US5772842A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for stripping pellicle
Assignee: Renesas Semiconductor Engineering Corp
•
Filing: 1995-11-22
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Granted: 1998-06-30
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Expires: 2015-11-22
Abstract
Abstract A pellicle stripping apparatus includes a supporting section for supporting a photomask, the supporting section having gripping portions for gripping at least two edges of a pellicle frame of a pellicle adhered to the photomask; and a steam generating section for generating high temperature steam and contacting the pellicle adhered to the photomask with the steam, the steam generating section including a container having a steam vent directly opposite a portion of the pellicle adhered to the photomask and a heater for boiling water in the container.
Inventors
- 👤 Shinichiro Tanaka
- 👤 Sigeru Wada
- 👤 Haruhiko Kusunose
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 17:06
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/62; G03F1/64; H; H10; H10P; H10P76/00; B; B29; B29C; B29C63/00; B29C63/0004; B29C63/0013; Y; Y10; Y10T; Y10T156/00; Y10T156/11; Y10T156/1111; Y10T156/1168; Y10T156/1189; Y10T29/00; Y10T29/49; Y10T29/49718; Y10T29/49721; Y10T29/49815; Y10T29/49817; Y10T29/49821
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
87 words
A pellicle stripping apparatus comprising: a supporting section for supporting a photomask, said supporting section having gripping portions for gripping at least two edges of a pellicle frame of a pellicle adhered to the photomask; and a steam generating section for generating high temperature steam and contacting the pellicle adhered to the photomask with the steam, said steam generating section including a container having a steam vent directly opposite a portion of the pellicle adhered to the photomask and a heater for boiling water in said container.
Claim 2
Dependent Claim
87 words
A pellicle stripping apparatus comprising: a supporting section for supporting a photomask, said supporting section having gripping portions for gripping at least two edges of a pellicle frame of a pellicle adhered to the photomask; and a steam generating section for generating high temperature steam and contacting the pellicle adhered to the photomask with the steam, said steam generating section including a container having a steam vent directly opposite a portion of the pellicle adhered to the photomask and a heater for boiling water in said container.
Claim 3
Dependent Claim
60 words
The pellicle stripping apparatus in accordance with claim 1, wherein said gripping portions include a fixed claw fixed to said supporting section, a movable claw attached to said supporting section opposite said fixed claw and moving reciprocally, and a structure forcing said movable claw in a direction to grip the pellicle frame between said fixed claw and said movable claw.
Claim 4
Dependent Claim
19 words
The pellicle stripping apparatus in accordance with claim 2, wherein said structure forcing said movable claw comprises a spring.
Claim 5
Dependent Claim
16 words
The pellicle stripping apparatus in accordance with claim 3, wherein said spring is a leaf spring.
Claim 6
Dependent Claim
32 words
The pellicle stripping apparatus in accordance with claim 1, wherein said container includes a container body housing said heater, and a cover disposable on said container body and having said steam vent.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-06-29 | 2001-12-29 | 2002-06-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-06-29 | 2005-12-29 | 2006-06-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-06-29 | 2009-12-29 | 2010-06-30 | $7700.00 | Window Closed / Lapsed |