Pad stack with a poly SI etch stop for TEOS mask removal with RIE

Claim 2

In device fabrication, a process for forming device structures, the process comprising: providing a substrate of semiconductor material; forming a mask on the substrate, the mask comprising a plurality of layers including a hard mask etch stop layer overlying the substrate, and a hard mask layer overlying the hard mask etch stop layer; patterning the mask to define a selected region on the substrate, the patterning forming edges of the plurality of layers of the mask within the selected region; removing a portion of the substrate in the selected region; and performing an anisotropic process to remove the portions of the hard mask layer that are not located in the selected region, the anisotropic process being selective to the hard mask etch stop layer to effectively prevent the removal of layers underlying the hard mask etch stop layer, at least part of the anisotropic process being performed when the edges of the plurality of layers of the mask are exposed.

Claim 3

A process for fabricating a capacitance storage trench for a random access memory cell, the process comprising: providing a substrate of semiconductor material; forming a mask on the substrate, the mask comprising a plurality of layers including a hard mask etch stop layer overlying the substrate, and a hard mask layer overlying the hard mask etch stop layer; patterning the mask to define a selected region for forming the trench, the patterning forming edges of the plurality of layers of the mask; removing a portion of the substrate in the selected region to form the trench; exposing the edges of the plurality of layers of the mask; performing an anisotropic process to remove remaining portions of the hard mask layer on the surface of the substrate, the anisotropic process being selective to the hard mask etch stop layer to effectively prevent the removal of the hard mask etch stop layer, at least part of the anisotropic process being performed when the edges of the plurality of layers of the mask are exposed; forming a node dielectric in the trench after said anisotropic process is performed; and thereafter filling the trench with a polysilicon material.

Claim 4

A process for fabricating a capacitance storage trench for a random access memory cell, the process comprising: providing a substrate of semiconductor material; forming a mask on the substrate, the mask comprising a plurality of layers including a hard mask etch stop layer overlying the substrate, and a hard mask layer overlying the hard mask etch stop layer; patterning the mask to define a selected region for forming the trench, the patterning forming edges of the plurality of layers of the mask; removing a portion of the substrate in the selected region to form the trench; exposing the edges of the plurality of layers of the mask; performing an anisotropic process to remove remaining portions of the hard mask layer on the surface of the substrate, the anisotropic process being selective to the hard mask etch stop layer to effectively prevent the removal of the hard mask etch stop layer, at least part of the anisotropic process being performed when the edges of the plurality of layers of the mask are exposed; forming a node dielectric in the trench after said anisotropic process is performed; and thereafter filling the trench with a polysilicon material.

Claim 5

The process for forming device structures as recited in claim 1, further comprising: exposing the edges of the plurality of layers of the mask before the performing of the anisotropic process, said exposing being performed using an isotropic etch process.

Claim 6

The process for forming device structures as recited in claim 1, wherein the edges of the plurality of layers of the mask are exposed during the anisotropic process.

Claim 7

The process for forming device structures as recited in claim 1, wherein: the plurality of layers further includes an adhesion promoting layer overlying the substrate and underlying the hard mask layer.

Claim 8

The process for forming device structures as recited in claim 5, wherein: the anisotropic process is configured to reduce undercutting of the adhesion promoting layer.

Claim 9

The process for forming device structures as recited in claim 1, further comprising: forming a polish stop layer overlying the substrate and underlying the hard mask layer.

Claim 10

The process for forming device structures as recited in claim 1, wherein the hard mask etch stop layer is formed of polysilicon; the hard mask layer is formed of tetraethylorthosilicate; and the anisotropic process is a reactive ion etch process.

Claim 11

The process for forming device structures as recited in claim 5, wherein the hard mask layer is approximately in the range of 5000-7000 angstroms thick.

Claim 12

The process for forming device structures as recited in claim 9, wherein the hard mask etch stop layer is approximately 40-60 nanometers thick.

Claim 13

The process for forming device structures as recited in claim 5, wherein: the plurality of layers further includes an adhesion promoting layer and a polish stop layer.

Claim 14

The process for forming device structures as recited in claim 5, further comprising: applying a dielectric film to a sidewall of the trench; overlying a polysilicon layer contiguous with the hard mask etch stop layer; filling the trench with polysilicon to form a polysilicon plug contiguous with the polysilicon layer; removing the polysilicon layer; and removing the hard mask etch stop layer with the same process performed for removing the polysilicon layer.

Claim 15

The process for forming device structures as recited in claim 1 wherein the hard mask layer is formed of boron doped silicate glass.

