Exposure apparatus and method wherein alignment is carried out by comparing marks which are incident on both reticle stage and wafer stage reference plates

Claim 2

A scanning exposure apparatus, comprising: a first movable stage being movable while carrying a first object thereon; a second movable stage being movable while carrying a second object thereon; a projection optical system for projecting a pattern; control means serviceable to scan said first and second movable stages in a timed relation and relative to said projection optical system and to project a pattern of the first object onto the second object through said projection optical system; a first reference plate fixedly mounted on said first movable stage; a second reference plate fixedly mounted on said second movable stage; and detecting means serviceable to scan at least one of said first and second movable stages to detect a relative positional relationship between alignment marks of said first and second reference plates to thereby determine a scan direction of one of said first and second movable stages.

Claim 3

An apparatus according to claim 1, wherein at least one of said first and second reference plates comprises plural alignment marks arrayed along the scan direction.

Claim 4

An apparatus according to claim 1, wherein said detecting means comprises observing means for observing one of the alignment marks through said projection optical system.

Claim 5

An apparatus according to claim 1, wherein the first object has an alignment mark formed thereon, and wherein said apparatus further comprises means for detecting a relative positional relationship between the alignment mark of the first object and the alignment mark of said first reference plate.

Claim 6

A scanning exposure method wherein a first movable stage being movable while carrying a first object thereon and a second movable stage being movable while carrying a second object thereon are scanned in a timed relation and relative to a projection optical system and wherein a pattern of one of the first and second objects is projected onto the other through the projection optical system, said method comprising: a first detecting step for detecting a relative positional relationship between a first alignment mark of a first reference plate fixedly mounted on the first movable stage and a predetermined alignment mark of a second reference plate fixedly mounted on the second movable stage; a second detecting step for moving the first movable stage in a scan exposure direction and for detecting a relative positional relationship between the predetermined alignment mark of the second reference plate and a second alignment mark of the first reference plate which second alignment mark is disposed in the scan exposure direction, with respect to the first alignment mark; a third detecting step for detecting a relative positional relationship between an alignment mark of the first object and at least one of the first and second alignment marks of the first reference plate; and an aligning step for aligning a scan direction of the first object with a scan direction of the first movable stage, on the basis of the detection in said first, second and third detecting steps.

Claim 7

A scanning exposure method wherein a first movable stage being movable while carrying a first object thereon and a second movable stage being movable while carrying a second object thereon are scanned in a timed relation and relative to a projection optical system and wherein a pattern of one of the first and second objects is projected onto the other through the projection optical system, said method comprising: a first detecting step for detecting a relative positional relationship between a first alignment mark of a first reference plate fixedly mounted on the first movable stage and a predetermined alignment mark of a second reference plate fixedly mounted on the second movable stage; a second detecting step for moving the first movable stage in a scan exposure direction and for detecting a relative positional relationship between the predetermined alignment mark of the second reference plate and a second alignment mark of the first reference plate which second alignment mark is disposed in the scan exposure direction, with respect to the first alignment mark; a third detecting step for detecting a relative positional relationship between an alignment mark of the first object and at least one of the first and second alignment marks of the first reference plate; and an aligning step for aligning a scan direction of the first object with a scan direction of the first movable stage, on the basis of the detection in said first, second and third detecting steps.

Claim 8

A scanning exposure apparatus, comprising: a first movable stage being movable while carrying a first object thereon; a second movable stage being movable while carrying a second object thereon; a projection optical system for projecting a pattern; control means serviceable to scan said first and second movable stages in a timed relation and relative to said projection optical system and to project a pattern of the first object onto the second object through said projection optical system; a first reference plate fixedly mounted on said first movable stage; a second reference plate fixedly mounted on a holding member for holding said projection optical system; and detecting means serviceable to scan said first movable stage to detect a relative positional relationship between alignment marks of said first and second reference plates to thereby determine a scan direction of said first movable stage.

Claim 9

A scanning exposure apparatus, comprising: a first movable stage being movable while carrying a first object thereon; a second movable stage being movable while carrying a second object thereon; a projection optical system for projecting a pattern; control means serviceable to scan said first and second movable stages in a timed relation and relative to said projection optical system and to project a pattern of the first object onto the second object through said projection optical system; a first reference plate fixedly mounted on said first movable stage; a second reference plate fixedly mounted on a holding member for holding said projection optical system; and detecting means serviceable to scan said first movable stage to detect a relative positional relationship between alignment marks of said first and second reference plates to thereby determine a scan direction of said first movable stage.

