← Back to Patent Explorer
US5780930A Expired / Lapsed US ⏱️ 0.0 years remaining

Method for direct attachment of an on-chip bypass capacitor in an integrated circuit

Assignee: Sun Microsystems Inc
•
Filing: 1997-01-31
•
Granted: 1998-07-14
•
Expires: 2017-01-31
📄 Original PDF 🌐 Google Patents 🔄 Sync Now

Abstract

Abstract Switching noise at integrated circuit V DD and V SS metal traces is reduced by minimizing lead inductance in on-chip bypass capacitors. For each on-chip bypass capacitor, a pair of V DD -carrying and V SS -carrying metal traces is formed, these traces having regions spaced-apart laterally a distance ΔX corresponding to lateral separation of the bypass capacitor connecting pads. For each bypass capacitor, column-shaped openings, spaced-apart distance ΔX, are formed through the passivation and inter-metal oxide layers, as needed. These openings expose and access regions of the pair of spaced-apart metal traces carrying V SS and V DD . These openings, which may be formed after the IC has been fabricated, preferably are formed using focussed ion beam technology ("FIB"). Alternatively, these openings may be formed using masking and etching steps. The column-shaped openings are then made into conductive columnar elements, preferably using FIB deposition of tungsten or platinum. Conductive element pads are formed atop the conductive columnar elements at the outer surface of the IC passivation layer. The bypass capacitors are then attached to the IC, and the capacitor connecting pads are electrically connected to the respective conductive element pads using conductive epoxy or other conductive bond material. This direct attachment of the on-chip bypass capacitors reduces effective capacitance lead inductance and improves attenuation of on-chip switching noise.

Inventors

  • 👤 Deviprasad Malladi
  • 👤 Shahid S. Ansari
  • 👤 Eric Bogatin

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-06 02:34
CPC Classifications
H; H10; H10W; H10W44/00; H10W44/601; H10W20/00; H10W20/40; H10W20/41; H10W20/427; H10W72/00; H10W90/00; H10W72/071; H10W72/072; H10W72/07251; H10W72/20; H10W72/50; H10W72/541; H10W72/547; H10W72/5473; H10W90/701; H10W90/751; H10W90/754

