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US5812571A Expired / Lapsed US ⏱️ 0.0 years remaining

High-power vertical cavity surface emitting laser cluster

Assignee: W.L. Gore and Associates Inc
•
Filing: 1996-10-25
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Granted: 1998-09-22
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Expires: 2016-10-25
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Abstract

Abstract A laser cluster for high-power applications includes an array of VCSELs. The array of VCSELs includes a center VCSEL and one or more peripheral VCSELs displaced from the center VCSEL in a hexagonal closest-packing arrangement sharing a pair of common electrical contacts. Each VCSEL in the array is flip-chip mounted on a heat sink to present the backside of the VCSEL. A multimode optical fiber is coupled to receive laser light from the array of VCSELs. The array of VCSELs is operable to generate a laser burst at a wavelength in a range from 950 nm to 1050 nm. In a process for fabricating a VCSEL that can be clustered for high-power applications, a bottom n-doped mirror stack is deposited above an n-doped gallium arsenide substrate. An active region including indium gallium arsenide is deposited above the bottom mirror stack. A top p-doped mirror stack is deposited above the active region. Electrical contacts are applied to the top mirror stack and to the substrate. The laser cluster is packaged and sealed.

Inventors

  • 👤 Frank H. Peters

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-09 00:40
CPC Classifications
H; H01; H01S; H01S5/00; H01S5/40; H01S5/42; H01S5/423; G; G02; G02B; G02B6/00; G02B6/24; G02B6/42; G02B6/4201; G02B6/4204; G02B6/421; H01S5/02; H01S5/022; H01S5/02208; H01S5/02212; H01S5/0225; H01S5/02251; H01S5/0233; H01S5/0234; H01S5/024; H01S5/02461; H01S5/02476; H01S5/02484; H01S5/10; H01S5/18; H01S5/183; H01S5/18305

