Patent US709115A successfully refreshed from Google Patents.
Patent US5772842A successfully refreshed from Google Patents.
US5772842A
Expired / Lapsed
US
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Apparatus for stripping pellicle
Assignee: Renesas Semiconductor Engineering Corp
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Filing: 1995-11-22
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Granted: 1998-06-30
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Expires: 2015-11-22
Abstract
Abstract A pellicle stripping apparatus includes a supporting section for supporting a photomask, the supporting section having gripping portions for gripping at least two edges of a pellicle frame of a pellicle adhered to the photomask; and a steam generating section for generating high temperature steam and contacting the pellicle adhered to the photomask with the steam, the steam generating section including a container having a steam vent directly opposite a portion of the pellicle adhered to the photomask and a heater for boiling water in the container.
Inventors
- 👤 Shinichiro Tanaka
- 👤 Sigeru Wada
- 👤 Haruhiko Kusunose
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 19:44
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/62; G03F1/64; H; H10; H10P; H10P76/00; B; B29; B29C; B29C63/00; B29C63/0004; B29C63/0013; Y; Y10; Y10T; Y10T156/00; Y10T156/11; Y10T156/1111; Y10T156/1168; Y10T156/1189; Y10T29/00; Y10T29/49; Y10T29/49718; Y10T29/49721; Y10T29/49815; Y10T29/49817; Y10T29/49821
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
87 words
A pellicle stripping apparatus comprising: a supporting section for supporting a photomask, said supporting section having gripping portions for gripping at least two edges of a pellicle frame of a pellicle adhered to the photomask; and a steam generating section for generating high temperature steam and contacting the pellicle adhered to the photomask with the steam, said steam generating section including a container having a steam vent directly opposite a portion of the pellicle adhered to the photomask and a heater for boiling water in said container.
Claim 2
Dependent Claim
87 words
A pellicle stripping apparatus comprising: a supporting section for supporting a photomask, said supporting section having gripping portions for gripping at least two edges of a pellicle frame of a pellicle adhered to the photomask; and a steam generating section for generating high temperature steam and contacting the pellicle adhered to the photomask with the steam, said steam generating section including a container having a steam vent directly opposite a portion of the pellicle adhered to the photomask and a heater for boiling water in said container.
Claim 3
Dependent Claim
60 words
The pellicle stripping apparatus in accordance with claim 1, wherein said gripping portions include a fixed claw fixed to said supporting section, a movable claw attached to said supporting section opposite said fixed claw and moving reciprocally, and a structure forcing said movable claw in a direction to grip the pellicle frame between said fixed claw and said movable claw.
Claim 4
Dependent Claim
19 words
The pellicle stripping apparatus in accordance with claim 2, wherein said structure forcing said movable claw comprises a spring.
Claim 5
Dependent Claim
16 words
The pellicle stripping apparatus in accordance with claim 3, wherein said spring is a leaf spring.
Claim 6
Dependent Claim
32 words
The pellicle stripping apparatus in accordance with claim 1, wherein said container includes a container body housing said heater, and a cover disposable on said container body and having said steam vent.
References Cited (Backward Citations)
US3873080A
Cited
US3990907A
Cited
US4317986A
Cited
US4255216A
Cited
JPS60210687A
Cited
US4904329A
Cited
US4898058A
Cited
JPH06175356A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-06-29 | 2001-12-29 | 2002-06-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-06-29 | 2005-12-29 | 2006-06-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-06-29 | 2009-12-29 | 2010-06-30 | $7700.00 | Window Closed / Lapsed |