Claims Analysis

Total Claims: 23
Claim 1
Independent Claim 231 words
An integrated circuit including a V DD pad and a first conductive trace coupled thereto, and a V SS pad and a second conductive trace coupled thereto, and further including at least one commercially available bypass capacitor, the integrated circuit including: a first columnar electrically conductive element having a first end in electrical contact with at least a portion of said first conductive trace and having a second end extending upward to at least an uppermost surface of said integrated circuit; a second columnar electrically conductive element having a first end in electrical contact with at least a portion of said second conductive trace and having a second end extending upward to at least said uppermost surface of said integrated circuit; said second columnar electrically conductive element being spaced-apart laterally from said first columnar conductive element by a distance ΔX corresponding to a lateral distance between first and second connecting pads on said capacitor; and said capacitor having first and second connecting pads spaced-apart laterally said distance ΔX, and being mounted on said uppermost surface directly over said integrated circuit such that said first and second connecting pads on said capacitor directly overlie and make electrical contact with respective uppermost regions of the first and second columnar electrically conductive elements such that electrical contact to said capacitor is made without laterally extending said uppermost regions of said columnar electrically conductive elements.
Claim 2
Dependent Claim 231 words
An integrated circuit including a V DD pad and a first conductive trace coupled thereto, and a V SS pad and a second conductive trace coupled thereto, and further including at least one commercially available bypass capacitor, the integrated circuit including: a first columnar electrically conductive element having a first end in electrical contact with at least a portion of said first conductive trace and having a second end extending upward to at least an uppermost surface of said integrated circuit; a second columnar electrically conductive element having a first end in electrical contact with at least a portion of said second conductive trace and having a second end extending upward to at least said uppermost surface of said integrated circuit; said second columnar electrically conductive element being spaced-apart laterally from said first columnar conductive element by a distance ΔX corresponding to a lateral distance between first and second connecting pads on said capacitor; and said capacitor having first and second connecting pads spaced-apart laterally said distance ΔX, and being mounted on said uppermost surface directly over said integrated circuit such that said first and second connecting pads on said capacitor directly overlie and make electrical contact with respective uppermost regions of the first and second columnar electrically conductive elements such that electrical contact to said capacitor is made without laterally extending said uppermost regions of said columnar electrically conductive elements.
Claim 3
Dependent Claim 26 words
The integrated circuit of claim 1, wherein said first conductive trace and said second conductive trace are formed on different metallization layers within said integrated circuit.
Claim 4
Dependent Claim 40 words
The integrated circuit of claim 1, wherein at least one of said first and second columnar electrically conductive elements is formed using a focussed ion beam depositing a metal selecting from the group consisting of (i) tungsten, and (ii) platinum.
Claim 5
Dependent Claim 38 words
The integrated circuit of claim 1, wherein at least one of said first and second columnar electrically conductive elements is formed from a material selected from the group consisting of (i) aluminum, (ii) silver, and (iii) doped polysilicon.
Claim 6
Dependent Claim 46 words
The integrated circuit of claim 1, wherein said bypass capacitor has at least one characteristic selected from the group consisting of (i) a capacitance ranging from about 1 nF to 100 nF, and (ii) a transverse dimension ranging from about 1.3 mm to about 2.6 mm.
Claim 7
Dependent Claim 32 words
The integrated circuit of claim 1, wherein at least one of said first columnar electrically conductive element and said second columnar electrically conductive element is formed during fabrication of said integrated circuit.
Claim 8
Dependent Claim 32 words
The integrated circuit of claim 1, wherein at least one of said first columnar electrically conductive element and said second columnar electrically conductive element is formed after fabrication of said integrated circuit.
Claim 9
Dependent Claim 121 words
The integrated circuit if claim 1, wherein formation of at least one of said first columnar electrically conductive element and said second columnar electrically conductive element includes forming a column-shaped opening having an inner surface, and then performing at least one process selected from the group consisting of (i) depositing metal along at least an inner surface of said column-shaped opening, (ii) depositing platinum within said column-shaped opening using a focussed ion beam, (iii) depositing tungsten within said column-shaped opening using a focussed ion beam, (iv) depositing a conductive layer along at least an inner surface of said column-shaped opening using sputtering, (v) filling said column-shaped opening with a metal, and (vi) filling said column-shaped opening with polysilicon that is doped.
Claim 10
Dependent Claim 35 words
The integrated circuit of claim 1, further including a conductive adhesive disposed between at least one of said connecting pads of said capacitor and an underlying uppermost surface of a said columnar electrically conductive element.
Claim 11
Dependent Claim 112 words
The IC of claim 1, wherein formation of at least one of said columnar electrically conductive elements includes forming a column-shaped opening having an inner surface, and then performing at least one process selected from the group consisting of (i) depositing metal along at least an inner surface of said column-shaped opening, (ii) depositing platinum within said column-shaped opening using a focussed ion beam, (iii) depositing tungsten within said column-shaped opening using a focussed ion beam, (iv) depositing a conductive layer along at least an inner surface of said column-shaped opening using sputtering, (v) filling said column-shaped opening with a metal, and (vi) filling said column-shaped opening with polysilicon that is doped.
Claim 12
Dependent Claim 15 words
The integrated circuit of claim 9, wherein said conductive adhesive includes a conductive epoxy material.
Claim 13
Dependent Claim 153 words
An integrated circuit (IC) including a V DD pad and a first conductive trace coupled thereto, and a V SS pad and a second conductive trace coupled thereto, and further including at least one commercially available bypass capacitor having first and second connecting pads spaced-apart laterally a distance ΔX, said IC including: a pair of columnar electrically conductive elements, spacedapart laterally from one another said distance ΔX, said elements respectively making electrical contact with said first trace and with second trace, each of said elements having an end extending upward to at least an uppermost surface of said IC; and said bypass capacitor, mounted on said uppermost surface and directly over said IC such that said first and second connecting pads on said capacitor directly overlie and make electrical contact with respective ends of said elements such that electrical contact to said capacitor is made without laterally extending uppermost regions of said elements.
Claim 14
Dependent Claim 153 words