Claim 10

An apparatus according to claim 6, wherein said first reference plate comprises plural alignment marks arrayed along the scan direction.

Claim 11

A scanning exposure method wherein a first movable stage being movable while carrying a first object thereon and a second movable stage being movable while carrying a second object thereon are scanned in a timed relation and relative to a projection optical system and wherein a pattern of the first object is projected onto the second object through the projection optical system, said method comprising: a first detecting step for detecting a relative positional relationship between a first alignment mark of a first reference plate fixedly mounted on the first movable stage and a predetermined alignment mark of a second reference plate fixedly mounted on a holding plate for holding the projection optical system; a second detecting step for moving the first movable stage in a scan exposure direction and for detecting a relative positional relationship between the predetermined alignment mark of the second reference plate and a second alignment mark of the first reference plate which second alignment mark is disposed in the scan exposure direction, with respect to the first alignment mark; and a determining step for determining a scan direction of one of the first and second movable stages on the basis of the detection at said first and second detecting steps.

Claim 12

A scanning exposure method wherein a first movable stage being movable while carrying a first object thereon and a second movable stage being movable while carrying a second object thereon are scanned in a timed relation and relative to a projection optical system and wherein a pattern of the first object is projected onto the second object through the projection optical system, said method comprising: a first detecting step for detecting a relative positional relationship between a first alignment mark of a first reference plate fixedly mounted on the first movable stage and a predetermined alignment mark of a second reference plate fixedly mounted on a holding plate for holding the projection optical system; a second detecting step for moving the first movable stage in a scan exposure direction and for detecting a relative positional relationship between the predetermined alignment mark of the second reference plate and a second alignment mark of the first reference plate which second alignment mark is disposed in the scan exposure direction, with respect to the first alignment mark; and a determining step for determining a scan direction of one of the first and second movable stages on the basis of the detection at said first and second detecting steps.

Claim 13

A method according to claim 8, wherein the first object has an alignment mark formed thereon, and wherein said method further comprises a third detecting step for detecting a relative positional relationship between the alignment mark of the first object and at least one of the first and second alignment marks of the first reference plate and the predetermined alignment mark of the second reference plate.

Claim 18

A scanning exposure method usable with a first movable stage being movable while carrying a first object thereon, a second movable stage being movable while carrying a second object thereon, a first reference plate fixedly mounted on the first movable stage and having plural alignment marks formed thereon, and a second reference plate fixedly mounted on the second movable stage and having plural alignment marks formed thereon, wherein the first and second movable stages are scanned in a timed relation and relative to a projection optical system, and wherein a pattern of the first object is projected onto the second object through the projection optical system, said method comprising: a first detecting step for detecting a relative positional relationship between alignment marks of the first reference plate and alignment marks of the second reference plate through the projection optical system to detect a relationship between a coordinate system as determined by plural alignment marks of the first reference plate and a coordinate system as determined by plural alignment marks of the second reference plate; a second detecting step for moving the first movable stage in a scan exposure direction to detect a relative positional relationship between alignment marks of the first reference plate and alignment marks of the second reference plate, and for detecting a relationship between a coordinate system as determined by alignment marks of the first reference plate and a coordinate system as determined by an actual scan direction of the first movable stage; a third detecting step for detecting a relative positional relationship between alignment marks of the first object and alignment marks of the first reference plate, and for detecting a relationship between a coordinate system as determined by alignment marks of the first reference plate and a coordinate system as determined by alignment marks of the first object; and a correcting step for correcting the scan direction of the first movable stage, on the basis of the detection at said first, second and third detecting steps.

