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US5757469A
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Scanning lithography system haing double pass Wynne-Dyson optics
Assignee: Nikon Corp
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Filing: 1995-03-22
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Granted: 1998-05-26
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Expires: 2015-03-22
Abstract
Abstract A small field scanning photolithography system has a double pass Wynne-Dyson optical system which provides an erect, non-reverted, unmagnified image. An optical path through the system passes from an object, reflects off an input reflector, passes through a first quadrant of a lens, reflects off a concave mirror, passes through a second quadrant of the lens into folding optics where an intermediate image forms, passes from the folding optics through a third quadrant of the lens, reflects off the concave mirror a second time, passes through a fourth quadrant of the lens, and finally reflects off an output reflector to a plane where a final image forms. Typically, the input and output reflectors and the folding optics are prisms. A field stop may be provided in the folding optics where the intermediate image forms. Magnification adjusting optics can be added to the input and output prisms or to the folding optics. The magnification adjusting optics forms two narrow meniscus air gaps which are equal size for unity magnification. Narrowing one air gap and widening the other air gap changes magnification slightly.
Inventors
- 👤 Paul C. Allen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 21:52
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/20; G02; G02B; G02B17/00; G02B17/08; G02B17/0892; G02B17/008; G03F7/70; G03F7/70216; G03F7/70225; G03F7/70275; G03F7/70358
Claims Analysis
Total Claims: 34
Claim 1
Independent Claim
34 words
An optical system comprising: a Wynne-Dyson lens; and means for directing light which passes once through the Wynne-Dyson lens, through the Wynne-Dyson lens a second time to thereby produce an erect and non-reverted image.
Claim 2
Dependent Claim
34 words
An optical system comprising: a Wynne-Dyson lens; and means for directing light which passes once through the Wynne-Dyson lens, through the Wynne-Dyson lens a second time to thereby produce an erect and non-reverted image.
Claim 3
Dependent Claim
49 words
The optical system of claim 1, wherein the means for directing light comprises a folding prism positioned adjacent the Wynne-Dyson lens so that light emerging from a first portion of the Wynne-Dyson lens enters the folding prism and is reflected back into a second portion of the Wynne-Dyson lens.
Claim 4
Dependent Claim
60 words
A lithography method comprising: forming, with a Wynne-Dyson lens, a first image of an illuminated portion of a reticle, wherein the first image is reverted; and directing light which forms the first image through the Wynne-Dyson lens a second time to form on a blank, a second image of the portion of the reticle, wherein the second image is non-reverted.
Claim 5
Dependent Claim
60 words
A lithography method comprising: forming, with a Wynne-Dyson lens, a first image of an illuminated portion of a reticle, wherein the first image is reverted; and directing light which forms the first image through the Wynne-Dyson lens a second time to form on a blank, a second image of the portion of the reticle, wherein the second image is non-reverted.
Claim 6
Dependent Claim
74 words
The method of claim 3, wherein forming the first image with the Wynne-Dyson lens comprises positioning a first reflector, a lens element, and a concave mirror so that light from the illuminated portion of the reticle reflects from the first reflector, through a first portion of the lens element, to the concave mirror, and then reflects from the concave mirror, back through a second portion of the lens element, before forming the first image.
Claim 7
Dependent Claim
54 words
The method of claim 4, wherein directing light through the Wynne-Dyson lens the second time comprises positioning a folding prism so that light from the second portion of the lens element enters the folding prism, forms the first image, and is directed by the folding prism through a third portion of the lens element.
Claim 8
Dependent Claim
26 words
The method of claim 3, further comprising moving the Wynne-Dyson optical system relative to the reticle and the blank to expose a stripe on the blank.
Claim 9
Dependent Claim
155 words
A lithography system comprising: a reticle holder; an illuminator mounted to direct light through a portion of a reticle in the reticle holder; a stage for holding a blank; a lens having first, second, third, and fourth quadrants which are bounded by planes that intersect at an optical axis of the lens; a first reflector positioned to reflect light from the reticle through the first quadrant of the lens; a concave mirror positioned to reflect light from the first quadrant of the lens back through the second quadrant of the lens; a second reflector which reflects light from the second quadrant of the lens through the third quadrant of the lens, wherein the concave mirror reflects light from the third quadrant of the lens back through the fourth quadrant of the lens; and a third reflector which reflects light from the fourth quadrant of the lens onto a portion of a blank on the stage.
Claim 10
Dependent Claim
155 words
A lithography system comprising: a reticle holder; an illuminator mounted to direct light through a portion of a reticle in the reticle holder; a stage for holding a blank; a lens having first, second, third, and fourth quadrants which are bounded by planes that intersect at an optical axis of the lens; a first reflector positioned to reflect light from the reticle through the first quadrant of the lens; a concave mirror positioned to reflect light from the first quadrant of the lens back through the second quadrant of the lens; a second reflector which reflects light from the second quadrant of the lens through the third quadrant of the lens, wherein the concave mirror reflects light from the third quadrant of the lens back through the fourth quadrant of the lens; and a third reflector which reflects light from the fourth quadrant of the lens onto a portion of a blank on the stage.
Claim 11
Dependent Claim
69 words
The lithography system of claim 7, wherein the second reflector comprises a folding prism having a first, a second, and a third faces, wherein the first face transmits light from the second quadrant of the lens, the second face reflects light from the second quadrant of the lens to the third face, and the third face reflects light from the second face through the fourth quadrant of the lens.
