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US5818699A Expired / Lapsed US ⏱️ 0.0 years remaining

Multi-chip module and production method thereof

Assignee: Toshiba Corp
•
Filing: 1996-07-03
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Granted: 1998-10-06
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Expires: 2016-07-03
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Abstract

Abstract An approximately lead-free mounting pad is formed on a first surface of a substrate having wiring circuits, and an electronic element having an approximately lead-free electrode is face-down mounted on the first surface. An approximately lead-free bump is formed on the approximately lead-free electrode of an electronic element. Mounting pads and approximately lead-free bumps are electrically and mechanically connected to each other by approximately lead-free conductive resin. An approximately lead-free sealing pattern is formed at the area which encloses the electronic element mounted area, of the first surface of the substrate. A weld ring made of Kovar is brazed onto the sealing pattern with approximately lead-free solder. The opening edge of a sealing cap made of Kovar disposed opposite to the weld ring and the weld ring are bonded at the deposited zone by welding.

Inventors

  • 👤 Yoshitaka Fukuoka

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-09 12:05
CPC Classifications
H; H10; H10W; H10W76/00; H10W76/60; H10W70/00; H10W70/60; H10W70/62; H10W70/63; H10W72/00; H10W72/071; H10W72/073; H10W72/075; H10W72/50; H10W72/551; H10W72/552; H10W72/5522; H10W72/851; H10W72/874; H10W72/884; H10W72/90; H10W72/951; H10W72/952; H10W90/00; H10W90/701; H10W90/721; H10W90/724; H10W90/731; H10W90/734; H10W90/751; H10W90/754

