 15
Dependent Claim
18 words
The contact pad of claim 9, wherein said second metal includes at last one of silicon and copper.
Claim 16
Dependent Claim
33 words
The contact pad of claim 9, wherein said aluminum alloy of said first metal layer includes approximately 0.1˜2 atomic % of at least one of tantalum, titanium, molybdenum, tungsten, niobium, zirconium, and vanadium.
Claim 17
Dependent Claim
17 words
The contact pad of claim 9, wherein said aluminum alloy of the first metal layer includes aluminum-tantalum.
Claim 18
Dependent Claim
63 words
The contact pad of claim 9, further comprising: a first anodizing layer at least partially covering a sidewall of said first metal layer; and a second anodizing layer at least partially covering a sidewall of said second metal layer, said sidewall of each of the first and second metal layers having a non-zero angle with respect to the lateral direction of the substrate.
Claim 19
Dependent Claim
16 words
The contact pad of claim 9, further comprising a conductive layer on the second metal layer.
Claim 20
Dependent Claim
20 words
The contact pad of claim 17, wherein said conductive layer includes a source or a drain of a switching element.
Claim 21
Dependent Claim
14 words
The contact pad of claim 17, wherein said conductive layer includes a transparent electrode.
Claim 22
Dependent Claim
74 words
A thin film transistor in a liquid crystal display device, comprising: a substrate; a first metal layer over said substrate, said first metal layer including an aluminum alloy having a first metal with a first melting temperature; and a second metal layer over said first metal layer, said second metal layer including a pure aluminum or an aluminum alloy having a second metal with a second melting temperature lower than said first melting temperature.
Claim 23
Dependent Claim
74 words
A thin film transistor in a liquid crystal display device, comprising: a substrate; a first metal layer over said substrate, said first metal layer including an aluminum alloy having a first metal with a first melting temperature; and a second metal layer over said first metal layer, said second metal layer including a pure aluminum or an aluminum alloy having a second metal with a second melting temperature lower than said first melting temperature.
Claim 24
Dependent Claim
21 words
The thin film transistor according to claim 20, wherein said first melting temperature is greater than or equal to 1500° C.
Claim 25
Dependent Claim
18 words
The thin film transistor according to claim 20, wherein said second melting temperature is less than 1500° C.
Claim 26
Dependent Claim
28 words
The thin film transistor according to claim 20, wherein said first metal includes at least one of refractory metals including tantalum, titanium, molybdenum, tungsten, niobium, zirconium, and vanadium.
Claim 27
Dependent Claim
19 words
The thin film transistor according to claim 20, wherein said second metal at least one of silicon and copper.
Claim 28
Dependent Claim
35 words
The thin film transistor according to claim 20, wherein said aluminum alloy of said first metal layer includes approximately 0.1˜2 atomic % of at least one of tantalum, titanium, molybdenum, tungsten, niobium, zirconium, and vanadium.
Claim 29
Dependent Claim
19 words
The thin film transistor according to claim 20, wherein said aluminum alloy of the first metal layer includes aluminum-tantalum.
Claim 30
Dependent Claim
52 words
The thin film transistor of claim 20, further comprising: a first anodizing layer at least partially covering a sidewall of said first metal layer, said sidewall having a non-zero angle with respect to the lateral direction of the substrate; and a second anodizing layer at least partially covering said second metal layer.
Claim 31
Dependent Claim
67 words
The thin film transistor of claim 27, further comprising; a first insulating layer over said first and second anodizing layers and said substrate; a semiconductor layer over said first insulating layer; a doped semiconductor layer over said semiconductor layer; and a third metal layer over said doped semiconductor layer and said first insulating layer, said third metal layer having first and second portions separated from one another.
Claim 32
Dependent Claim
53 words
The thin film transistor of claim 28, further comprising: a second insulating layer over said third metal layer, said second insulating layer having a contact hole; and a transparent electrode over said second insulating layer, said transparent electrode electrically connected to the second portion of the third metal layer through said contact hole.
Claim 33
Dependent Claim
20 words
The thin film transistor of claim 28, further comprising a transparent electrode at least partially over said first insulating layer.
Claim 34
Dependent Claim
20 words
The thin transistor of claim 28, further comprising a transparent electrode over said second portion of the third metal layer.
Claim 35
Independent Claim
76 words
A method for making a liquid crystal display device, comprising the steps of: forming a first metal layer over a substrate, said first metal layer including an aluminum alloy having a first metal with a first melting temperature; and forming a second metal layer over said first metal layer, said second metal layer including a pure aluminum or an aluminum alloy having a second metal with a second melting temperature lower than said first melting temperature.
Claim 36
Independent Claim
76 words
A method for making a liquid crystal display device, comprising the steps of: forming a first metal layer over a substrate, said first metal layer including an aluminum alloy having a first metal with a first melting temperature; and forming a second metal layer over said first metal layer, said second metal layer including a pure aluminum or an aluminum alloy having a second metal with a second melting temperature lower than said first melting temperature.
Claim 37
Dependent Claim
25 words
The method for making a liquid crystal display device of claim 32, wherein said first melting temperature is greater than or equal to 1500° C.
Claim 38
Dependent Claim
22 words
The method for making a liquid crystal display device of claim 32, wherein said second melting temperature is less than 1500° C.
Claim 39
Dependent Claim
32 words
The method for making a liquid crystal display device of claim 32, wherein said first metal includes at least one of refractory metals including tantalum, titanium, molybdenum, tungsten, niobium, zirconium, and vanadium.
Claim 40
Dependent Claim
25 words
The method for making a liquid crystal display device of claim 32, wherein said second metal includes at least one of including silicon and copper.
Claim 41
Dependent Claim
39 words
The method for making a liquid crystal display device of claim 32, wherein said aluminum alloy of said first metal layer includes approximately 0.1˜2 atomic % of at least one of tantalum, titanium, molybdenum, tungsten, niobium, zirconium, and vanadium.
Claim 42
Dependent Claim
23 words
The method of making a liquid crystal display device of claim 32, wherein said aluminum alloy of the first metal layer includes aluminum-tantalum.
Claim 43
Dependent Claim
41 words
The method for making a liquid crystal display device of claim 32, wherein the step of forming a first metal layer and the step of forming a second layer include patterning said first and second metal layers using a common mask.
Claim 44
Dependent Claim
69 words
The method for making a liquid crystal display device of claim 32, further comprising the step of substantially simultaneously forming a first anodizing layer over a sidewall of said first metal layer and a second anodizing layer over a sidewall of said second metal layer, said sidewall of each of the first and second metal layers having a non-zero angle with respect to the lateral direction of the substrate.
References Cited (Backward Citations)
US4556897A
Cited
US5367179A
Cited
JPH0547765A
Cited
US5627345A
Cited
US5349205A
Cited
JPH0677482A
Cited
JPH06104437A
Cited
JPH06120503A
Cited
JPH06230428A
Cited
JPH06265933A
Cited
JPH06281954A
Cited
JPH06294973A
Cited
JPH06301054A
Cited
JPH0736052A
Cited
JPH0764109A
Cited
JPH0777695A
Cited
JPH07128676A
Cited
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2001-10-19 | 2002-04-20 | 2002-10-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-10-19 | 2006-04-20 | 2006-10-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-10-19 | 2010-04-20 | 2010-10-20 | $7700.00 | Window Closed / Lapsed |