US5817541A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Methods of fabricating an HDMI decal chip scale package
Assignee: Raytheon Co
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Filing: 1997-03-20
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Granted: 1998-10-06
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Expires: 2017-03-20
Abstract
Abstract Methods of producing a chip scale package that enables any chip with peripheral bond pads to be converted to an area array chip scale package suitable for chip on board assembly. The present invention produces the equivalent of a flip chip die when a chip supplier does not provide one. Processing is performed that provides thin film metal interconnections between the chip bond pads and area array bond pads on the bottom of the package. High reliability thin film metal interconnections are thus provided that connect the bond pads of the chip to the area array bond pads to permit external connection to the chip.
Inventors
- 👤 George Averkiou
- 👤 Philip A. Trask
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 01:19
CPC Classifications
H; H10; H10W; H10W72/00; H10W72/90; H10P; H10P72/00; H10P72/70; H10P72/74; H10W72/01; H10W72/0198; H10W74/00; H10W74/10; H10W74/111; H10P72/7424; H10P72/743; H10P72/7432; H10W70/00; H10W70/01; H10W70/05; H10W70/60; H10W70/62; H10W70/65; H10W70/652; H10W72/941; H10W72/942
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
292 words
A method of fabricating a high density multilayer interconnect (HDMI) decal chip scale package, said method comprising the steps of: depositing and curing a layer of polyimide on a transparent substrate; depositing and patterning pad metal comprising metal pads on the layer of polyimide; depositing and curing a second layer of polyimide over the metal pads; patterning and etching vias to the metal pads; depositing and patterning a metal interconnect layer that provides for connection to the metal pads; depositing and curing a third layer of polyimide over the metal interconnect layer; applying a layer of adhesive to areas where chips are to be attached; attaching chips face down onto the layer of adhesive so that their peripheral bond pads are adhesively attached to the third layer of polyimide; attaching a plate to backs of the chips to produce an HDMI decal; delaminating the HDMI decal from the transparent substrate; forming vias through the second and third layers of polyimide to expose selected metal pads and portions of the metal interconnect layer; depositing a second metal interconnect layer on the exposed surface of the second and third layer of polyimide; depositing a layer of dielectric material on the surface of the second metal interconnect layer to fill depressions therein where the vias were formed; curing the dielectric material to form an etch mask to protect regions where contact between the metal pads and the metal interconnect layer is made; etching the surface of the HDMI decal through the layer of dielectric material forming the etch mask; depositing area array bonding pads in a predetermined configuration to connect to the metal pads that permit external connection to the chip; separating the chips from each other; and releasing the separated chips from the plate.
Claim 2
Independent Claim
292 words
A method of fabricating a high density multilayer interconnect (HDMI) decal chip scale package, said method comprising the steps of: depositing and curing a layer of polyimide on a transparent substrate; depositing and patterning pad metal comprising metal pads on the layer of polyimide; depositing and curing a second layer of polyimide over the metal pads; patterning and etching vias to the metal pads; depositing and patterning a metal interconnect layer that provides for connection to the metal pads; depositing and curing a third layer of polyimide over the metal interconnect layer; applying a layer of adhesive to areas where chips are to be attached; attaching chips face down onto the layer of adhesive so that their peripheral bond pads are adhesively attached to the third layer of polyimide; attaching a plate to backs of the chips to produce an HDMI decal; delaminating the HDMI decal from the transparent substrate; forming vias through the second and third layers of polyimide to expose selected metal pads and portions of the metal interconnect layer; depositing a second metal interconnect layer on the exposed surface of the second and third layer of polyimide; depositing a layer of dielectric material on the surface of the second metal interconnect layer to fill depressions therein where the vias were formed; curing the dielectric material to form an etch mask to protect regions where contact between the metal pads and the metal interconnect layer is made; etching the surface of the HDMI decal through the layer of dielectric material forming the etch mask; depositing area array bonding pads in a predetermined configuration to connect to the metal pads that permit external connection to the chip; separating the chips from each other; and releasing the separated chips from the plate.
Claim 3
Dependent Claim
20 words
The method of claim 1 wherein the step of attaching the plate to backs of the chips comprises using adhesive.
Claim 4
Dependent Claim
29 words
The method of claim 1 further comprising the step of: machining the backs of the chips in situ to provide a flat level surface for attachment of the plate.
Claim 5
Dependent Claim
18 words
The method of claim 1 wherein the vias are formed by laser ablation through the layers of polyimide.
Claim 6
Dependent Claim
19 words
The method of claim 1 wherein the step of depositing the dielectric material comprises the step of depositing polyimide.
Claim 7
Dependent Claim
23 words
The method of claim 1 wherein the step of depositing area array bonding pads is achieved by plating the area array bonding pads.
Claim 8
Dependent Claim
28 words
The method of claim 1 wherein the step of separating the chips from each other comprises the step of laser ablating the second and third layers of polyimide.
Claim 9
Dependent Claim
23 words
The method of claim 1 wherein the step of releasing the separated chips from the plate comprises the step of heating the plate.
Claim 10
Independent Claim
111 words
A method of fabricating a high density multilayer interconnect (HDMI) decal chip scale package, said method comprising the steps of: fabricating an HDMI decal on a substrate; attaching a chip having a plurality of bond pads face down onto the HDMI decal; delaminating the HDMI decal from its underlying substrate; forming vias in the HDMI decal that expose the bond pads on the chip; processing the HDMI decal to provide interconnect metal that connects to the bond pads on the chip; masking connection areas and removing portions of the interconnect metal to form bonding areas; and processing the bonding areas to provide a chip scale package having area array bond pads.
Claim 11
Independent Claim
111 words
A method of fabricating a high density multilayer interconnect (HDMI) decal chip scale package, said method comprising the steps of: fabricating an HDMI decal on a substrate; attaching a chip having a plurality of bond pads face down onto the HDMI decal; delaminating the HDMI decal from its underlying substrate; forming vias in the HDMI decal that expose the bond pads on the chip; processing the HDMI decal to provide interconnect metal that connects to the bond pads on the chip; masking connection areas and removing portions of the interconnect metal to form bonding areas; and processing the bonding areas to provide a chip scale package having area array bond pads.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-10-05 | 2002-04-06 | 2002-10-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-10-05 | 2006-04-06 | 2006-10-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-10-05 | 2010-04-06 | 2010-10-06 | $7700.00 | Window Closed / Lapsed |