Claims Analysis

Total Claims: 38
Claim 1
Independent Claim 131 words
A multi-chip module comprising: a substrate comprising an inorganic material having a first wiring circuit, a first area formed on a first surface and a second area formed on the first surface which encloses the first area, the substrate having a mounting pad formed on the first area, and the substrate having a sealing pattern formed on the second area; an electronic element having a first surface facing the first area of the substrate, the electronic element having an electrode formed on the first surface; essentially lead-free mounting means for mounting the electronic element onto the first area of the substrate; an essentially lead-free metal cap having an opening end; and essentially lead-free sealing means for sealing the sealing pattern of the substrate and the opening end of the metal cap.
Claim 2
Dependent Claim 131 words
A multi-chip module comprising: a substrate comprising an inorganic material having a first wiring circuit, a first area formed on a first surface and a second area formed on the first surface which encloses the first area, the substrate having a mounting pad formed on the first area, and the substrate having a sealing pattern formed on the second area; an electronic element having a first surface facing the first area of the substrate, the electronic element having an electrode formed on the first surface; essentially lead-free mounting means for mounting the electronic element onto the first area of the substrate; an essentially lead-free metal cap having an opening end; and essentially lead-free sealing means for sealing the sealing pattern of the substrate and the opening end of the metal cap.
Claim 3
Dependent Claim 16 words
A multi-chip module as set forth in claim 1, wherein the substrate comprises a multilayered substrate.
Claim 4
Dependent Claim 47 words
A multi-chip module as set forth in claim 1, wherein the first area is covered with a film comprising resin, the film having a second wiring circuit connected with the first wiring circuit, and wherein the mounting pad is formed on the exposed surface of the film.
Claim 5
Dependent Claim 48 words
A multi-chip module set forth in claim 1, wherein the mounting means for mounting the electronic element comprise an essentially lead-free metal film deposited on the electrode and an essentially lead-free conductive resin which connects the mounting pad and the electrode having the metal film, electrically and mechanically.
Claim 6
Dependent Claim 28 words
A multi-chip module as set forth in claim 4, wherein the metal film comprises at least one element selected from a group consisting of Au, Ag, and Pd.
Claim 7
Dependent Claim 35 words
A multi-chip module as set forth in claim 4, wherein the conductive resin consists of at least one element selected from a group consisting of Au, Ag, Cu, Pd and Pt as a conductive particle.
Claim 8
Dependent Claim 38 words
A multi-chip module as set forth in claim 1 wherein the mounting pad and the sealing pattern are made of at least one element selected from a group consisting of W, Ni, Au, Ag, Cu, Pd, and Pt.
Claim 9
Dependent Claim 56 words
A multi-chip module as set forth in claim 1, wherein the sealing means for sealing the sealing pattern of the substrate and the opening end of the metal cap comprise a weld ring brazed onto the sealing pattern with an essentially lead-free solder, and a deposited zone which connects the weld ring and the metal cap.
Claim 10
Dependent Claim 143 words
A multi-chip module comprising; a substrate comprising inorganic material having a first wiring circuit, a first area formed on a first surface and a second area formed on the first surface which encloses the first area, the substrate having a mounting pad and a bonding pad formed on the first area, and the substrate having a sealing pattern formed on the second area; a first electronic element having a first surface, the electronic element having a second surface facing the first area of the substrate, the electric element having an electrode formed on the first surface; essentially lead-free mounting means for mounting the first electronic element onto the first area of the substrate; an essentially lead-free metal cap having an opening end; and essentially lead-free sealing means for sealing the sealing pattern of the substrate and the opening end of the metal cap.
Claim 11
Dependent Claim 143 words
A multi-chip module comprising; a substrate comprising inorganic material having a first wiring circuit, a first area formed on a first surface and a second area formed on the first surface which encloses the first area, the substrate having a mounting pad and a bonding pad formed on the first area, and the substrate having a sealing pattern formed on the second area; a first electronic element having a first surface, the electronic element having a second surface facing the first area of the substrate, the electric element having an electrode formed on the first surface; essentially lead-free mounting means for mounting the first electronic element onto the first area of the substrate; an essentially lead-free metal cap having an opening end; and essentially lead-free sealing means for sealing the sealing pattern of the substrate and the opening end of the metal cap.
Claim 12
Dependent Claim 16 words
A multi-chip module as set forth in claim 9, wherein the substrate is a multi-layered substrate.
Claim 13
Dependent Claim 51 words
A multi-chip module as set forth in claim 10, wherein the first area is covered with a film comprising resin, the film having a second wiring circuit connected with the first wiring circuit, and wherein the mounting pad and the bonding pad are formed on the exposed surface of the film.
Claim 14
Dependent Claim 60 words
A multi-chip module as set forth in claim 9, wherein the mounting means for mounting the electronic element comprise an essentially lead-free conductive resin mechanically connecting the mounting pad and the second surface of the first electronic element and an essentially lead-free bonding wire electrically connecting the bonding pad of the substrate and the electrode of the first electronic element.
Claim 15
Dependent Claim 30 words
A multi-chip module as set forth in claim 12, wherein the bonding wire is made of at least one element selected from a group consisting of Au, Al and Cu.
Claim 16
Dependent Claim 68 words
A multi-chip module as set forth in claim 9; wherein the second surface of the electronic element is metallized, wherein the mounting means consists of an essentially lead-free conductive resin electrically and mechanically connecting the mounting pad and the second surface of the first electronic element, and an essentially lead-free bonding wire electrically connecting the bonding pad of the substrate and the electrode of the first electronic element.
