US5792702A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for forming a film over a spin-on-glass layer by means of plasma-enhanced chemical-vapor deposition
Assignee: Winbond Electronics Corp
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Filing: 1996-12-19
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Granted: 1998-08-11
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Expires: 2016-12-19
Abstract
Abstract A method for forming an oxide film over a spin-on-glass (SOG) layer by a plasma-enhanced chemical-vapor deposition (PECVD) is disclosed. The SOG layer is pre-processed in a forming gas of hydrogen and nitrogen in a PECVD chamber. Then the oxide film is formed over the SOG layer by means of the PECVD process in the PECVD chamber.
Inventors
- 👤 Jack Liang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 09:18
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/68; H10P14/63; H10P14/6326; H10P14/6342; H10P14/65; H10P14/6516; H10P14/6529; H10P14/69; H10P14/692; H10P14/6921; H10P14/6922; H10P95/00; H10P14/6328; H10P14/6334; H10P14/6336; H10P14/69215
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
70 words
A method for forming a film over a semiconductor substrate, comprising the steps of: forming a spin-on-glass layer over said semiconductor substrate; pre-processing said spin-on-glass layer in a forming gas which includes hydrogen and nitrogen, only so long as is necessary to substantially eliminate impurities on the surface of said spin-on-glass layer; and forming an oxide film over said spin-on-glass layer by means of a plasma-enhanced chemical-vapor deposition (PECVD) process.
Claim 2
Independent Claim
70 words
A method for forming a film over a semiconductor substrate, comprising the steps of: forming a spin-on-glass layer over said semiconductor substrate; pre-processing said spin-on-glass layer in a forming gas which includes hydrogen and nitrogen, only so long as is necessary to substantially eliminate impurities on the surface of said spin-on-glass layer; and forming an oxide film over said spin-on-glass layer by means of a plasma-enhanced chemical-vapor deposition (PECVD) process.
Claim 3
Dependent Claim
40 words
The method as claimed in claim 1, wherein said oxide layer is formed by means of said plasma-enhanced chemical-vapor deposition (PECVD) process in a PECVD chamber and said spin-on-glass layer is pre-processed by the forming gas in said PECVD chamber.
Claim 4
Dependent Claim
21 words
The method as claimed in claim 1, wherein the ratio of hydrogen to nitrogen in said forming gas is about 2-10%.
Claim 5
Dependent Claim
28 words
The method as claimed in claim 1 further comprising the step of forming an oxide layer over said semiconductor substrate before the formation of said spin-on-glass layer process.
Claim 6
Dependent Claim
31 words
The method as claimed in claim 4 further comprising the step of forming a first metal layer over said semiconductor substrate, said first metal layer covered by said spin-on-glass layer process.
Claim 7
Dependent Claim
24 words
The method as claimed in claim 5 further comprising the step of forming a contact window through said oxide layer and said spin-on-glass layer.
Claim 8
Dependent Claim
31 words
The method as claimed in claim 6 further comprising the step of forming a second metal layer over said oxide layer for contacting said first metal layer through said contact window.
Claim 9
Dependent Claim
16 words
The method as claimed in claim 1 further comprising the step of etching said spin-on-glass layer.
Claim 10
Dependent Claim
19 words
The method as claimed in claim 1, wherein said pre-processing step is performed for approximately five to fifteen seconds.
Claim 11
Dependent Claim
15 words
The method as claimed in claim 1, wherein said impurities comprise organic content or moisture.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-08-10 | 2002-02-09 | 2002-08-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-08-10 | 2006-02-09 | 2006-08-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-08-10 | 2010-02-09 | 2010-08-11 | $7700.00 | Window Closed / Lapsed |