US5773198A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of forming high resolution circuitry by depositing a polyvinyl alcohol layer beneath a photosensitive polymer layer
Assignee: Motorola Solutions Inc
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Filing: 1996-06-07
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Granted: 1998-06-30
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Expires: 2016-06-07
Abstract
Abstract A method of forming a high resolution metal pattern on a substrate. A temporary polyvinyl alcohol (10) layer underneath the photoresist layer (20) aids in removing the photoresist layer after plating. The photoresist is photodelineated in conventional manner to form a pattern (40). During photodelineation, the developing process for the resist does not completely remove the PVA (45) that lies directly under the removed resist, but instead reveals those portions of the polyvinyl alcohol layer. The substrate is then rinsed in a hot aqueous solution to effect removal of the revealed PVA portions, now exposing portions (40) of the substrate (15). Metal (50) is then electroplated to build up a metal circuitry pattern. The remaining portions of the photoresist and the PVA are then removed by a hot aqueous solution.
Inventors
- 👤 Thomas J. Swirbel
- 👤 Anthony B. Suppelsa
- 👤 Joaquin Barreto
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 21:49
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/10; H05K3/108; G; G03; G03F; G03F7/00; G03F7/004; G03F7/09; G03F7/092; H05K2203/00; H05K2203/05; H05K2203/0562; H05K2203/0577; H05K2203/07; H05K2203/0779; H05K2203/0786; H05K2203/0789; Y; Y10; Y10S; Y10S438/00; Y10S438/942; Y10S438/948; Y10S438/95; Y10S438/951
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
114 words
A method of forming high resolution circuitry, comprising: depositing a thin polyvinyl alcohol layer on a substrate; depositing a photosensitive polymer layer on top of the thin polyvinyl alcohol layer; photodelineating a pattern in the deposited photosensitive polymer layer to reveal portions of the thin polyvinyl alcohol layer; rinsing the revealed portions in a first hot aqueous solution to effect removal of the revealed portions, thereby exposing portions of the substrate; electroplating metal into the photodelineated pattern and onto the exposed portions of the substrate to create a circuitry pattern; and removing the remaining portions of the photosensitive polymer layer and the thin polyvinyl alcohol layer by means of a second hot aqueous solution.
Claim 2
Independent Claim
114 words
A method of forming high resolution circuitry, comprising: depositing a thin polyvinyl alcohol layer on a substrate; depositing a photosensitive polymer layer on top of the thin polyvinyl alcohol layer; photodelineating a pattern in the deposited photosensitive polymer layer to reveal portions of the thin polyvinyl alcohol layer; rinsing the revealed portions in a first hot aqueous solution to effect removal of the revealed portions, thereby exposing portions of the substrate; electroplating metal into the photodelineated pattern and onto the exposed portions of the substrate to create a circuitry pattern; and removing the remaining portions of the photosensitive polymer layer and the thin polyvinyl alcohol layer by means of a second hot aqueous solution.
Claim 3
Dependent Claim
17 words
The method of claim 1, wherein the first hot aqueous solution comprises water or preplate microetch cleaners.
Claim 4
Dependent Claim
15 words
The method of claim 1, wherein the second hot aqueous solution comprises an alkaline solution.
Claim 5
Dependent Claim
17 words
The method of claim 1, wherein the substrate has a metal seed layer overlying the substrate surface.
Claim 6
Dependent Claim
29 words
The method of claim 1, wherein the step of depositing a thin layer of polyvinyl alcohol further comprises drying the thin polyvinyl alcohol layer at 50°-100° C. after depositing.
Claim 7
Dependent Claim
24 words
The method of claim 1, further comprising a step, between the step of rinsing and the step of electroplating, of baking at 100°-140° C.
Claim 8
Dependent Claim
32 words
The method of claim 1, wherein the step of photodelineating a pattern comprises exposing portions of the photosensitive polymer layer to actinic light and developing photosensitive polymer layer in an alkaline solution.
Claim 9
Dependent Claim
26 words
The method of claim 1, wherein a portion of the pattern comprises a cross sectional structure having a height equal to or greater than a width.
Claim 10
Dependent Claim
25 words
The method of claim 1, wherein spacing between adjacent traces in the circuitry pattern is equal to or less than the width of the traces.
Claim 11
Independent Claim
170 words
A method of forming high resolution metal circuitry on a substrate, comprising: providing a substrate having a metal seed layer overlying a major surface; depositing a thin polyvinyl alcohol layer on a substrate; drying the thin polyvinyl alcohol layer at 50°-100° C.; depositing a photosensitive polymer layer on top of the thin polyvinyl alcohol layer; exposing portions of the photosensitive polymer layer to actinic light and then developing the photosensitive polymer layer in an alkaline solution in order to photodelineate a pattern in the photosensitive polymer layer, so as to reveal portions of the underlying thin polyvinyl alcohol layer; rinsing the revealed portions in a heated water or preplate microetch solution to effect removal of the revealed portions, thereby exposing portions of the substrate; baking at 100°-140° C.; electroplating metal into the photodelineated pattern and onto the exposed portions of the substrate to create a circuitry pattern; and removing the remaining portions of the photosensitive polymer layer and the thin polyvinyl alcohol layer by immersing in a heated alkaline solution.
Claim 12
Independent Claim
170 words
A method of forming high resolution metal circuitry on a substrate, comprising: providing a substrate having a metal seed layer overlying a major surface; depositing a thin polyvinyl alcohol layer on a substrate; drying the thin polyvinyl alcohol layer at 50°-100° C.; depositing a photosensitive polymer layer on top of the thin polyvinyl alcohol layer; exposing portions of the photosensitive polymer layer to actinic light and then developing the photosensitive polymer layer in an alkaline solution in order to photodelineate a pattern in the photosensitive polymer layer, so as to reveal portions of the underlying thin polyvinyl alcohol layer; rinsing the revealed portions in a heated water or preplate microetch solution to effect removal of the revealed portions, thereby exposing portions of the substrate; baking at 100°-140° C.; electroplating metal into the photodelineated pattern and onto the exposed portions of the substrate to create a circuitry pattern; and removing the remaining portions of the photosensitive polymer layer and the thin polyvinyl alcohol layer by immersing in a heated alkaline solution.
Claim 13
Dependent Claim
26 words
The method of claim 10, wherein a portion of the pattern comprises a cross sectional structure having a height equal to or greater than a width.
Claim 14
Dependent Claim
25 words
The method of claim 10, wherein spacing between adjacent traces in the circuitry pattern is equal to or less than the width of the traces.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-06-29 | 2001-12-29 | 2002-06-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-06-29 | 2005-12-29 | 2006-06-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-06-29 | 2009-12-29 | 2010-06-30 | $7700.00 | Window Closed / Lapsed |