Claim 17
Dependent Claim 38 words
A multi-chip module as set forth in claim 9, wherein the mounting pad, bonding pad and the sealing pattern comprise at least one element selected from a group consisting of W, Ni, Au, Ag, Cu, Pd and Pt.
Claim 18
Dependent Claim 56 words
A multi-chip module as set forth in claim 9, wherein the sealing means for sealing the sealing pattern of the substrate and the opening end of the metal cap comprise a weld ring brazed onto the sealing pattern with an essentially lead-free solder, and a deposited zone which connects the weld ring and the metal cap.
Claim 19
Dependent Claim 174 words
A multi-chip module comprising: a substrate comprising inorganic material having a first wiring circuit, a first area formed on a first surface and a second area formed on the first surface which encloses the first area, the substrate having a first mounting pad and a second mounting pad formed on the first area, the substrate having a bonding pad formed on the first area, and the substrate having a sealing pattern formed on the second area; an active element having a first surface, a second surface facing the first area of the substrate, and the active element having an electrode formed on the first surface; a passive element having an electrode, the passive element having an essentially lead-free metal layer deposited on the electrode; essentially lead-free mounting means for mounting the active element and the passive element onto the first area of the substrate; an essentially lead-free metal cap having an opening end; and essentially lead-free sealing means for sealing the sealing pattern of the substrate and the opening end of the metal cap.
Claim 20
Dependent Claim 174 words
A multi-chip module comprising: a substrate comprising inorganic material having a first wiring circuit, a first area formed on a first surface and a second area formed on the first surface which encloses the first area, the substrate having a first mounting pad and a second mounting pad formed on the first area, the substrate having a bonding pad formed on the first area, and the substrate having a sealing pattern formed on the second area; an active element having a first surface, a second surface facing the first area of the substrate, and the active element having an electrode formed on the first surface; a passive element having an electrode, the passive element having an essentially lead-free metal layer deposited on the electrode; essentially lead-free mounting means for mounting the active element and the passive element onto the first area of the substrate; an essentially lead-free metal cap having an opening end; and essentially lead-free sealing means for sealing the sealing pattern of the substrate and the opening end of the metal cap.
Claim 21
Dependent Claim 103 words
A multi-chip module as set forth in claim 17, wherein the mounting means for mounting the electronic element comprise a first connecting means and a second connecting means, the first connecting means having an essentially lead-free conducting resin which connects the first mounting pad and the second surface of the active element, the first connecting means having an essentially lead-free conducting resin which connects the second mounting pad and the electrode of the passive element having the deposited metal layer, and the second connecting means having an essentially lead-free bonding wire which connects the bonding pad and the electrode of the active element.
Claim 22
Dependent Claim 87 words
A multi-chip module comprising: a substrate comprising an approximately lead-free inorganic material having a first wiring circuit, a first area formed on a first surface and a second area formed on the first surface which encloses the first area; electronic elements; essentially lead-free mounting means for mounting the electronic elements onto the first area of the substrate; an essentially lead-free metal cap having an opening end; and essentially lead-free sealing means for sealing the second area of the substrate and the opening end of the metal cap.
Claim 23
Dependent Claim 87 words
A multi-chip module comprising: a substrate comprising an approximately lead-free inorganic material having a first wiring circuit, a first area formed on a first surface and a second area formed on the first surface which encloses the first area; electronic elements; essentially lead-free mounting means for mounting the electronic elements onto the first area of the substrate; an essentially lead-free metal cap having an opening end; and essentially lead-free sealing means for sealing the second area of the substrate and the opening end of the metal cap.
Claim 24
Dependent Claim 184 words
A multi-chip module comprising: a substrate comprising an inorganic material having a first wiring circuit, a first area formed on a first surface and a second area formed on the first surface which encloses the first area, the substrate having a mounting pad formed on the first area, and the substrate having a sealing pattern formed on the second area; an electronic element having a first surface facing the first area of the substrate, the electronic element having an electrode formed on the first surface; mounting means for mounting the electronic element onto the first area of the substrate comprising an essentially lead-free bump formed at the electrode of the electric element and an essentially lead-free conductive resin which connects the mounting pad and the bump, electrically and mechanically; an essentially lead-free metal cap having an opening end; and sealing means for sealing the sealing pattern of the substrate and the opening end of the metal cap comprising a weld ring brazed onto the sealing pattern with an essentially lead-free solder, and a deposited zone which connects the weld ring and the metal cap.
Claim 25
Dependent Claim 184 words
A multi-chip module comprising: a substrate comprising an inorganic material having a first wiring circuit, a first area formed on a first surface and a second area formed on the first surface which encloses the first area, the substrate having a mounting pad formed on the first area, and the substrate having a sealing pattern formed on the second area; an electronic element having a first surface facing the first area of the substrate, the electronic element having an electrode formed on the first surface; mounting means for mounting the electronic element onto the first area of the substrate comprising an essentially lead-free bump formed at the electrode of the electric element and an essentially lead-free conductive resin which connects the mounting pad and the bump, electrically and mechanically; an essentially lead-free metal cap having an opening end; and sealing means for sealing the sealing pattern of the substrate and the opening end of the metal cap comprising a weld ring brazed onto the sealing pattern with an essentially lead-free solder, and a deposited zone which connects the weld ring and the metal cap.
