Patent US5764342A successfully refreshed from Google Patents.
US5764342A
Expired / Lapsed
US
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Method and system for controlling the relative size of images formed in light-sensitive media
Assignee: International Business Machines Corp
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Filing: 1996-11-20
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Granted: 1998-06-09
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Expires: 2016-11-20
Abstract
Abstract A method of exposing a radiation-sensitive medium through a mask and using an imaging system having a given depth of focus to control for pattern dependent distortion. The steps comprise: providing the radiation-sensitive medium within the depth of focus of the imaging system; providing radiation to the radiation-sensitive medium through the mask; providing the radiation-sensitive medium fully outside the depth of focus of the imaging system; and providing radiation to the radiation-sensitive medium through the mask. Corrections are automatically made by providing the radiation-sensitive medium fully outside the depth of focus of the imaging system, since in that regime the mask operates as a grey-scale mask, with the amount of light passing through any region of the mask dependent on the transmission of the masking pattern in that region.
Inventors
- 👤 Paul Evans Bakeman, Jr.
- 👤 Albert Stephan Bergendahl
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 06:03
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/7055; G03F7/70558; G03F7/20; G03F7/2002; G03F7/70216; G03F7/70308; G03F7/70325; G03F7/70333; G03F7/70425; G03F7/70466; Y; Y10; Y10S; Y10S428/00; Y10S428/922; Y10S428/9265; Y10S428/929; Y10T; Y10T428/00; Y10T428/24; Y10T428/24628; Y10T428/24669; Y10T428/24802; Y10T428/249921; Y10T428/31504
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
87 words
An imaging system, comprising a radiation projector for projecting radiation through a mask having a masking pattern to a radiation sensitive medium, the imaging system having a depth of focus; and an optical element to simultaneously project a first and a second portion of the radiation onto the radiation sensitive medium, said first portion intersecting the radiation sensitive medium within the depth of focus of the imaging system and said second portion intersecting the radiation sensitive medium fully outside the depth of focus of the imaging system.
Claim 2
Dependent Claim
87 words
An imaging system, comprising a radiation projector for projecting radiation through a mask having a masking pattern to a radiation sensitive medium, the imaging system having a depth of focus; and an optical element to simultaneously project a first and a second portion of the radiation onto the radiation sensitive medium, said first portion intersecting the radiation sensitive medium within the depth of focus of the imaging system and said second portion intersecting the radiation sensitive medium fully outside the depth of focus of the imaging system.
Claim 3
Dependent Claim
21 words
An imaging system as recited in claim 1, wherein said second portion has a magnitude, said magnitude being masking pattern dependent.
Claim 4
Dependent Claim
22 words
An imaging system as recited in claim 1, wherein said optical element is positioned to intersect a fraction of the projected radiation.
Claim 5
Dependent Claim
24 words
An imaging system as recited in claim 3, wherein said wherein said second portion has a magnitude, said magnitude being dependent on said fraction.
Claim 6
Dependent Claim
22 words
An imaging system as recited in claim 1, wherein said optical element is one of a lens, a mirror, and a plate.
Claim 7
Dependent Claim
27 words
An imaging system as recited in claim 1, wherein said imaging system comprises an optical axis and said optical element is adjustably positioned around said optical axis.
Claim 8
Dependent Claim
24 words
An imaging system as recited in claim 1, wherein a plurality of said optical elements are symetrically and adjustably positioned around said optical axis.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-06-08 | 2001-12-08 | 2002-06-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-06-08 | 2005-12-08 | 2006-06-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-06-08 | 2009-12-08 | 2010-06-09 | $7700.00 | Window Closed / Lapsed |