US5537857A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Leak indicator for vacuum systems and a method of searching for leaks in vacuum systems
Assignee: Balzers und Leybold Deutschland Holding AG
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Filing: 1992-10-14
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Granted: 1996-07-23
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Expires: 2012-10-14
Abstract
Abstract A leak indicator for detecting leaks in a vacuum system including a chamber and a system vacuum pump. The indicator is provided with a mass spectrometer for identifying the presence of a test gas in the system chamber and a high vacuum pump for producing the pressure required for operation of the mass spectrometer during a system leak test. A sealed conduit network is provided to connect the system chamber to the inlet of the mass spectrometer, and to the inlet side and exhaust side of the high vacuum pump. A first switching valve is provided within the sealed conduit in series between the system chamber and the inlets of the mass spectrometer and the high vacuum pump. Lastly, a constriction member is connected within the network conduit in series between the system chamber and the first switching valve to selectively provide a direct connection between the system chamber and the inlet side of the high vacuum pump, or between the system chamber and the exhaust side of the high vacuum pump.
Inventors
- 👤 Werner Grosse Bley
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 09:13
CPC Classifications
G; G01; G01M; G01M3/00; G01M3/02; G01M3/04; G01M3/20; G01M3/202
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
202 words
A leak indicator apparatus for detecting leaks in a vacuum system comprising: a system chamber and a system vacuum pump attached to said system chamber; a mass spectrometer-having an inlet, said mass spectrometer for identifying the presence of a test gas in the system chamber; a high vacuum pump having a inlet side and an exhaust side, said high vacuum pump with said system pump adapted to produce the low vacuum pressure required for operation of said mass spectrometer during a system leak test; a sealed conduit network connecting the system chamber to the inlet of said mass spectrometer, and the system chamber to the inlet side and exhaust side of said high vacuum pump; a first switching valve connected within said sealed conduit network in series between the system chamber and the inlets of said mass spectrometer and said high vacuum pump; and a constriction member connected within said sealed conduit network in series between the system chamber and said first switching valve whereby control of said first switching valve alternatively allows a direct connection between the system chamber and the inlet side of said high vacuum pump, and the system chamber and the exhaust side of said high vacuum pump.
Claim 2
Dependent Claim
202 words
A leak indicator apparatus for detecting leaks in a vacuum system comprising: a system chamber and a system vacuum pump attached to said system chamber; a mass spectrometer-having an inlet, said mass spectrometer for identifying the presence of a test gas in the system chamber; a high vacuum pump having a inlet side and an exhaust side, said high vacuum pump with said system pump adapted to produce the low vacuum pressure required for operation of said mass spectrometer during a system leak test; a sealed conduit network connecting the system chamber to the inlet of said mass spectrometer, and the system chamber to the inlet side and exhaust side of said high vacuum pump; a first switching valve connected within said sealed conduit network in series between the system chamber and the inlets of said mass spectrometer and said high vacuum pump; and a constriction member connected within said sealed conduit network in series between the system chamber and said first switching valve whereby control of said first switching valve alternatively allows a direct connection between the system chamber and the inlet side of said high vacuum pump, and the system chamber and the exhaust side of said high vacuum pump.
Claim 3
Dependent Claim
44 words
The leak indicator apparatus according to claim 1 further including a second switching valve connected within said sealed conduit network between the system chamber and said constriction member, said second switching valve providing a closable fluid connection between the chamber and the conduit network.
Claim 4
Dependent Claim
23 words
The leak indicator apparatus according to claim 1 wherein said constriction member is a control valve adapted to vary the pressure difference thereacross.
Claim 5
Dependent Claim
69 words
The leak indicator apparatus according to claim 1 further including a dual-stage diaphragm pump connected at one side thereof to the exhaust side of said high vacuum pump and at another side thereof into said sealed conduit network between the system chamber and said constriction member, said dual-stage diaphragm pump capable of producing an output pressure of the same order of magnitude as the pressure within the system chamber.
Claim 6
Dependent Claim
47 words
The leak indicator apparatus according to claim 4 further including a third switching valve connected at one side thereof to the exhaust side of said high vacuum pump and at another side thereof into said sealed conduit network between said first switching valve and said constriction member.
Claim 7
Dependent Claim
67 words
The leak indicator apparatus according to claim 1 further including a screw pump connected at one side thereof to the exhaust side of said high vacuum pump and at another side thereof into said sealed conduit network between the system chamber and said constriction member, said screw pump capable of producing an output pressure of the same order of magnitude as the pressure within the system chamber.
Claim 8
Dependent Claim
47 words
The leak indicator apparatus according to claim 6 further including a third switching valve connected at one side thereof to the exhaust side of said high vacuum pump and at another side thereof into said sealed conduit network between said first switching valve and said constriction member.
Claim 9
Dependent Claim
67 words
The leak indicator apparatus according to claim 1 further including a molecular pump connected at one side thereof to the exhaust side of said high vacuum pump and at another side thereof into said sealed conduit network between the system chamber and said constriction member, said molecular pump capable of producing an output pressure of the same order of magnitude as the pressure within the system chamber.
Claim 10
Dependent Claim
47 words
The leak indicator apparatus according to claim 8 further including a third switching valve connected at one side thereof to the exhaust side of said high vacuum pump and at another side thereof into said sealed conduit network between said first switching valve and said constriction member.
Claim 11
Independent Claim
149 words
A method for detecting a leak in a vacuum system including a system chamber and a system vacuum pump, said method comprising the steps of: connecting the system chamber to a leak indicator including a high vacuum pump with inlet side and exhaust side, which high vacuum pump is connected to a mass spectrometer and a control valve as a constriction member in series with a switching valve for fluidly connecting the system chamber directly to either side of the high vacuum pump, where the high vacuum pump with said system pump is adapted to produce the low pressure required for operation of said mass spectrometer during a system leak test; spraying a test gas tracer proximate areas of the vacuum system suspected of having leaks; and throttling gas flow into the mass spectrometer by adjusting the control valve to maintain a substantially constant pressure within the mass spectrometer.
Claim 12
Independent Claim
149 words
A method for detecting a leak in a vacuum system including a system chamber and a system vacuum pump, said method comprising the steps of: connecting the system chamber to a leak indicator including a high vacuum pump with inlet side and exhaust side, which high vacuum pump is connected to a mass spectrometer and a control valve as a constriction member in series with a switching valve for fluidly connecting the system chamber directly to either side of the high vacuum pump, where the high vacuum pump with said system pump is adapted to produce the low pressure required for operation of said mass spectrometer during a system leak test; spraying a test gas tracer proximate areas of the vacuum system suspected of having leaks; and throttling gas flow into the mass spectrometer by adjusting the control valve to maintain a substantially constant pressure within the mass spectrometer.
Claim 13
Dependent Claim
18 words
The method according to claim 10 wherein said spraying step includes use of helium as the test gas.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-07-23 | 2000-01-22 | 2000-07-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-07-23 | 2004-01-22 | 2004-07-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-07-23 | 2008-01-22 | 2008-07-23 | $7700.00 | Window Closed / Lapsed |