Claim 26
Dependent Claim 185 words
A multi-chip module comprising: a substrate comprising an inorganic material having a first wiring circuit, a first area formed on a first surface and a second area formed on the first surface which encloses the first area, the substrate having a mounting pad formed on the first area, and the substrate having a sealing pattern formed on the second area; an electronic element having a first surface facing the first area of the substrate, the electronic element having an electrode formed on the first surface; mounting means for mounting the electronic element onto the first area of the substrate comprising an essentially lead-free metal film deposited on the electrode and an essentially lead-free conductive resin which connects the mounting pad and the electrode having the metal film, electrically and mechanically; an essentially lead-free metal cap having an opening end; and sealing means for sealing the sealing pattern of the substrate and the opening end of the metal cap comprising a weld ring brazed onto the sealing pattern with an essentially lead-free solder, and a deposited zone which connects the weld ring and the metal cap.
Claim 27
Dependent Claim 185 words
A multi-chip module comprising: a substrate comprising an inorganic material having a first wiring circuit, a first area formed on a first surface and a second area formed on the first surface which encloses the first area, the substrate having a mounting pad formed on the first area, and the substrate having a sealing pattern formed on the second area; an electronic element having a first surface facing the first area of the substrate, the electronic element having an electrode formed on the first surface; mounting means for mounting the electronic element onto the first area of the substrate comprising an essentially lead-free metal film deposited on the electrode and an essentially lead-free conductive resin which connects the mounting pad and the electrode having the metal film, electrically and mechanically; an essentially lead-free metal cap having an opening end; and sealing means for sealing the sealing pattern of the substrate and the opening end of the metal cap comprising a weld ring brazed onto the sealing pattern with an essentially lead-free solder, and a deposited zone which connects the weld ring and the metal cap.
Claim 28
Dependent Claim 208 words
A multi-chip module comprising: a substrate comprising an inorganic material having a first wiring circuit, a first area formed on a first surface and a second area formed on the first surface which encloses the first area, the substrate having a mounting pad and a bonding pad formed on the first area, and the substrate having a sealing pattern formed on the second area; a first electronic element having a first surface, the electronic element having a second surface facing the first area of the substrate, the electric element having an electrode formed on the first surface; mounting means for mounting the first electronic element onto the first area of the substrate comprising essentially lead-free conductive resin mechanically connecting the mounting pad and the second surface of the first electronic element and an essentially lead-free bonding wire electrically connecting the bonding pad of the substrate and the electrode of the first electronic element; an essentially lead-free metal cap having an opening end; and sealing means for sealing the sealing pattern of the substrate and the opening end of the metal cap comprising a weld ring brazed onto the sealing pattern with an approximately lead-free solder, and a deposited zone which connects the weld ring and the metal cap.
Claim 29
Dependent Claim 208 words
A multi-chip module comprising: a substrate comprising an inorganic material having a first wiring circuit, a first area formed on a first surface and a second area formed on the first surface which encloses the first area, the substrate having a mounting pad and a bonding pad formed on the first area, and the substrate having a sealing pattern formed on the second area; a first electronic element having a first surface, the electronic element having a second surface facing the first area of the substrate, the electric element having an electrode formed on the first surface; mounting means for mounting the first electronic element onto the first area of the substrate comprising essentially lead-free conductive resin mechanically connecting the mounting pad and the second surface of the first electronic element and an essentially lead-free bonding wire electrically connecting the bonding pad of the substrate and the electrode of the first electronic element; an essentially lead-free metal cap having an opening end; and sealing means for sealing the sealing pattern of the substrate and the opening end of the metal cap comprising a weld ring brazed onto the sealing pattern with an approximately lead-free solder, and a deposited zone which connects the weld ring and the metal cap.
Claim 30
Dependent Claim 163 words
A multi-chip module comprising: a substrate comprising an inorganic material having a first wiring circuit, a first area formed on a first surface and a second area formed on the first surface which encloses the first area, the substrate having a mounting pad formed on the first area, and the substrate having a sealing pattern formed on the second area; an electronic element having first surface facing the first area of the substrate, the electronic element having an electrode formed on the first surface; essentially lead-free mounting means for mounting the electronic element onto the first area of the substrate, the mounting means comprising an essentially lead-free bump formed at the electrode of the electric element and an essentially lead-free conductive resin which connects the mounting pad and the bump, electrically and mechanically; an essentially lead-free metal cap having an opening end; and essentially lead-free sealing means for sealing the sealing pattern of the substrate and the opening end of the metal cap.
Claim 31
Dependent Claim 163 words
