US5777209A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Leakage detection apparatus equipped with universal adapter head and method of testing
Assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Filing: 1996-12-13
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Granted: 1998-07-07
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Expires: 2016-12-13
Abstract
Abstract The present invention discloses a leakage detection apparatus for testing the vacuum tightness of a semiconductor processing equipment which is equipped with a universal adapter head for testing various components of the equipment and a method for conducting such tests. Valuable down time can be saved on the semiconductor fabrication equipment by pre-screening all components on the basis of vacuum tightness testing done by a leak detection chamber supplied with such universal adapter head before they are assembled into the fabrication equipment after a maintenance or cleaning procedure is conducted on the components.
Inventors
- 👤 Fu-Kang Tien
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 04:20
CPC Classifications
G; G01; G01M; G01M3/00; G01M3/02; G01M3/04; G01M3/20; G01M3/22; G01M3/226; C; C23; C23C; C23C14/00; C23C14/22; C23C14/48; C23C14/56; C23C14/564
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
169 words
A leakage detection apparatus for testing components of a semiconductor processing equipment for vacuum tightness comprising: a leakage detection chamber generally of a drum shape having two ends connected by a cylindrical sidewall wherein the first end is sealed and the second end is open and is equipped with a flange having a predetermined dimension adapted for receiving any one of a plurality of mounting plates, a plurality of mounting plates each having substantially the same outside dimension and shape as said flange for fitting snugly on top of said flange and-a-cavity of different shapes and dimensions, each of said mounting plates is adapted for mounting a component in said semiconductor processing equipment such that the vacuum tightness of the component used can be tested, and a first and a second port opened in said cylindrical sidewall of said leakage detection chamber, said first port is in fluid communication with a vacuum pump and a helium detector while said second port is in fluid communication with a vacuum gauge.
Claim 2
Dependent Claim
169 words
A leakage detection apparatus for testing components of a semiconductor processing equipment for vacuum tightness comprising: a leakage detection chamber generally of a drum shape having two ends connected by a cylindrical sidewall wherein the first end is sealed and the second end is open and is equipped with a flange having a predetermined dimension adapted for receiving any one of a plurality of mounting plates, a plurality of mounting plates each having substantially the same outside dimension and shape as said flange for fitting snugly on top of said flange and-a-cavity of different shapes and dimensions, each of said mounting plates is adapted for mounting a component in said semiconductor processing equipment such that the vacuum tightness of the component used can be tested, and a first and a second port opened in said cylindrical sidewall of said leakage detection chamber, said first port is in fluid communication with a vacuum pump and a helium detector while said second port is in fluid communication with a vacuum gauge.
Claim 3
Dependent Claim
37 words
An apparatus according to claim 1, further comprising valve means positioned between said vacuum pump and said helium detector such that only the helium detector may optionally be connected in fluid communication with said leakage detection chamber.
Claim 4
Dependent Claim
166 words
A leakage detection apparatus for testing components of a semiconductor processing equipment of an ion implanter for vacuum tightness comprising: a leakage detection chamber generally of a drum shape having two ends connected by a cylindrical sidewall wherein the first end is sealed and the second end is open and is equipped with a flange having a predetermined dimension adapted for receiving a plurality of mounting plates, a plurality of mounting plates each having substantially the same outside dimension for fitting snugly on top of said flange and a cavity of different shapes and dimensions, each of said mounting plates is adapted for mounting a component in said semiconductor processing equipment such that the vacuum tightness of the component can be tested, and a first and a second port opened in said cylindrical sidewall of said leakage detection chamber, said first port is in fluid communication with a vacuum pump and a helium detector while said second port is in fluid communication with a vacuum gauge.