An integrated circuit (IC) including a V DD pad and a first conductive trace coupled thereto, and a V SS pad and a second conductive trace coupled thereto, and further including at least one commercially available bypass capacitor having first and second connecting pads spaced-apart laterally a distance ΔX, said IC including: a pair of columnar electrically conductive elements, spacedapart laterally from one another said distance ΔX, said elements respectively making electrical contact with said first trace and with second trace, each of said elements having an end extending upward to at least an uppermost surface of said IC; and said bypass capacitor, mounted on said uppermost surface and directly over said IC such that said first and second connecting pads on said capacitor directly overlie and make electrical contact with respective ends of said elements such that electrical contact to said capacitor is made without laterally extending uppermost regions of said elements.
Claim 15
Dependent Claim 22 words
The IC of claim 12, wherein said first trace and said second trace are formed on different metallization layers within said IC.
Claim 16
Dependent Claim 36 words
The IC of claim 12, wherein at least one of said columnar electrically conductive elements is formed using a focussed ion beam depositing a metal selecting from the group consisting of (i) tungsten, and (ii) platinum.
Claim 17
Dependent Claim 34 words
The IC of claim 12, wherein at least one of said columnar electrically conductive elements is formed from a material selected from the group consisting of (i) aluminum, (ii) silver, and (iii) doped polysilicon.
Claim 18
Dependent Claim 344 words
An integrated circuit (IC) including a V DD pad and a first conductive trace coupled thereto, and a V SS pad and a second conductive trace coupled thereto, and further including a first commercially available bypass capacitor having first and second connecting pads spaced-apart laterally a distance ΔX1, and a second commercially available bypass capacitor having first and second connecting pads spaced-apart laterally a distance ΔX2, said IC including: a first pair of columnar electrically conductive elements, spaced-apart laterally from one another by said distance ΔX1, one of said first pair of elements making electrical contact with said first trace and the other of said first pair of elements making electrical contact with said second trace, each of said first pair of elements having an end extending upward to at least an uppermost surface of said IC; a second pair of columnar electrically conductive elements, spaced-apart laterally from one another by said distance ΔX2, one of said first pair of elements making electrical contact with said first trace and the other of said first pair of elements making electrical contact with said second trace, each of said first pair of elements having an end extending upward to at least an uppermost surface of said IC; said first bypass capacitor, mounted on said uppermost surface directly over said IC such that said first and second connecting pads directly overlie and make electrical contact with respective first ends of said first pair of columnar electrically conductive elements such that electrical contact to said first bypass capacitor is made without laterally extending said upper-most regions of said first pair of columnar electrically conductive elements; and said second bypass capacitor, mounted on said uppermost surface directly over said IC such that said first and second connecting pads of said second bypass capacitor directly overlie and make electrical contact with respective first ends of said second pair of columnar electrically conductive elements such that said electrical contact to said second bypass capacitor is made without laterally extending said uppermost regions of said second pair of columnar electrically conductive elements.
Claim 19
Dependent Claim 344 words
An integrated circuit (IC) including a V DD pad and a first conductive trace coupled thereto, and a V SS pad and a second conductive trace coupled thereto, and further including a first commercially available bypass capacitor having first and second connecting pads spaced-apart laterally a distance ΔX1, and a second commercially available bypass capacitor having first and second connecting pads spaced-apart laterally a distance ΔX2, said IC including: a first pair of columnar electrically conductive elements, spaced-apart laterally from one another by said distance ΔX1, one of said first pair of elements making electrical contact with said first trace and the other of said first pair of elements making electrical contact with said second trace, each of said first pair of elements having an end extending upward to at least an uppermost surface of said IC; a second pair of columnar electrically conductive elements, spaced-apart laterally from one another by said distance ΔX2, one of said first pair of elements making electrical contact with said first trace and the other of said first pair of elements making electrical contact with said second trace, each of said first pair of elements having an end extending upward to at least an uppermost surface of said IC; said first bypass capacitor, mounted on said uppermost surface directly over said IC such that said first and second connecting pads directly overlie and make electrical contact with respective first ends of said first pair of columnar electrically conductive elements such that electrical contact to said first bypass capacitor is made without laterally extending said upper-most regions of said first pair of columnar electrically conductive elements; and said second bypass capacitor, mounted on said uppermost surface directly over said IC such that said first and second connecting pads of said second bypass capacitor directly overlie and make electrical contact with respective first ends of said second pair of columnar electrically conductive elements such that said electrical contact to said second bypass capacitor is made without laterally extending said uppermost regions of said second pair of columnar electrically conductive elements.
Claim 20
Dependent Claim 22 words
The IC of claim 16, wherein said first trace and said second trace are formed on different metallization layers within said IC.
Claim 21
Dependent Claim 38 words
The IC of claim 16, wherein at least one of said pairs of columnar electrically conductive elements is formed using a focussed ion beam depositing a metal selecting from the group consisting of (i) tungsten, and (ii) platinum.
Claim 22
Dependent Claim 36 words
The IC of claim 16, wherein at least one of said pairs of columnar electrically conductive elements is formed from a material selected from the group consisting of (i) aluminum, (ii) silver, and (iii) doped polysilicon.
Claim 23
Dependent Claim 114 words
The IC of claim 16, wherein formation of at least one of said pairs of columnar electrically conductive elements includes forming a column-shaped opening having an inner surface, and then performing at least one process selected from the group consisting of (i) depositing metal along at least an inner surface of said column-shaped opening, (ii) depositing platinum within said column-shaped opening using a focussed ion beam, (iii) depositing tungsten within said column-shaped opening using a focussed ion beam, (iv) depositing a conductive layer along at least an inner surface of said column-shaped opening using sputtering, (v) filling said column-shaped opening with a metal, and (vi) filling said column-shaped opening with polysilicon that is doped.

References Cited (Backward Citations)

US4598307A Cited
US5027995A Cited
US5200642A Cited
US5258329A Cited
US5306952A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2001-07-13 2002-01-12 2002-07-14 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2005-07-13 2006-01-12 2006-07-14 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2009-07-13 2010-01-12 2010-07-14 $7700.00 Window Closed / Lapsed

Assigned Categories & Tags

No categories assigned to this patent yet.

Assign Category Tag