US5756398A
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US
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Composition and method for polishing a composite comprising titanium
Assignee: DuPont Electronic Materials Holding Inc
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Filing: 1997-03-17
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Granted: 1998-05-26
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Expires: 2017-03-17
Abstract
Abstract An aqueous slurry is provided which is useful for the chemical-mechanical polishing of substrates containing titanium comprising: water, submicron abrasive particles, an oxidizing agent, and a combination of complexing agents comprising a phthalate compound and a compound which is a di- or tri-carboxylic acid with at least one hydroxyl group in an alpha position relative to one of the carboxyl groups.
Inventors
- 👤 Jiun-Fang Wang
- 👤 Anantha R. Sethuraman
- 👤 Lee Melbourne Cook
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 21:55
CPC Classifications
C; C23; C23F; C23F1/00; C23F1/10; C23F1/14; H; H10; H10P; H10P52/00; H10P52/40; H10P52/403; C09; C09G; C09G1/00; C09G1/02; C09K; C09K3/00; C09K3/14; C09K3/1454; C09K3/1463; C23F3/00
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
62 words
A composition, which is an aqueous slurry useful for the chemical-mechanical polishing of substrates which contain titanium, comprising: water, submicron abrasive particles, an oxidizing agent, and a combination of complexing agents comprising a phthalate compound and a compound which is a di- or tri-carboxylic acid with at least one hydroxyl group in an alpha position relative to one of the carboxyl groups.
Claim 2
Dependent Claim
62 words
A composition, which is an aqueous slurry useful for the chemical-mechanical polishing of substrates which contain titanium, comprising: water, submicron abrasive particles, an oxidizing agent, and a combination of complexing agents comprising a phthalate compound and a compound which is a di- or tri-carboxylic acid with at least one hydroxyl group in an alpha position relative to one of the carboxyl groups.
Claim 3
Dependent Claim
13 words
A composition according to claim 1 wherein said submicron abrasive particles are alumina.
Claim 4
Dependent Claim
13 words
A composition according to claim 1 wherein said oxidizing agent is potassium iodate.
Claim 5
Dependent Claim
36 words
A composition according to claim 1 wherein said compound which is a di- or tri-carboxylic acid with at least one hydroxyl group in an alpha position relative to one of the carboxyl groups is malic acid.
Claim 6
Dependent Claim
36 words
A composition according to claim 1 wherein said compound which is a di- or tri-carboxylic acid with at least one hydroxyl group in an alpha position relative to one of the carboxyl groups is citric acid.
Claim 7
Dependent Claim
14 words
A composition according to claim 1 wherein said phthalate compound is ammonium hydrogen phthalate.
Claim 8
Dependent Claim
80 words
A composition according to claim 1 wherein said combination of complexing agents is comprised of (a) a phthalate compound and (b) a compound which is a di- or tri-carboxylic acid with at least one hydroxyl group in an alpha position relative to one of the carboxyl groups and the mole ratio of (a) to (b) is about 1:1 to about 10:1 and wherein the total amount of complexing agent is about 2% to about 7% by weight in said composition.
Claim 9
Dependent Claim
36 words
A composition according to claim 1 comprising on a weight basis about 1% to about 15% submicron abrasive particles, about 2% to about 7% oxidizing agent, and about 2% to about 7% of said complexing agents.
Claim 10
Dependent Claim
66 words
A composition according to claim 1 comprising on a weight basis about 7% alumina, about 3% potassium iodate, about 4% of complexing agents comprising (a) a phthalate compound and (b) a compound which is a di- or tri-carboxylic acid with at least one hydroxyl group in an alpha position relative to one of the carboxyl groups wherein the mole ratio of (a) to (b) is 4:1.
Claim 11
Independent Claim
89 words
A method of polishing a substrate comprising titanium wherein said substrate is pressed against a polishing pad, said substrate and said pad are moved relative to each other, and a polishing composition is applied to said pad during the polishing operation, said polishing composition comprising: water, submicron abrasive particles, an oxidizing agent, and a combination of complexing agents comprising a phthalate compound and a compound which is a di- or tri-carboxylic acid with at least one hydroxyl group in an alpha position relative to one of the carboxyl groups.
Claim 12
Independent Claim
89 words
A method of polishing a substrate comprising titanium wherein said substrate is pressed against a polishing pad, said substrate and said pad are moved relative to each other, and a polishing composition is applied to said pad during the polishing operation, said polishing composition comprising: water, submicron abrasive particles, an oxidizing agent, and a combination of complexing agents comprising a phthalate compound and a compound which is a di- or tri-carboxylic acid with at least one hydroxyl group in an alpha position relative to one of the carboxyl groups.
Claim 13
Dependent Claim
13 words
A method according to claim 10 wherein said submicron abrasive particles are alumina.
Claim 14
Dependent Claim
13 words
A method according to claim 10 wherein said oxidizing agent is potassium iodate.
Claim 15
Dependent Claim
36 words
A method according to claim 10 wherein said compound which is a di- or tri-carboxylic acid with at least one hydroxyl group in an alpha position relative to one of the carboxyl groups is malic acid.
Claim 16
Dependent Claim
36 words
A method according to claim 10 wherein said compound which is a di- or tri-carboxylic acid with at least one hydroxyl group in an alpha position relative to one of the carboxyl groups is citric acid.
Claim 17
Dependent Claim
14 words
A method according to claim 10 wherein said phthalate compound is ammonium hydrogen phthalate.
Claim 18
Dependent Claim
80 words
A method according to claim 10 wherein said combination of complexing agents is comprised of (a) a phthalate compound and (b) a compound which is a di- or tri-carboxylic acid with at least one hydroxyl group in an alpha position relative to one of the carboxyl groups and the mole ratio of (a) to (b) is about 1:1 to about 10:1 and wherein the total amount of complexing agent is about 2% to about 7% by weight in said composition.
Claim 19
Dependent Claim
70 words
A method according to claim 10 wherein said polishing composition comprises on a weight basis about 7% alumina, about 3% potassium iodate, about 4% of complexing agents comprising (a) a phthalate compound and (b) a compound which is a di- or tri-carboxylic acid with at least one hydroxyl group in an alpha position relative to one of the carboxyl groups wherein the mole ratio of (a) to (b) is 4:1.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2001-05-25 | 2001-11-24 | 2002-05-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-05-25 | 2005-11-24 | 2006-05-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-05-25 | 2009-11-24 | 2010-05-26 | $7700.00 | Window Closed / Lapsed |