US5807788A
Expired / Lapsed
US
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Method for selective deposition of refractory metal and device formed thereby
Assignee: International Business Machines Corp
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Filing: 1996-11-20
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Granted: 1998-09-15
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Expires: 2016-11-20
Abstract
Abstract A method and the device produced by the method of selective refractory metal growth/deposition on exposed silicon, but not on the field oxide is disclosed. The method includes preconditioning a wafer in a DHF dip followed by the steps of 1) selectively depositing a refractory metal on the exposed surfaces of the silicon substrate by reacting a refractory metal halide with the exposed surfaces of said silicon substrate; 2) limiting silicon substrate consumption by reacting the refractory metal halide with a silicon containing gas; and 3) further increasing the refractory metal thickness by reacting the refractory metal halide with hydrogen. Through an adequate pretreatment and selection of the parameters of 1) temperature; 2) pressure; 3) time; 4) flow and 5) flow ratio during each of the deposition steps, this invention adequately addresses the difficulties of uneven n+ versus p+ (source/drain) growth, deep consumption/encroachment by the refractory metal into silicon regions (e.g., worm holes), poor adhesion, uncontrolled selectivity and uneven morphology.
Inventors
- 👤 Stephen Bruce Brodsky
- 👤 Richard Anthony Conti
- 👤 Seshadri Subbanna
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 04:08
CPC Classifications
H; H10; H10D; H10D30/00; H10D30/01; H10D30/021; H10D30/0215; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/069; C; C23; C23C; C23C16/00; C23C16/04; H10D64/00; H10D64/01; H10D64/013; H10D64/01302; H10D64/01304; H10D64/01306; H10D64/01308; H10D64/01312; H10P; H10P14/00; H10P14/40; H10P14/42; H10P14/43; H10P14/432
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
82 words
A method for selectively depositing a refractory metal on exposed surfaces of a silicon substrate having oxide regions thereon, the method comprising the steps of: a). selectively depositing a refractory metal on said exposed surfaces of said silicon substrate by reacting a refractory metal halide with the exposed surfaces of said silicon substrate; b). limiting silicon substrate consumption by reacting the refractory metal halide with a silicon containing gas; and c). reacting the refractory metal halide with hydrogen to thereby maintain selectivity.
Claim 2
Independent Claim
82 words
A method for selectively depositing a refractory metal on exposed surfaces of a silicon substrate having oxide regions thereon, the method comprising the steps of: a). selectively depositing a refractory metal on said exposed surfaces of said silicon substrate by reacting a refractory metal halide with the exposed surfaces of said silicon substrate; b). limiting silicon substrate consumption by reacting the refractory metal halide with a silicon containing gas; and c). reacting the refractory metal halide with hydrogen to thereby maintain selectivity.
Claim 3
Dependent Claim
22 words
The method of claim 1, wherein step a) comprises: selectively depositing the refractory metal on source/drain diffusion regions at nearly identical rates.
Claim 4
Dependent Claim
19 words
The method of claim 1, wherein the refractory metal is tungsten and the refractory metal halide is tungsten hexaflouride.
Claim 5
Dependent Claim
19 words
The method of claim 1, wherein the refractory metal is molybdenum and the refractory metal halide is molybdenum hexaflouride.
Claim 6
Dependent Claim
18 words
The method of claim 1, wherein the steps further comprise: depositing a selective refractory metal utilizing blanket equipment.
Claim 7
Dependent Claim
45 words
The method of claim 5, wherein step a). further comprises selectively depositing the refractory metal at a total pressure range of 30 to 100 Torr; and wherein step b). further comprises limiting silicon substrate consumption at a total pressure range of 30 to 100 Torr.
Claim 8
Dependent Claim
26 words
The method of claim 1, wherein step a). further comprises: selectively depositing the refractory metal on the silicon substrate for a period of about 1 second.
Claim 9
Dependent Claim
31 words
The method of claim 1, further comprising before step a). the step of: d). preconditioning the siliconsubstrate, wherein said preconditioning step consists of a DHF dip to thereby eliminate native oxides.
Claim 10
Dependent Claim
28 words
The method of claim 1, wherein after step c). the refractory metal has a thickness greater than 100 Angstroms and the silicon consumption is less than 100 Angstroms.
Claim 11
Dependent Claim
71 words
The method of claim 1, wherein step a). comprises: exposing WF 6 to the silicon substrate at a flow rate of 5-10 sccm; a temperature range of 275° to 325° C.; a partial pressure range of 10-50 milliTorr (mTorr) for WF 6 ; a total pressure range of 30 to 100 Torr; a period of about 1 second; and a flow rate of 10,000-20,000 standard cubic centimeters/minute (sccm) for Argon (Ar).
Claim 12
Dependent Claim
15 words
The method of claim 1, wherein the refractory metal is deposited by chemical vapor deposition.
Claim 13
Dependent Claim
14 words
The method of claim 1, wherein the silicon containing gas is SiH 4 .
Claim 14
Independent Claim
62 words
A method for selective refractory metal deposition comprising the steps of: a). providing a blanket Chemical Vapor Deposition (CVD) reactor; b). placing a wafer into said blanket CVD reactor; and c). selectively depositing a refractory metal on said wafer at a total pressure in a range of 30 to 100 Torr and a temperature in a range of 275° to 325° C.
Claim 15
Independent Claim
62 words
A method for selective refractory metal deposition comprising the steps of: a). providing a blanket Chemical Vapor Deposition (CVD) reactor; b). placing a wafer into said blanket CVD reactor; and c). selectively depositing a refractory metal on said wafer at a total pressure in a range of 30 to 100 Torr and a temperature in a range of 275° to 325° C.
Claim 16
Dependent Claim
15 words
The method of claim 13, wherein step c) further comprises a pressure of 40 Torr.
Claim 17
Dependent Claim
15 words
The method of claim 13, wherein step c) further comprises a temperature of 300° C.
Claim 18
Dependent Claim
75 words
The method of claim 13, wherein step c) further comprises the steps of: d). selectively depositing a refractory metal on said wafers having an exposed surfaces of a silicon substrate by reacting a refractory metal halide with the exposed surfaces of said silicon substrate; e). limiting silicon substrate consumption by reacting the refractory metal halide with a silicon containing gas; and f). increasing the refractory metal thickness by reacting the refractory metal halide with hydrogen.
Claim 19
Dependent Claim
23 words
The method of claim 16, wherein the reaction ratio of the silicon containing gas to refractory metal halide in step e) is 5-15.
Claim 20
Dependent Claim
28 words
The method of claim 13, further comprising the step of: preconditioning the silicon substrate, wherein said preconditioning step consists of a DHF dip to thereby eliminate native oxides.
Claim 21
Dependent Claim
77 words
The method of claim 1, wherein step b). comprises: reacting the refractory metal halide and silane gas at a temperature in a range of 275° to 325° C.; a WF 5 partial pressure in the range of 10-50 mTorr; a total pressure range of 30 to 100 Torr; an H 2 flow in the range of 5-10 Standard Liters/Minute (SLM); Ar flow in the range of 10-20 SLM; SiH 4 flow in the range of 40-50 sccm.
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