Claim 5
Dependent Claim
166 words
A leakage detection apparatus for testing components of a semiconductor processing equipment of an ion implanter for vacuum tightness comprising: a leakage detection chamber generally of a drum shape having two ends connected by a cylindrical sidewall wherein the first end is sealed and the second end is open and is equipped with a flange having a predetermined dimension adapted for receiving a plurality of mounting plates, a plurality of mounting plates each having substantially the same outside dimension for fitting snugly on top of said flange and a cavity of different shapes and dimensions, each of said mounting plates is adapted for mounting a component in said semiconductor processing equipment such that the vacuum tightness of the component can be tested, and a first and a second port opened in said cylindrical sidewall of said leakage detection chamber, said first port is in fluid communication with a vacuum pump and a helium detector while said second port is in fluid communication with a vacuum gauge.
Claim 6
Dependent Claim
40 words
An apparatus according to claim 3, wherein said component used in an ion implanter is selected from the group consisting of a source can, a source head, an extraction electrode, an acceleration electrode, an electron shower and a Faraday cage.
Claim 7
Dependent Claim
23 words
An apparatus according to claim 1, wherein said flange at the open end of the leakage detection chamber is of a circular shape.
Claim 8
Dependent Claim
24 words
An apparatus according to claim 1, wherein said cavity in said mounting plates is either of a circular shape or of a rectangular shape.
Claim 9
Dependent Claim
22 words
An apparatus according to claim 1, wherein said flange further comprising a flexible gasket for making intimate contact with said mounting plate.
Claim 10
Dependent Claim
27 words
An apparatus according to claim 1, wherein said apparatus is capable of testing components in an ion implanter for vacuum tightness to at least 10 -5 Torr.
Claim 11
Dependent Claim
115 words
A leakage detection system for testing components in an ion implanter for vacuum tightness comprising: a leakage detection chamber equipped with an open top and two ports in a sidewall of the chamber, a flange in said open top of the chamber adapted for receiving a plurality of mounting plates, a plurality of mounting plates each having an outside dimension and shape designed for fitting intimately with said flange and an inside cavity for fitting intimately and establishing a fluid communication with a component of said ion implanter, and a vacuum pump and a helium detector connected in parallel to one port on said chamber, a vacuum gauge-connected to the other port on said chamber.
Claim 12
Dependent Claim
115 words
A leakage detection system for testing components in an ion implanter for vacuum tightness comprising: a leakage detection chamber equipped with an open top and two ports in a sidewall of the chamber, a flange in said open top of the chamber adapted for receiving a plurality of mounting plates, a plurality of mounting plates each having an outside dimension and shape designed for fitting intimately with said flange and an inside cavity for fitting intimately and establishing a fluid communication with a component of said ion implanter, and a vacuum pump and a helium detector connected in parallel to one port on said chamber, a vacuum gauge-connected to the other port on said chamber.
Claim 13
Dependent Claim
141 words
A leakage detection system for testing components in an ion implanter for vacuum tightness comprising: a leakage detection chamber equipped with an open top and two ports in a sidewall of the chamber, a flange in said open top of the chamber adapted for receiving a plurality of mounting plates, a plurality of mounting plates each having an outside dimension for fitting intimately with said flange and an inside cavity for fitting intimately and establishing a fluid communication with a component of said ion implanter, said component is selected from the group consisting of a source can, a source head, an extraction electrode, an acceleration electrode, an electron shower and a Faraday cage, and a vacuum pump and a helium detector connected in parallel to one port on said chamber, a vacuum gauge connected to the other port on said chamber.
Claim 14
Dependent Claim
141 words
A leakage detection system for testing components in an ion implanter for vacuum tightness comprising: a leakage detection chamber equipped with an open top and two ports in a sidewall of the chamber, a flange in said open top of the chamber adapted for receiving a plurality of mounting plates, a plurality of mounting plates each having an outside dimension for fitting intimately with said flange and an inside cavity for fitting intimately and establishing a fluid communication with a component of said ion implanter, said component is selected from the group consisting of a source can, a source head, an extraction electrode, an acceleration electrode, an electron shower and a Faraday cage, and a vacuum pump and a helium detector connected in parallel to one port on said chamber, a vacuum gauge connected to the other port on said chamber.
Claim 15
Dependent Claim
34 words
A system according to claim 9, further comprising valve means positioned between said vacuum pump and said helium detector such that only said helium detector may optionally be connected to said leakage detection chamber.