Claim 16

The process as recited in claim 2, further comprising: overlying a polysilicon layer contiguous with the hard mask etch stop layer and contiguous with the polysilicon material filling the trench; removing the polysilicon layer; and removing the hard mask etch stop layer with the same process performed for removing the polysilicon layer.

Claim 17

The process as recited in claim 14 wherein the hard mask etch stop layer is formed from polysilicon, and the removing of the polysilicon layer and the hard mask etch stop layer includes a chemical-mechanical polishing.

Claim 18

The process as recited in claim 2, wherein the hard mask etch stop layer is formed of polysilicon; the hard mask layer is formed of tetraethylorthosilicate; and the anisotropic process is a reactive ion etch process.

Claim 19

The process as recited in claim 16, wherein the removing a portion of the substrate in the selected region to form the trench results in the formation of a sidewall passivation film on an upper portion of the trench, the process further comprising: removing the sidewall passivation film.

Claim 20

The process as recited in claim 17 wherein removing the sidewall passivation film includes a wet chemical etch process.

Claim 21

The process as recited in claim 17 wherein the removing of the sidewall passivation film is performed during the anisotropic process for removing the hard mask etch layer.

Claim 22

In device fabrication, a process for patterning device structures, the process comprising: providing a substrate of semiconductor material; forming a mask on the substrate, the mask comprising a plurality of layers including a nitride layer overlying the substrate, and a hard mask layer overlying the nitride layer; patterning the mask to define a selected region on the substrate, the patterning forming edges of the plurality of layers of the mask; removing a portion of the substrate in the selected region; exposing the edges of the plurality of layers of the mask within the selected region; and performing an anisotropic process to remove the portions of the hard mask layer that are not located in the selected region, the anisotropic process being selective to the nitride layer to effectively prevent the removal of layers underlying the nitride layer, at least part of the anisotropic process being performed when the edges of the plurality of layers of the mask are exposed.

Claim 23

In device fabrication, a process for patterning device structures, the process comprising: providing a substrate of semiconductor material; forming a mask on the substrate, the mask comprising a plurality of layers including a nitride layer overlying the substrate, and a hard mask layer overlying the nitride layer; patterning the mask to define a selected region on the substrate, the patterning forming edges of the plurality of layers of the mask; removing a portion of the substrate in the selected region; exposing the edges of the plurality of layers of the mask within the selected region; and performing an anisotropic process to remove the portions of the hard mask layer that are not located in the selected region, the anisotropic process being selective to the nitride layer to effectively prevent the removal of layers underlying the nitride layer, at least part of the anisotropic process being performed when the edges of the plurality of layers of the mask are exposed.

Claim 24

A process for patterning device structures, the process comprising: providing a substrate; forming a mask on the substrate comprising a plurality of layers including: an adhesion promoting layer overlying the substrate; a polish stop layer overlying the adhesion promoting layer; a hard mask etch stop layer overlying the polish stop layer; a hard mask layer overlying the hard mask etch stop layer; patterning the mask to define a selected region on the substrate, the patterning forming edges of the plurality of layers of the mask in the selected region; removing a portion of the substrate in the selected region; exposing the edges of the plurality of layers of the mask; and performing an anisotropic process to remove the portions of the hard mask layer that are not located in the selected region, the anisotropic process being selective to the hard mask etch stop layer to effectively prevent the removal of layers underlying the hard mask etch stop layer, at least part of the anisotropic process being performed when the edges of the plurality of layers of the mask are exposed.

Claim 25

A process for patterning device structures, the process comprising: providing a substrate; forming a mask on the substrate comprising a plurality of layers including: an adhesion promoting layer overlying the substrate; a polish stop layer overlying the adhesion promoting layer; a hard mask etch stop layer overlying the polish stop layer; a hard mask layer overlying the hard mask etch stop layer; patterning the mask to define a selected region on the substrate, the patterning forming edges of the plurality of layers of the mask in the selected region; removing a portion of the substrate in the selected region; exposing the edges of the plurality of layers of the mask; and performing an anisotropic process to remove the portions of the hard mask layer that are not located in the selected region, the anisotropic process being selective to the hard mask etch stop layer to effectively prevent the removal of layers underlying the hard mask etch stop layer, at least part of the anisotropic process being performed when the edges of the plurality of layers of the mask are exposed.

Claim 26

The process as recited in claim 21, wherein the polish stop layer is comprised of a nitride layer and approximately in the range of 200-240 nanometers thick.

