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US5798537A Expired / Lapsed US ⏱️ 0.0 years remaining

Blue light-emitting device

Assignee: Toshiba Corp
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Filing: 1996-08-29
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Granted: 1998-08-25
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Expires: 2016-08-29
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Abstract

Abstract There is disclosed a blue light emitting device having a laminated structure, which comprises a buffer layer made of a first conductivity type GaN-based semiconductor, a first cladding layer made of the first conductivity type GaN-based semiconductor, an active layer made of a substantially intrinsic GaN-based semiconductor, and a second cladding layer made of a second conductivity type GaN-based semiconductor, on a conductive substrate such as a conductive sapphire substrate. The GaN-based semiconductors of the present invention are made of quaternary compound semiconductor layers, and preferably made of In x A y Ga 1-x-y N whose mole fraction values x, y satisfy 0≦x≦1, 0≦y≦1 and x+y≦1. The mole fraction values x, y are selected to obtain desired luminous wavelength and intensity.

Inventors

  • 👤 Koichi Nitta

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-05 19:03
CPC Classifications
H; H10; H10H; H10H20/00; H10H20/80; H10H20/81; H10H20/822; H10H20/824; H10H20/825; H01; H01S; H01S5/00; H01S5/30; H01S5/32; H01S5/323; H01S5/32308; H01S5/32341; H10H20/01; H10H20/011; H10H20/013; H10H20/0133; H10H20/01335; H01S2304/00; H01S2304/04; H01S5/02; H01S5/0206; H01S5/0217

Claims Analysis

Total Claims: 14
Claim 1
Independent Claim 196 words
A light emitting device comprising: (a) a conductive sapphire substrate having a resistivity of less than 1 Ω-cm; (b) a buffer layer formed of a first conductivity type In x Al y Ga 1-x-y N having mole fraction values x, y selected as 0≦x≦0.5, 0.5≦y≦1, x+y≦1 formed on the top surface of said conductive sapphire substrate; (c) a first cladding layer formed of said first conductivity type In x Al y Ga 1-x-y N having mole fraction values x, y selected as 0≦x≦0.3, 0.1≦y≦1.0 and x+y≦1 formed on said buffer layer; (d) an active layer formed of substantially intrinsic In x Al y Ga 1-x-y N having mole fraction values x, y selected as 0≦x≦0.6, 0≦y≦0.5, and x+y≦1 formed on said first cladding layer; (e) a second cladding layer formed of a second conductivity type In x Al y Ga 1-x-y N having mole fraction values x, y selected as 0≦x≦0.3, 0.1≦y≦1.0 and x+y≦1 formed on said active layer, said second conductivity type being opposite to said first conductivity type; (f) a transparent electrode layer formed on said second cladding layer; (g) a metal electrode layer formed beneath the bottom surface of said conductive sapphire substrate.
Claim 2
Dependent Claim 196 words
A light emitting device comprising: (a) a conductive sapphire substrate having a resistivity of less than 1 Ω-cm; (b) a buffer layer formed of a first conductivity type In x Al y Ga 1-x-y N having mole fraction values x, y selected as 0≦x≦0.5, 0.5≦y≦1, x+y≦1 formed on the top surface of said conductive sapphire substrate; (c) a first cladding layer formed of said first conductivity type In x Al y Ga 1-x-y N having mole fraction values x, y selected as 0≦x≦0.3, 0.1≦y≦1.0 and x+y≦1 formed on said buffer layer; (d) an active layer formed of substantially intrinsic In x Al y Ga 1-x-y N having mole fraction values x, y selected as 0≦x≦0.6, 0≦y≦0.5, and x+y≦1 formed on said first cladding layer; (e) a second cladding layer formed of a second conductivity type In x Al y Ga 1-x-y N having mole fraction values x, y selected as 0≦x≦0.3, 0.1≦y≦1.0 and x+y≦1 formed on said active layer, said second conductivity type being opposite to said first conductivity type; (f) a transparent electrode layer formed on said second cladding layer; (g) a metal electrode layer formed beneath the bottom surface of said conductive sapphire substrate.
Claim 3
Dependent Claim 29 words
The device of claim 1, wherein said conductive sapphire substrate is doped with at least an impurity selected from the group consisting of C, Si, Ge, Sn and Pb.
Claim 4
Dependent Claim 32 words
The device of claim 1, further comprising: a contact layer formed of a second conductivity type In x Al y Ga 1-x-y N layer (0.5≦x≦1.0, 0.0≦y≦0.1) formed on said second cladding layer.
Claim 5
Dependent Claim 31 words
The device of claim 1, further comprising: a contact layer formed of a first conductivity type In x Al y Ga 1-x-y N layer (0.5≦x≦1.0, 0.0≦y≦0.1) formed beneath said conductive substrate.
Claim 6
Dependent Claim 20 words
The device of claim 2, wherein said impurity is an element doped during epitaxial growth of the conductive sapphire substrate.
Claim 7
Dependent Claim 14 words
The device of claim 1, wherein said transparent electrode layer is an ITO film.
Claim 8
Dependent Claim 15 words
The device of claim 1, wherein said transparent electrode layer is a thin metal film.
Claim 9
Dependent Claim 34 words
The device of claim 6, further comprising: a contact layer formed of a second conductivity type In x Al y Ga 1-x-y N layer formed between said second cladding layer and said ITO film.
Claim 10
Dependent Claim 35 words
The device of claim 7, further comprising: a contact layer formed of a second conductivity type In x Al y Ga 1-x-y N layer formed between said second cladding layer and said thin metal film.
Claim 11
Dependent Claim 17 words
The device of claim 1, wherein said buffer layer is metallurgically contacted with said conductive sapphire substrate.
Claim 12
Dependent Claim 33 words
The device of claim 1, wherein said conductive sapphire substrate is doped with at least an impurity selected from the group consisting of Be, Mg, Ca, Sr, Ba, Ra, Zn, Cd and Hg.
Claim 13
Dependent Claim 18 words
The device of claim 11, wherein the conductive sapphire substrate is doped with said impurity during epitaxial growth.
Claim 14
Dependent Claim 51 words
The device of claim 1, wherein respective mole fraction values x, y in said In x Al y Ga 1-x-y N are selected as 0<x≦0.5, 0.5≦y≦1 in said buffer layer, 0<x≦0.3, 0.1≦y≦1 in said first cladding layer, 0<x≦0.6, 0≦y≦0.5 in said active layer, and 0<x≦0.3, 0.1≦y≦1.0 in said second cladding layer.

References Cited (Backward Citations)

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JPH0563266A Cited
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US5602418A Cited
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USPTO Annuity & Maintenance Windows

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