Claim 16
Dependent Claim
23 words
A system according to claim 9, further comprising a flexible gasket positioned in said flange for providing intimate contact with said mounting plate.
Claim 17
Independent Claim
145 words
A method of testing components in a semiconductor processing machine for vacuum tightness comprising the steps of: providing a leakage detection chamber equipped with an open top and a flange opening adapted for receiving one of a plurality of mounting plates, said chamber further equipped with at least two ports for connection to a vacuum pump, a helium detector and to a vacuum gauge, respectively, positioning a mounting plate selected from said plurality of mounting plates on said flange opening, mounting a component of said semiconductor processing machine to said mounting plate such that fluid communication is established between said component and said detection chamber through a cavity in said mounting plate, evacuating said leakage detection chamber by said vacuum pump, dispersing helium gas at or near the surface on an exterior portion of said mounted component and reading helium concentration on said helium detector.
Claim 18
Independent Claim
145 words
A method of testing components in a semiconductor processing machine for vacuum tightness comprising the steps of: providing a leakage detection chamber equipped with an open top and a flange opening adapted for receiving one of a plurality of mounting plates, said chamber further equipped with at least two ports for connection to a vacuum pump, a helium detector and to a vacuum gauge, respectively, positioning a mounting plate selected from said plurality of mounting plates on said flange opening, mounting a component of said semiconductor processing machine to said mounting plate such that fluid communication is established between said component and said detection chamber through a cavity in said mounting plate, evacuating said leakage detection chamber by said vacuum pump, dispersing helium gas at or near the surface on an exterior portion of said mounted component and reading helium concentration on said helium detector.
Claim 19
Dependent Claim
25 words
A method according to claim 13, wherein said cavity in the mounting plate has a shape and dimension specifically designed to fit one specific component.
Claim 20
Independent Claim
166 words
A method of testing components in a semiconductor processing machine for vacuum tightness comprising the steps of: providing a leakage detection chamber equipped with an open top and a flange opening adapted for receiving one of a plurality of mounting plates, said chamber further equipped with at least two ports for connection to a vacuum pump, a helium detector and to a vacuum gauge, respectively, positioning a mounting plate selected from said plurality of mounting plates on said flange opening, mounting a component of said semiconductor processing machine to said mounting plate such that fluid communication is established between said component and said detection chamber through a cavity in said mounting plate said component is selected from the group consisting of a source can, a source head, an extraction electrode, an acceleration electrode, an electron shower and a Faraday cage, evacuating said leakage detection chamber by said vacuum pump, dispersing helium gas at or near said mounted component and reading helium concentration on said helium detector.
Claim 21
Independent Claim
166 words
A method of testing components in a semiconductor processing machine for vacuum tightness comprising the steps of: providing a leakage detection chamber equipped with an open top and a flange opening adapted for receiving one of a plurality of mounting plates, said chamber further equipped with at least two ports for connection to a vacuum pump, a helium detector and to a vacuum gauge, respectively, positioning a mounting plate selected from said plurality of mounting plates on said flange opening, mounting a component of said semiconductor processing machine to said mounting plate such that fluid communication is established between said component and said detection chamber through a cavity in said mounting plate said component is selected from the group consisting of a source can, a source head, an extraction electrode, an acceleration electrode, an electron shower and a Faraday cage, evacuating said leakage detection chamber by said vacuum pump, dispersing helium gas at or near said mounted component and reading helium concentration on said helium detector.
Claim 22
Dependent Claim
41 words
A method according to claim 13, further comprising the step of closing a valve between said vacuum pump and said detection chamber after the chamber is evacuated such that only the helium detector is in fluid communication with the detection chamber.
Claim 23
Dependent Claim
33 words
A method according to claim 13, further comprising the step of positioning a flexible gasket on said mounting plate such that intimate contact between said component and said detection chamber can be established.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-07-06 | 2002-01-05 | 2002-07-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-07-06 | 2006-01-05 | 2006-07-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-07-06 | 2010-01-05 | 2010-07-07 | $7700.00 | Window Closed / Lapsed |