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Optical semiconductor apparatus, fabrication method thereof, modulation method therefor, light source apparatus and optical communication system using the same

Assignee: Canon Inc
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Filing: 1997-09-17
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Granted: 1998-10-13
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Expires: 2017-09-17
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Abstract

Abstract An optical semiconductor apparatus includes a single substrate, at least two semiconductor laser portions each having a semiconductor laser structure and a current injection unit for independently injecting currents into the at least two semiconductor laser portions. The semiconductor laser portions are serially arranged on the substrate in a light propagation direction and respectively includes waveguides having active layers, and layer-extending planes of the waveguides partially overlap and are not parallel to each other. The electric-field directions of TE modes in the respective semiconductor laser portions are parallel to the layer-extending planes of the waveguides, so that the non-parallel layer-extending planes of the waveguides can establish non-parallel TE modes in the respective semiconductor laser portions. In such an integrated optical semiconductor apparatus, such as an integrated semiconductor laser apparatus and an integrated semiconductor optical amplifier apparatus, the polarization mode dependency of gain can be controlled by unevenly injecting current into the semiconductor laser portions whose TE modes are not parallel to each other.

Inventors

  • 👤 Natsuhiko Mizutani
  • 👤 Jun Nitta

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-08 15:14
CPC Classifications
H; H01; H01S; H01S5/00; H01S5/50; H01S5/5009; H01S2301/00; H01S2301/14; H01S5/06; H01S5/062; H01S5/0625