Claims Analysis

Total Claims: 19
Claim 1
Independent Claim 61 words
A laser cluster for high-power applications, comprising: an array of VCSELs including a center VCSEL and one or more peripheral VCSELs displaced from the center VCSEL; and a pair of common electrical contacts shared by said array of VCSELs; wherein the VCSELs in said array are separated by a distance in a range from about 10 mm to about 40 mm.
Claim 2
Dependent Claim 61 words
A laser cluster for high-power applications, comprising: an array of VCSELs including a center VCSEL and one or more peripheral VCSELs displaced from the center VCSEL; and a pair of common electrical contacts shared by said array of VCSELs; wherein the VCSELs in said array are separated by a distance in a range from about 10 mm to about 40 mm.
Claim 3
Dependent Claim 63 words
A laser cluster for high-power applications, comprising: an array of VCSELs including a center VCSEL and one or more peripheral VCSELs displaced from the center VCSEL; and a pair of common electrical contacts shared by said array of VCSELs; wherein each VCSEL in said array presents an emitting facet having a diameter in a range from about 5 mm to about 30 mm.
Claim 4
Dependent Claim 63 words
A laser cluster for high-power applications, comprising: an array of VCSELs including a center VCSEL and one or more peripheral VCSELs displaced from the center VCSEL; and a pair of common electrical contacts shared by said array of VCSELs; wherein each VCSEL in said array presents an emitting facet having a diameter in a range from about 5 mm to about 30 mm.
Claim 5
Dependent Claim 22 words
A laser cluster as defined in claims 1 or 2, wherein: each VCSEL in said array is mounted on a heat sink.
Claim 6
Dependent Claim 24 words
A laser cluster as defined in claims 1 or 2, further comprising: a multimode optical fiber coupled to receive light emitted from said array.
Claim 7
Dependent Claim 96 words
A process of fabricating a laser cluster for high-power applications, comprising the following steps: (A) providing an array of VCSELs in a hexagonal closest-packing arrangement; (B) connecting the array of VCSELs to a pair of common electrical contacts; and (C) coupling the array of VCSELs into a multimode optical fiber; wherein each VCSEL in the array presents an emitting facet having a diameter in a range from about 5 mm to about 30 mm, and the VCSELs in the array are separated by a distance in a range from about 10 mm to about 40 mm.
Claim 8
Dependent Claim 96 words
A process of fabricating a laser cluster for high-power applications, comprising the following steps: (A) providing an array of VCSELs in a hexagonal closest-packing arrangement; (B) connecting the array of VCSELs to a pair of common electrical contacts; and (C) coupling the array of VCSELs into a multimode optical fiber; wherein each VCSEL in the array presents an emitting facet having a diameter in a range from about 5 mm to about 30 mm, and the VCSELs in the array are separated by a distance in a range from about 10 mm to about 40 mm.
Claim 9
Dependent Claim 20 words
A process as defined in claim 5, further comprising the step: mounting the array of VCSELs on a heat sink.
Claim 10
Dependent Claim 33 words
A process as defined in claim 5, wherein: each VCSEL in the array is a bottom-emitting VCSEL, and further comprising the step of: flip-chip mounting the array of VCSELs on a heat sink.
Claim 11
Dependent Claim 88 words
A package for a laser cluster, comprising: a housing; a submount in said housing; a laser cluster including an array of VCSELs mounted junction-side down on said submount so that said laser cluster presents a backside emitting surface; and a multimode optical fiber including a core, said multimode optical fiber passing through said housing and coupled onto said backside emitting surface; said laser cluster includes seven VCSELs positioned within a circular area, said circular area having a diameter which is substantially equal to the diameter of said core.
Claim 12
Dependent Claim 88 words
A package for a laser cluster, comprising: a housing; a submount in said housing; a laser cluster including an array of VCSELs mounted junction-side down on said submount so that said laser cluster presents a backside emitting surface; and a multimode optical fiber including a core, said multimode optical fiber passing through said housing and coupled onto said backside emitting surface; said laser cluster includes seven VCSELs positioned within a circular area, said circular area having a diameter which is substantially equal to the diameter of said core.
Claim 13
Dependent Claim 25 words
A package as defined in claim 8, further comprising: common ground and ignition contacts which are electrically connected through said submount to said laser cluster.
Claim 14
Dependent Claim 33 words
A package as defined in claim 8, wherein: each of said array of VCSELs is capable of emitting coherent electromagnetic radiation having a wavelength in a range from 950 nm to 1050 nm.
Claim 15
Dependent Claim 13 words
A package as defined in claim 8, wherein: said submount includes aluminum nitride.
Claim 16
Dependent Claim 69 words
A process of fabricating a laser cluster for high-power applications, comprising the following steps: (A) providing an array of VCSELs; (B) connecting the array of VCSELs to a pair of common electrical contacts; and (C) coupling the array of VCSELs into a multimode optical fiber; wherein each VCSEL in the array presents an emitting facet having a diameter in a range from about 5 mm to about 30 mm.
Claim 17
Dependent Claim 69 words
A process of fabricating a laser cluster for high-power applications, comprising the following steps: (A) providing an array of VCSELs; (B) connecting the array of VCSELs to a pair of common electrical contacts; and (C) coupling the array of VCSELs into a multimode optical fiber; wherein each VCSEL in the array presents an emitting facet having a diameter in a range from about 5 mm to about 30 mm.
Claim 18
Dependent Claim 67 words
A process of fabricating a laser cluster for high-power applications, comprising the following steps: (A) providing an array of VCSELs; (B) connecting the array of VCSELs to a pair of common electrical contacts; and (C) coupling the array of VCSELs into a multimode optical fiber; wherein the VCSELs in the array are separated by a distance in a range from about 10 mm to about 40 mm.
Claim 19
Dependent Claim 67 words
A process of fabricating a laser cluster for high-power applications, comprising the following steps: (A) providing an array of VCSELs; (B) connecting the array of VCSELs to a pair of common electrical contacts; and (C) coupling the array of VCSELs into a multimode optical fiber; wherein the VCSELs in the array are separated by a distance in a range from about 10 mm to about 40 mm.

References Cited (Backward Citations)

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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2001-09-21 2002-03-23 2002-09-22 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2005-09-21 2006-03-23 2006-09-22 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2009-09-21 2010-03-23 2010-09-22 $7700.00 Window Closed / Lapsed

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