Claim 27

The process as recited in claim 22, wherein: the polish stop layer is approximately 70-120 nanometers thick; and the adhesion promoting layer is approximately 80 angstroms thick.

Claim 28

A process for patterning device structures, the process comprising: providing a substrate of semiconductor material; forming a mask on the substrate, the mask comprising a plurality of layers including a hard mask etch stop layer overlying the substrate, and a hard mask layer overlying the hard mask etch stop layer; patterning the mask to define a selected region on the substrate, the patterning forming edges of the plurality of layers of the mask; removing a portion of the substrate in the selected region; and prior to filling the trench with a polysilicon material, performing an anisotropic process to remove the portions of the hard mask layer that are not located in the selected region, the anisotropic process being selective to the nitride layer to effectively prevent the removal of layers underlying the nitride layer.

Claim 29

A process for patterning device structures, the process comprising: providing a substrate of semiconductor material; forming a mask on the substrate, the mask comprising a plurality of layers including a hard mask etch stop layer overlying the substrate, and a hard mask layer overlying the hard mask etch stop layer; patterning the mask to define a selected region on the substrate, the patterning forming edges of the plurality of layers of the mask; removing a portion of the substrate in the selected region; and prior to filling the trench with a polysilicon material, performing an anisotropic process to remove the portions of the hard mask layer that are not located in the selected region, the anisotropic process being selective to the nitride layer to effectively prevent the removal of layers underlying the nitride layer.

Claim 30

The process as recited in claim 24, wherein: the plurality of layers includes an adhesion promoting layer overlying the substrate and underlying the hard mask layer; and the anisotropic process configured to reduce undercutting of the adhesion promoting layer.

Claim 31

The process as recited in claim 25, wherein the adhesion promoting layer is formed of oxide material.

Claim 32

A process for patterning device structures, the process comprising: providing a substrate of semiconductor material; forming a mask on the substrate, the mask comprising a plurality of layers including an adhesion promoting layer overlying the substrate, a polish stop layer overlying the adhesion promoting layer, a hard mask etch stop layer overlying the polish stop layer, and a hard mask layer overlying the hard mask etch stop layer; patterning the mask to define a selected region on the substrate, the patterning forming edges of the plurality of layers of the mask within the selected region; removing a portion of the substrate in the selected region, wherein the removing results in the formation of a sidewall passivation film on an upper portion of the trench; performing a wet etch process to remove the sidewall passivation film, during which the adhesion promoting layer is undercut such that the edge of the polish stop layer extends into the trench further than the edge of the adhesion promoting layer; and performing an anisotropic process to remove the portions of the hard mask layer that are not located in the selected region, the anisotropic process being selective to the hard mask etch stop layer to effectively prevent the removal of layers underlying the hard mask etch stop layer.

Claim 33

A process for patterning device structures, the process comprising: providing a substrate of semiconductor material; forming a mask on the substrate, the mask comprising a plurality of layers including an adhesion promoting layer overlying the substrate, a polish stop layer overlying the adhesion promoting layer, a hard mask etch stop layer overlying the polish stop layer, and a hard mask layer overlying the hard mask etch stop layer; patterning the mask to define a selected region on the substrate, the patterning forming edges of the plurality of layers of the mask within the selected region; removing a portion of the substrate in the selected region, wherein the removing results in the formation of a sidewall passivation film on an upper portion of the trench; performing a wet etch process to remove the sidewall passivation film, during which the adhesion promoting layer is undercut such that the edge of the polish stop layer extends into the trench further than the edge of the adhesion promoting layer; and performing an anisotropic process to remove the portions of the hard mask layer that are not located in the selected region, the anisotropic process being selective to the hard mask etch stop layer to effectively prevent the removal of layers underlying the hard mask etch stop layer.

Claim 34

The process as recited in claim 27, wherein: the adhesion promoting layer is formed of oxide material; the polish stop layer is formed of nitride material; the hard mask etch stop layer is formed of polysilicon material; and the hard mask layer is formed of oxide material.

Claim 35

The process as recited in claim 27, further comprising: applying a dielectric film to a sidewall of the trench; overlying a polysilicon layer over the hard mask etch stop layer; filling the trench with polysilicon to form a polysilicon plug contiguous with the polysilicon layer; removing the polysilicon layer; and removing the hard mask etch stop layer with the same type of process performed for removing the polysilicon layer, whereby a portion of the polysilicon plug is removed such that the polysilicon plug is planarized with the polish stop layer.

Claim 36

The process as recited in claim 27 wherein at least part of the anisotropic process is performed while the edges of the plurality of layers of the mask are exposed.