Claims Analysis

Total Claims: 38
Claim 1
Independent Claim 76 words
An optical semiconductor apparatus comprising: a single substrate; at least two semiconductor laser portions each having a semiconductor laser structure, said semiconductor laser portions being serially arranged on said substrate in a light propagation direction and said semiconductor laser portions respectively including waveguides having active layers, and layer-extending planes of said waveguides partially overlapping and being non-parallel to each other; and current injection means for independently injecting currents into said at least two semiconductor laser portions.
Claim 2
Dependent Claim 76 words
An optical semiconductor apparatus comprising: a single substrate; at least two semiconductor laser portions each having a semiconductor laser structure, said semiconductor laser portions being serially arranged on said substrate in a light propagation direction and said semiconductor laser portions respectively including waveguides having active layers, and layer-extending planes of said waveguides partially overlapping and being non-parallel to each other; and current injection means for independently injecting currents into said at least two semiconductor laser portions.
Claim 3
Dependent Claim 25 words
An optical semiconductor apparatus according to claim 1, wherein said at least two semiconductor laser portions are formed on said substrate in a zigzag-patterned manner.
Claim 4
Dependent Claim 24 words
An optical semiconductor apparatus according to claim 1, wherein a compound cavity laser apparatus is constructed by said at least two semiconductor laser portions.
Claim 5
Dependent Claim 20 words
An optical semiconductor apparatus according to claim 1, wherein said optical semiconductor apparatus is constructed as a semiconductor laser apparatus.
Claim 6
Dependent Claim 21 words
An optical semiconductor apparatus according to claim 1, wherein said optical semiconductor apparatus is constructed as a semiconductor optical amplifier apparatus.
Claim 7
Dependent Claim 33 words
An optical semiconductor apparatus according to claim 1, wherein said substrate has a plurality of slant portions having different slant faces thereon and said waveguide is formed on each of said slant portions.
Claim 8
Dependent Claim 30 words
An optical semiconductor apparatus according to claim 6, wherein each of said slant faces of said substrate comprises a forward mesa face of zinc blende type III-V semiconductor compound crystal.
Claim 9
Dependent Claim 60 words
An optical semiconductor apparatus according to claim 7, wherein each of said semiconductor laser portions includes a current restraint structure for restraining current into a portion of said waveguide, and said current restraint structure includes a layer structure having a layer doped with an amphi-conductive impurity and restrains the current into the portion of said waveguide on said slant face.
Claim 10
Dependent Claim 63 words
An optical semiconductor apparatus according to claim 7, wherein each of said semiconductor laser portions includes a current restraint structure for restraining current into a portion of said waveguide, and said current restraint structure includes a layer structure having a layer grown while simultaneously supplying n-type and p-type dopants and restrains the current into the portion of said waveguide on said slant face.
Claim 11
Dependent Claim 55 words
An optical semiconductor apparatus according to claim 7, wherein each of said semiconductor laser portions includes a current restraint structure for restraining currents into a portion of said waveguide, and said current restraint structure includes a layer structure formed by proton-bombardment and restrains the current into the portion of said waveguide on said slant face.
Claim 12
Dependent Claim 32 words
An optical semiconductor apparatus according to claim 2, wherein said substrate comprises a {100} GaAs substrate, and wherein said optical semiconductor apparatus further comprises a forward mesa surface comprising a Ga-stabilized face.
Claim 13
Dependent Claim 16 words
An optical semiconductor apparatus according to claim 11, wherein said Ga-stabilized face comprises a {111}A face.
Claim 14
Dependent Claim 32 words
An optical semiconductor apparatus according to claim 2, wherein said substrate comprises a {110} GaAs substrate, and wherein said optical semiconductor apparatus further comprises a forward mesa surface comprising a {001} face.
Claim 15
Dependent Claim 32 words
An optical semiconductor apparatus according to claim 2, wherein said substrate comprises a {100} InP substrate, and wherein said optical semiconductor apparatus further comprises a forward mesa surface comprising a {111}A face.
Claim 16
Dependent Claim 29 words
An optical semiconductor apparatus according to claim 1, wherein each of said semiconductor laser portions includes a current restraint structure for restraining current into a portion of said waveguide.
Claim 17
Dependent Claim 37 words
An optical semiconductor apparatus according to claim 1, wherein said semiconductor laser portions are separated from each other by a groove, and said groove separates an electrode of said current injecting means into a plurality of portions.
Claim 18
Dependent Claim 45 words
An optical semiconductor apparatus according to claim 1, wherein said semiconductor laser portions are separated from each other by a groove, and said groove is buried with a semiconductor compound layer which has a band gap energy larger than photon energy of oscillated laser light.
Claim 19
Dependent Claim 17 words
An optical semiconductor apparatus according to claim 1, wherein said semiconductor laser portions respectively include diffraction gratings.
Claim 20
Dependent Claim 23 words
An optical semiconductor apparatus according to claim 18, wherein said grating is formed solely on a flat portion of said semiconductor laser portion.
Claim 21
Dependent Claim 17 words
An optical semiconductor apparatus according to claim 1, wherein said semiconductor laser portions form a compound cavity.