Claim 19

A scanning exposure method usable with a first movable stage being movable while carrying a first object thereon, a second movable stage being movable while carrying a second object thereon, a first reference plate fixedly mounted on the first movable stage and having plural alignment marks formed thereon, and a second reference plate fixedly mounted on the second movable stage and having plural alignment marks formed thereon, wherein the first and second movable stages are scanned in a timed relation and relative to a projection optical system, and wherein a pattern of the first object is projected onto the second object through the projection optical system, said method comprising: a first detecting step for detecting a relative positional relationship between alignment marks of the first reference plate and alignment marks of the second reference plate through the projection optical system to detect a relationship between a coordinate system as determined by plural alignment marks of the first reference plate and a coordinate system as determined by plural alignment marks of the second reference plate; a second detecting step for moving the first movable stage in a scan exposure direction to detect a relative positional relationship between alignment marks of the first reference plate and alignment marks of the second reference plate, and for detecting a relationship between a coordinate system as determined by alignment marks of the first reference plate and a coordinate system as determined by an actual scan direction of the first movable stage; a third detecting step for detecting a relative positional relationship between alignment marks of the first object and alignment marks of the first reference plate, and for detecting a relationship between a coordinate system as determined by alignment marks of the first reference plate and a coordinate system as determined by alignment marks of the first object; and a correcting step for correcting the scan direction of the first movable stage, on the basis of the detection at said first, second and third detecting steps.

Claim 20

A method according to claim 12, further comprising a correcting step for correcting the scan direction of the first movable stage on the basis of the detection at said fourth detecting step.

Claim 21

A scanning exposure method usable with a first movable stage being movable while carrying a first object thereon, a second movable stage being movable while carrying a second object thereon, a first reference plate fixedly mounted on the first movable stage and having plural alignment marks formed thereon, and a second reference plate fixedly mounted on the second movable stage and having plural alignment marks formed thereon, wherein the first and second movable stages are scanned in a timed relation and relative to a projection optical system, and wherein a pattern of the first object is projected onto the second object through the projection optical system, said method comprising: a first detecting step for detecting a relative positional relationship between alignment marks of the first reference plate and alignment marks of the second reference plate through the projection optical system to detect a relationship between a coordinate system as determined by plural alignment marks of the first reference plate and a coordinate system as determined by plural alignment marks of the second reference plate; a second detecting step for moving the first movable stage in a scan exposure direction to detect a relative positional relationship between alignment marks of the first reference plate and alignment marks of the second reference plate, and for detecting a relationship between a coordinate system as determined by alignment marks of the first reference plate and a coordinate system as determined by an actual scan direction of the first movable stage; a third detecting step for detecting a relative positional relationship between alignment marks of the first reference plate and alignment marks of a third reference plate fixedly mounted on a holding member for holding the projection optical system, and for detecting a relationship between a coordinate system as determined by alignment marks of the first reference plate and a coordinate system as determined by alignment marks of the third reference plate; a fourth detecting step for detecting a relative positional relationship between alignment marks of the first object and alignment marks of the third reference plate, and for detecting a relationship between a coordinate system as determined by alignment marks of the first reference plate and a coordinate system as determined by alignment marks of the third reference plate; and a correcting step for correcting the scan direction of the first movable stage,on the basis of the detection at said first, second, third and fourth detecting steps.

Claim 22

A scanning exposure method usable with a first movable stage being movable while carrying a first object thereon, a second movable stage being movable while carrying a second object thereon, a first reference plate fixedly mounted on the first movable stage and having plural alignment marks formed thereon, and a second reference plate fixedly mounted on the second movable stage and having plural alignment marks formed thereon, wherein the first and second movable stages are scanned in a timed relation and relative to a projection optical system, and wherein a pattern of the first object is projected onto the second object through the projection optical system, said method comprising: a first detecting step for detecting a relative positional relationship between alignment marks of the first reference plate and alignment marks of the second reference plate through the projection optical system to detect a relationship between a coordinate system as determined by plural alignment marks of the first reference plate and a coordinate system as determined by plural alignment marks of the second reference plate; a second detecting step for moving the first movable stage in a scan exposure direction to detect a relative positional relationship between alignment marks of the first reference plate and alignment marks of the second reference plate, and for detecting a relationship between a coordinate system as determined by alignment marks of the first reference plate and a coordinate system as determined by an actual scan direction of the first movable stage; a third detecting step for detecting a relative positional relationship between alignment marks of the first reference plate and alignment marks of a third reference plate fixedly mounted on a holding member for holding the projection optical system, and for detecting a relationship between a coordinate system as determined by alignment marks of the first reference plate and a coordinate system as determined by alignment marks of the third reference plate; a fourth detecting step for detecting a relative positional relationship between alignment marks of the first object and alignment marks of the third reference plate, and for detecting a relationship between a coordinate system as determined by alignment marks of the first reference plate and a coordinate system as determined by alignment marks of the third reference plate; and a correcting step for correcting the scan direction of the first movable stage,on the basis of the detection at said first, second, third and fourth detecting steps.