Claim 12
Dependent Claim
122 words
An optical system comprising: a lens having first, second, third, and fourth quadrants bounded by planes which intersect at an optical axis of the lens; a first reflector positioned to reflect light through the first quadrant of the lens; a concave mirror positioned to reflect light from the first quadrant of the lens back through the second quadrant of the lens; a second reflector positioned to reflect light from the second quadrant of the lens through the third quadrant of the lens, wherein the concave mirror reflects light from the third quadrant of the lens back through the fourth quadrant of the lens; and a third reflector positioned to reflect light from the fourth quadrant of the lens into an image plane.
Claim 13
Dependent Claim
122 words
An optical system comprising: a lens having first, second, third, and fourth quadrants bounded by planes which intersect at an optical axis of the lens; a first reflector positioned to reflect light through the first quadrant of the lens; a concave mirror positioned to reflect light from the first quadrant of the lens back through the second quadrant of the lens; a second reflector positioned to reflect light from the second quadrant of the lens through the third quadrant of the lens, wherein the concave mirror reflects light from the third quadrant of the lens back through the fourth quadrant of the lens; and a third reflector positioned to reflect light from the fourth quadrant of the lens into an image plane.
Claim 14
Dependent Claim
22 words
The optical system of claim 9, wherein the first reflector comprises an input prism, and the third reflector comprises an output prism.
Claim 15
Dependent Claim
14 words
The optical system of claim 10, wherein the second reflector comprises a folding prism.
Claim 16
Dependent Claim
70 words
The optical system of claim 11, wherein the folding prism has a first, a second, and a third faces, wherein the first face admits light from the second quadrant of the lens, the second face reflects light from the first face of the lens to the third face, and the third face reflects light from the second face to the first face and through the fourth quadrant of the lens.
Claim 17
Dependent Claim
23 words
The optical system of claim 11, wherein the folding prism defines a cavity, and further comprising a field stop located in the cavity.
Claim 18
Dependent Claim
17 words
The optical system of claim 9, further comprising means for correcting a magnification of the optical system.
Claim 19
Dependent Claim
22 words
The optical system of claim 14, wherein the first reflector comprises an input prism, and the third reflector comprises an output prism.
Claim 20
Dependent Claim
26 words
The optical system of claim 15, wherein the means for correcting the magnification comprises magnification adjusting optics associated with each of the input and output prisms.
Claim 21
Dependent Claim
31 words
The optical system of claim 16, wherein the magnification adjusting optics includes at least two low power lens elements located adjacent exterior surfaces of each of the input and output prisms.
Claim 22
Dependent Claim
43 words
The optical system of claim 17, wherein the at least two lens elements located adjacent the exterior surface of the input prism are respectively a plano-convex lens element and a plano-concave lens element, the concave and convex surfaces being adjacent one to another.
Claim 23
Dependent Claim
27 words
The optical system of claim 18, the concave and convex surfaces being of approximately equal radius, and further comprising a gap between the concave and convex surfaces.
Claim 24
Dependent Claim
41 words
The optical system of claim 19, further comprising a magnification adjustment mechanism connected to at least one of the two lens elements, thereby moving one of the two lens elements relative to the other and changing a size of the gap.
Claim 25
Dependent Claim
15 words
The optical system of claim 19, the gap between about 0.1 mm and 5 mm.
Claim 26
Dependent Claim
54 words
The optical system of claim 17, wherein the lens elements are each quarter circular sections and at least one lens element is bonded to the exterior surfaces of respectively the input and output prisms, an optical axis of each of the quarter circular sections being coincident with an optical axis of the optical system.
Claim 27
Dependent Claim
27 words
The optical system of claim 17, wherein the lens elements each have an optical axis offset from an optical axis of other portions of the optical system.
Claim 28
Dependent Claim
26 words
The optical system of claim 16, wherein the second reflector comprises: a folding prism which defines a cavity; and a field stop located in the cavity.
Claim 29
Dependent Claim
14 words
The optical system of claim 9, wherein the second reflector comprises a folding prism.
Claim 30
Dependent Claim
23 words
The optical system of claim 25, wherein the folding prism defines a cavity and further including magnification adjusting optics located in the cavity.
Claim 31
Dependent Claim
27 words
The optical system of claim 26, wherein the magnification adjusting optics includes three lens elements which are respectively a double concave element located between two plano-convex elements.
Claim 32
Dependent Claim
21 words
The optical system of claim 26, wherein the magnification adjusting optics includes a double convex element located between two plano-concave elements.
Claim 33
Dependent Claim
42 words
The optical system of claim 26, wherein the magnification adjusting optics includes at least three lens elements of low optical power spaced apart to define two gaps, wherein adjacent surfaces of each of the three elements are of approximately the same radius.
Claim 34
Dependent Claim
26 words
The optical system of claim 29, further comprising a magnification adjustment mechanism connected to the magnification adjusting optics, thereby altering a width of the two gaps.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-05-25 | 2001-11-24 | 2002-05-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-05-25 | 2005-11-24 | 2006-05-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-05-25 | 2009-11-24 | 2010-05-26 | $7700.00 | Window Closed / Lapsed |