Claim 22
Dependent Claim 150 words
An optical communication method for transmitting a signal from a transmitter to a receiver through an optical transmission line, said method comprising the steps of: modulating the polarization mode of light output from an optical semiconductor apparatus between two mutually-perpendicular polarization modes by controlling current injected into the optical semiconductor apparatus, the optical semiconductor apparatus comprising a single substrate; at least two semiconductor laser portions each having a semiconductor laser structure, said semiconductor laser portions being serially arranged on said substrate in a light propagation direction and respectively including waveguides having active layers, layer-extending planes of said waveguides partially overlapping and being non-parallel to each other; and current injection means for independently injecting currents into said at least two semiconductor laser portions; selecting only the light output in one of the two mutually-perpendicular polarization modes to create an amplitude-modulated signal; and transmitting the amplitude-modulated signal through the optical transmission line.
Claim 23
Dependent Claim 150 words
An optical communication method for transmitting a signal from a transmitter to a receiver through an optical transmission line, said method comprising the steps of: modulating the polarization mode of light output from an optical semiconductor apparatus between two mutually-perpendicular polarization modes by controlling current injected into the optical semiconductor apparatus, the optical semiconductor apparatus comprising a single substrate; at least two semiconductor laser portions each having a semiconductor laser structure, said semiconductor laser portions being serially arranged on said substrate in a light propagation direction and respectively including waveguides having active layers, layer-extending planes of said waveguides partially overlapping and being non-parallel to each other; and current injection means for independently injecting currents into said at least two semiconductor laser portions; selecting only the light output in one of the two mutually-perpendicular polarization modes to create an amplitude-modulated signal; and transmitting the amplitude-modulated signal through the optical transmission line.
Claim 24
Dependent Claim 44 words
An optical communication method according to claim 21, wherein the wavelength of the amplitude-modulated signal is tuned by controlling current injected into the optical semiconductor apparatus, and a signal at a desired wavelength is selectively detected by using a wavelength filter in the receiver.
Claim 25
Dependent Claim 168 words
An optical communication system for transmitting a signal from a transmitter to a receiver through an optical transmission line, said system comprising: an optical semiconductor apparatus provided in the transmitter, a polarization mode of light output from said optical semiconductor apparatus being modulated between two mutually-perpendicular polarization modes by controlling current injected into said optical semiconductor apparatus, and said optical semiconductor apparatus comprising a single substrate; at least two semiconductor laser portions each having a semiconductor laser structure, said semiconductor laser portions being serially arranged on said substrate in a light propagation direction and respectively including waveguides having active layers, layer-extending planes of said waveguides partially overlapping and being non-parallel to each other; and current injection means for independently injecting currents into said at least-two semiconductor laser portions; and means for selecting only the light output in one of the two mutually-perpendicular modes so as to create an amplitude-modulated signal, the amplitude-modulated signal being the signal transmitted from the transmitter to the receiver through the optical transmission line.
Claim 26
Dependent Claim 168 words
An optical communication system for transmitting a signal from a transmitter to a receiver through an optical transmission line, said system comprising: an optical semiconductor apparatus provided in the transmitter, a polarization mode of light output from said optical semiconductor apparatus being modulated between two mutually-perpendicular polarization modes by controlling current injected into said optical semiconductor apparatus, and said optical semiconductor apparatus comprising a single substrate; at least two semiconductor laser portions each having a semiconductor laser structure, said semiconductor laser portions being serially arranged on said substrate in a light propagation direction and respectively including waveguides having active layers, layer-extending planes of said waveguides partially overlapping and being non-parallel to each other; and current injection means for independently injecting currents into said at least-two semiconductor laser portions; and means for selecting only the light output in one of the two mutually-perpendicular modes so as to create an amplitude-modulated signal, the amplitude-modulated signal being the signal transmitted from the transmitter to the receiver through the optical transmission line.
Claim 27
Dependent Claim 39 words
An optical communication system according to claim 23, wherein said optical semiconductor apparatus changes the wavelength of the amplitude-modulated signal, and further comprising a wavelength filter provided in the receiver for selectively detecting the signal at a desired wavelength.
Claim 28
Dependent Claim 123 words