Claim 23

A method according to claim 14, further comprising a correcting step for correcting the scan direction of the first movable state on the basis of the detection at said sixth detecting step.

Claim 24

A method according to claim 12, further comprising a correcting step for correcting a scan direction of at least one of the first and second movable stages on the basis of the relationship between the actual movement direction of the first movable stage and the actual movement direction of the second movable stage.

Claim 27

A scanning exposure apparatus, comprising: a first movable stage being movable while carrying a first object thereon; a second movable stage being movable while carrying a second object thereon; an illumination optical system for illuminating the first object with exposure light; a projection optical system for projecting a pattern of the first object as illuminated by said illumination optical system; control means serviceable to scan said first and second movable stages in a timed relation and relative to said projection optical system and to project the pattern of the first object onto the second object through said projection optical system; first detecting means for detecting a relative positional relationship between an alignment mark of a first reference plate fixedly mounted on said first movable stage and an alignment mark of a second reference plate fixedly mounted on said second movable stage; second detecting means for detecting a position of said second reference plate in cooperation with said projection optical system; and third detecting means for detecting a measurement error in the detection of a position of the second object through said second detecting means, on the basis of the detection by said first and second detecting means.

Claim 28

A scanning exposure apparatus, comprising: a first movable stage being movable while carrying a first object thereon; a second movable stage being movable while carrying a second object thereon; an illumination optical system for illuminating the first object with exposure light; a projection optical system for projecting a pattern of the first object as illuminated by said illumination optical system; control means serviceable to scan said first and second movable stages in a timed relation and relative to said projection optical system and to project the pattern of the first object onto the second object through said projection optical system; first detecting means for detecting a relative positional relationship between an alignment mark of a first reference plate fixedly mounted on said first movable stage and an alignment mark of a second reference plate fixedly mounted on said second movable stage; second detecting means for detecting a position of said second reference plate in cooperation with said projection optical system; and third detecting means for detecting a measurement error in the detection of a position of the second object through said second detecting means, on the basis of the detection by said first and second detecting means.

Claim 29

An apparatus according to claim 18, wherein said first detecting means uses measurement light having a wavelength substantially the same as that of the exposure light.

Claim 30

An apparatus according to claim 18 wherein said second detecting means uses measurement light having a wave length substantially the same as that of the exposure light.

Claim 32

A scanning exposure method usable with a first movable stage being movable while carrying a first object thereon, a second movable stage being movable while carrying a second object thereon, an illumination optical system for illuminating the first object with exposure light, and a projection optical system for projecting a pattern of the first object illuminated by the illumination optical system onto the second object, wherein the first and second movable stages are scanned in a timed relation and relative to the projection optical system, and wherein the pattern of the first object is projected onto the second object through the projection optical system, said method comprising: a first detecting step for detecting a relative positional relationship between an alignment mark of a first reference plate fixedly mounted on the first movable stage and an alignment mark of a second reference plate fixedly mounted on the second movable stage; a second detecting step for detecting a position of the second reference plate through the projection optical system; and a third detecting step for detecting a measurement error in the detection of the position of the second object by the second detecting step, on the basis of the detection at said first and second detecting steps.

Claim 33

A scanning exposure method usable with a first movable stage being movable while carrying a first object thereon, a second movable stage being movable while carrying a second object thereon, an illumination optical system for illuminating the first object with exposure light, and a projection optical system for projecting a pattern of the first object illuminated by the illumination optical system onto the second object, wherein the first and second movable stages are scanned in a timed relation and relative to the projection optical system, and wherein the pattern of the first object is projected onto the second object through the projection optical system, said method comprising: a first detecting step for detecting a relative positional relationship between an alignment mark of a first reference plate fixedly mounted on the first movable stage and an alignment mark of a second reference plate fixedly mounted on the second movable stage; a second detecting step for detecting a position of the second reference plate through the projection optical system; and a third detecting step for detecting a measurement error in the detection of the position of the second object by the second detecting step, on the basis of the detection at said first and second detecting steps.