A multi-chip module comprising: a substrate comprising an inorganic material having a first wiring circuit, a first area formed on a first surface and a second area formed on the first surface which encloses the first area, the substrate having a mounting pad formed on the first area, and the substrate having a sealing pattern formed on the second area; an electronic element having first surface facing the first area of the substrate, the electronic element having an electrode formed on the first surface; essentially lead-free mounting means for mounting the electronic element onto the first area of the substrate, the mounting means comprising an essentially lead-free bump formed at the electrode of the electric element and an essentially lead-free conductive resin which connects the mounting pad and the bump, electrically and mechanically; an essentially lead-free metal cap having an opening end; and essentially lead-free sealing means for sealing the sealing pattern of the substrate and the opening end of the metal cap.
Claim 32
Dependent Claim 36 words
A multi-chip module as set forth in claim 23, wherein the conductive resin consists of at least one element selected from a group of consisting of Au, Ag, Cu, Pd and Pt as a conductive particle.
Claim 33
Dependent Claim 18 words
A multi-chip module as set forth in claim 23, wherein the conductive resin is an anisotropic conductive film.
Claim 34
Dependent Claim 31 words
A multi-chip module as set forth in claim 23, wherein the bump comprises at least one element selected from a group consisting of Au, Ag, Cu, Pd, Ni, Cr and Ti.
Claim 35
Dependent Claim 178 words
A multi-chip module comprising: a substrate comprising an inorganic material having a first wiring circuit, a first area formed on a first surface and a second area formed on the first surface which encloses the first area, the substrate having a mounting pad formed on the first area, and the substrate having a sealing pattern formed on the second area; an electronic element having a first surface facing with the first area of the substrate, the electronic element having an electrode formed on the first surface; essentially lead-free mounting means for mounting the electronic element onto the first area of the substrate; an essentially lead-free metal cap having an opening end; and essentially lead-free sealing means for sealing the sealing pattern of the substrate and the opening end of the metal cap, the sealing means comprising a weld ring brazed onto the sealing pattern with an essentially lead-free solder, and a deposited zone which connects the weld ring and the metal cap, and the weld ring, the metal cap and the deposited zone which comprise an Fe--Ni--Co alloy.
Claim 36
Dependent Claim 178 words
A multi-chip module comprising: a substrate comprising an inorganic material having a first wiring circuit, a first area formed on a first surface and a second area formed on the first surface which encloses the first area, the substrate having a mounting pad formed on the first area, and the substrate having a sealing pattern formed on the second area; an electronic element having a first surface facing with the first area of the substrate, the electronic element having an electrode formed on the first surface; essentially lead-free mounting means for mounting the electronic element onto the first area of the substrate; an essentially lead-free metal cap having an opening end; and essentially lead-free sealing means for sealing the sealing pattern of the substrate and the opening end of the metal cap, the sealing means comprising a weld ring brazed onto the sealing pattern with an essentially lead-free solder, and a deposited zone which connects the weld ring and the metal cap, and the weld ring, the metal cap and the deposited zone which comprise an Fe--Ni--Co alloy.
Claim 37
Dependent Claim 189 words
A multi-chip module comprising: a substrate comprising inorganic material having a first wiring circuit, a first area formed on a first surface and a second area formed on the first surface which encloses the first area, the substrate having a mounting pad and a bonding pad formed on the first area, and the substrate having a sealing pattern formed on the second area; a first electronic element having a first surface, the electronic element having a second surface facing the first area of the substrate, the electric element having an electrode formed on the first surface; essentially lead-free mounting means for mounting the first electronic element onto the first area of the substrate; an essentially lead-free metal cap having an opening end; and essentially lead-free sealing means for sealing the sealing pattern of the substrate and the opening end of the metal cap, the sealing means comprising a weld ring brazed onto the sealing pattern with an essentially lead-free solder, and a deposited zone which connects the weld ring and the metal cap, and the weld ring, the metal cap and the deposited zone which comprise an Fe--Ni--Co alloy.
Claim 38
Dependent Claim 189 words
A multi-chip module comprising: a substrate comprising inorganic material having a first wiring circuit, a first area formed on a first surface and a second area formed on the first surface which encloses the first area, the substrate having a mounting pad and a bonding pad formed on the first area, and the substrate having a sealing pattern formed on the second area; a first electronic element having a first surface, the electronic element having a second surface facing the first area of the substrate, the electric element having an electrode formed on the first surface; essentially lead-free mounting means for mounting the first electronic element onto the first area of the substrate; an essentially lead-free metal cap having an opening end; and essentially lead-free sealing means for sealing the sealing pattern of the substrate and the opening end of the metal cap, the sealing means comprising a weld ring brazed onto the sealing pattern with an essentially lead-free solder, and a deposited zone which connects the weld ring and the metal cap, and the weld ring, the metal cap and the deposited zone which comprise an Fe--Ni--Co alloy.

References Cited (Backward Citations)

US5153709A Cited
US5414300A Cited
US5473512A Cited
US5477009A Cited
US5639989A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2001-10-05 2002-04-06 2002-10-06 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2005-10-05 2006-04-06 2006-10-06 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2009-10-05 2010-04-06 2010-10-06 $7700.00 Window Closed / Lapsed

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