A light source apparatus comprising: an optical semiconductor apparatus, a polarization mode of light output from said optical semiconductor apparatus being modulated between two mutually-perpendicular polarization modes by controlling current injected into said optical semiconductor apparatus, and said optical semiconductor apparatus comprising a single substrate; at least two semiconductor laser portions each having a semiconductor laser structure, said semiconductor laser portions being serially arranged on said substrate in a light propagation direction and respectively including waveguides having active layers, layer-extending planes of said waveguides partially overlapping and being non-parallel to each other; and current injection means for independently injecting currents into said at least two semiconductor laser portions; and means for selecting only the light output in one of the two mutually-perpendicular modes.
Claim 29
Dependent Claim 123 words
A light source apparatus comprising: an optical semiconductor apparatus, a polarization mode of light output from said optical semiconductor apparatus being modulated between two mutually-perpendicular polarization modes by controlling current injected into said optical semiconductor apparatus, and said optical semiconductor apparatus comprising a single substrate; at least two semiconductor laser portions each having a semiconductor laser structure, said semiconductor laser portions being serially arranged on said substrate in a light propagation direction and respectively including waveguides having active layers, layer-extending planes of said waveguides partially overlapping and being non-parallel to each other; and current injection means for independently injecting currents into said at least two semiconductor laser portions; and means for selecting only the light output in one of the two mutually-perpendicular modes.
Claim 30
Dependent Claim 74 words
An optical semiconductor apparatus comprising: a single substrate; at least two semiconductor laser portions each having a semiconductor laser structure, said semiconductor laser portions being serially arranged on said substrate in a light propagation direction and said semiconductor laser portions respectively including waveguides having active layers, and layer-extending planes of said waveguides partially overlapping and being non-parallel to each other; and electrodes for independently injecting currents into said at least two semiconductor laser portions.
Claim 31
Dependent Claim 74 words
An optical semiconductor apparatus comprising: a single substrate; at least two semiconductor laser portions each having a semiconductor laser structure, said semiconductor laser portions being serially arranged on said substrate in a light propagation direction and said semiconductor laser portions respectively including waveguides having active layers, and layer-extending planes of said waveguides partially overlapping and being non-parallel to each other; and electrodes for independently injecting currents into said at least two semiconductor laser portions.
Claim 32
Dependent Claim 17 words
An optical semiconductor apparatus according to claim 26, wherein said semiconductor laser portions form a compound cavity.
Claim 33
Dependent Claim 85 words
An optical semiconductor apparatus comprising: at least two semiconductor laser portions each having a semiconductor laser structure, said semiconductor laser portions being serially arranged in a light propagation direction and said semiconductor laser portions respectively including waveguides having active layers, and layer-extending planes of said waveguides being non-parallel to each other, and said semiconductor laser portions being arranged so that said semiconductor laser portions optically couple with each other; and current injection means for independently injecting currents into said at least two semiconductor laser portions.
Claim 34
Dependent Claim 85 words
An optical semiconductor apparatus comprising: at least two semiconductor laser portions each having a semiconductor laser structure, said semiconductor laser portions being serially arranged in a light propagation direction and said semiconductor laser portions respectively including waveguides having active layers, and layer-extending planes of said waveguides being non-parallel to each other, and said semiconductor laser portions being arranged so that said semiconductor laser portions optically couple with each other; and current injection means for independently injecting currents into said at least two semiconductor laser portions.
Claim 35
Dependent Claim 17 words
An optical semiconductor apparatus according to claim 28, wherein said semiconductor laser portions form a compound cavity.
Claim 36
Dependent Claim 83 words
An optical semiconductor apparatus comprising: at least two semiconductor laser portions each having a semiconductor laser structure, said semiconductor laser portions being serially arranged in a light propagation direction and said semiconductor laser portions respectively including waveguides having active layers, and layer-extending planes of said waveguides being non-parallel to each other, and said semiconductor laser portions being arranged so that said semiconductor laser portions optically couple work each other; and electrodes for independently injecting currents into said at least two semiconductor laser portions.
Claim 37
Dependent Claim 83 words
An optical semiconductor apparatus comprising: at least two semiconductor laser portions each having a semiconductor laser structure, said semiconductor laser portions being serially arranged in a light propagation direction and said semiconductor laser portions respectively including waveguides having active layers, and layer-extending planes of said waveguides being non-parallel to each other, and said semiconductor laser portions being arranged so that said semiconductor laser portions optically couple work each other; and electrodes for independently injecting currents into said at least two semiconductor laser portions.
Claim 38
Dependent Claim 17 words
An optical semiconductor apparatus according to claim 30, wherein said semiconductor laser portions form a compound cavity.

References Cited (Backward Citations)

US4785457A Cited
JPH02117190A Cited
US5309268A Cited
US5157544A Cited
US5309275A Cited
US5414549A Cited
JPH0563304A Cited
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