Claim 34

A method according to claim 22, wherein said first detecting step uses measurement light having a wavelength substantially the same as that of the exposure light.

Claim 35

A method according to claim 22, wherein said second detecting step uses measurement light having a wavelength substantially the same as that of the exposure light.

Claim 36

A method according to claim 22 wherein, when the relative positional relationship between the first and second reference plates is detected at said first detecting step, a position of the second reference plate is measured without moving the first and second movable stages.

Claim 39

A scanning exposure apparatus, comprising: a first movable stage being movable while carrying a first object thereon; a second movable stage being movable while carrying a second object thereon; a projection optical system for projecting a pattern; a first reference plate fixedly mounted on said first movable stage; a second reference plate fixedly mounted on said second movable stage; first detecting means for detecting a first relative positional relationship between a first alignment mark of said first reference plate and an alignment mark of said second reference plate, said first detecting means further being operable to move said first movable stage in a scan exposure direction and to detect a second relative positional relationship between an alignment mark of the second reference plate and a second alignment mark of the first reference plate which second alignment mark is disposed in the scan exposure direction with respect to the first alignment mark; second detecting means for detecting a third relative positional relationship between an alignment mark of the first object and at least one of the first and second alignment marks of the first reference plate; and control means for aligning a scan direction of the first object with a scan direction of the first movable stage, on the basis of the detection of said first, second and third relative positional relationships, said control means further being operable to cause said first and second movable stages to be scanned in a timed relation and relatively to said projection optical system so that a pattern of the first object is projected on to the second object through said projection optical system.

Claim 40

A scanning exposure apparatus, comprising: a first movable stage being movable while carrying a first object thereon; a second movable stage being movable while carrying a second object thereon; a projection optical system for projecting a pattern; a first reference plate fixedly mounted on said first movable stage; a second reference plate fixedly mounted on said second movable stage; first detecting means for detecting a first relative positional relationship between a first alignment mark of said first reference plate and an alignment mark of said second reference plate, said first detecting means further being operable to move said first movable stage in a scan exposure direction and to detect a second relative positional relationship between an alignment mark of the second reference plate and a second alignment mark of the first reference plate which second alignment mark is disposed in the scan exposure direction with respect to the first alignment mark; second detecting means for detecting a third relative positional relationship between an alignment mark of the first object and at least one of the first and second alignment marks of the first reference plate; and control means for aligning a scan direction of the first object with a scan direction of the first movable stage, on the basis of the detection of said first, second and third relative positional relationships, said control means further being operable to cause said first and second movable stages to be scanned in a timed relation and relatively to said projection optical system so that a pattern of the first object is projected on to the second object through said projection optical system.

Claim 41

A scanning exposure apparatus, comprising: a first movable stage being movable while carrying a first object thereon; a second movable stage being movable while carrying a second object thereon; a projection optical system for projecting a pattern; a first reference plate fixedly mounted on said first movable stage; a second reference plate fixedly mounted on said second movable stage; first detecting means for detecting a relative positional relationship between alignment marks of the first reference plate and alignment marks of the second reference plate, through the projection optical system, and for detecting first relationship between a coordinate system as determined by plural alignment marks of the first reference plate and a coordinate system as determined by plural alignment marks of the second reference plate, said first detecting means further being operable to move the first movable stage in a scan exposure direction and to detect positions of alignment marks of the first reference plate to detect a second relationship between a coordinate system as determined by alignment marks of the second reference plate and a coordinate system as determined by an actual scan direction of the first movable stage; second detecting means for detecting a relative positional relationship between alignment marks of the first object and alignment marks of the first reference plate, and for detecting a third relationship between a coordinate system as determined by alignment marks of the first reference plate and a coordinate system as determined by alignment marks of the first object; control means for correcting the scan direction of the first movable stage, on the basis of the detection of the first, second and third relationships, and for causing said first and second movable stages to be scanned in a timed relation and relatively to said projection optical system, so that the pattern of the first object is projected on to the second object through said projection optical system.

Claim 42

A scanning exposure apparatus, comprising: a first movable stage being movable while carrying a first object thereon; a second movable stage being movable while carrying a second object thereon; a projection optical system for projecting a pattern; a first reference plate fixedly mounted on said first movable stage; a second reference plate fixedly mounted on said second movable stage; first detecting means for detecting a relative positional relationship between alignment marks of the first reference plate and alignment marks of the second reference plate, through the projection optical system, and for detecting first relationship between a coordinate system as determined by plural alignment marks of the first reference plate and a coordinate system as determined by plural alignment marks of the second reference plate, said first detecting means further being operable to move the first movable stage in a scan exposure direction and to detect positions of alignment marks of the first reference plate to detect a second relationship between a coordinate system as determined by alignment marks of the second reference plate and a coordinate system as determined by an actual scan direction of the first movable stage; second detecting means for detecting a relative positional relationship between alignment marks of the first object and alignment marks of the first reference plate, and for detecting a third relationship between a coordinate system as determined by alignment marks of the first reference plate and a coordinate system as determined by alignment marks of the first object; control means for correcting the scan direction of the first movable stage, on the basis of the detection of the first, second and third relationships, and for causing said first and second movable stages to be scanned in a timed relation and relatively to said projection optical system, so that the pattern of the first object is projected on to the second object through said projection optical system.

Claim 43

A scanning exposure apparatus, comprising: a first movable stage being movable while carrying a first object thereon; a second movable stage being movable while carrying a second object thereon; a projection optical system for projecting a pattern; a first reference plate fixedly mounted on said first movable stage; a second reference plate fixedly mounted on said second movable stage; first detecting means for detecting a relative positional relationship between alignment marks of the first reference plate and alignment marks of the second reference plate, through the projection optical system, and for detecting a first relationship between a coordinate system as determined by plural alignment marks of the first reference plate and a coordinate system as determined by plural alignment marks of the second reference plate, said first detecting means further being operable to move the first movable stage in a scan exposure direction and to detect positions of alignment marks of the first reference plate to detect a second relationship between a coordinate system as determined by alignment marks of the second reference plate and a coordinate system as determined by an actual scan direction of the first movable stage; second detecting means for detecting a relative positional relationship between alignment marks of the first reference plate and alignment marks of a third reference plate fixedly mounted on a holding member for holding said projection optical system, and for detecting a third relationship between a coordinate system as determined by alignment marks of the first reference plate and a coordinate system as determined by alignment marks of the third reference plate, said second detecting means further being operable to detect a relative positional relationship between alignment marks of the first object and alignment marks of said third reference plate, and to detect a fourth relationship between a coordinate system as determined by alignment marks of the first reference plate and alignment marks of the third reference plate; and control means for correcting the scan direction of the first movable stage, on the basis of the detection of the first, second and third relationships, and for causing said first and second movable stages to be scanned in a timed relation and relatively to said projection optical system, so that the pattern of the first object is projected onto the second object through said projection optical system.

Claim 44

A scanning exposure apparatus, comprising: a first movable stage being movable while carrying a first object thereon; a second movable stage being movable while carrying a second object thereon; a projection optical system for projecting a pattern; a first reference plate fixedly mounted on said first movable stage; a second reference plate fixedly mounted on said second movable stage; first detecting means for detecting a relative positional relationship between alignment marks of the first reference plate and alignment marks of the second reference plate, through the projection optical system, and for detecting a first relationship between a coordinate system as determined by plural alignment marks of the first reference plate and a coordinate system as determined by plural alignment marks of the second reference plate, said first detecting means further being operable to move the first movable stage in a scan exposure direction and to detect positions of alignment marks of the first reference plate to detect a second relationship between a coordinate system as determined by alignment marks of the second reference plate and a coordinate system as determined by an actual scan direction of the first movable stage; second detecting means for detecting a relative positional relationship between alignment marks of the first reference plate and alignment marks of a third reference plate fixedly mounted on a holding member for holding said projection optical system, and for detecting a third relationship between a coordinate system as determined by alignment marks of the first reference plate and a coordinate system as determined by alignment marks of the third reference plate, said second detecting means further being operable to detect a relative positional relationship between alignment marks of the first object and alignment marks of said third reference plate, and to detect a fourth relationship between a coordinate system as determined by alignment marks of the first reference plate and alignment marks of the third reference plate; and control means for correcting the scan direction of the first movable stage, on the basis of the detection of the first, second and third relationships, and for causing said first and second movable stages to be scanned in a timed relation and relatively to said projection optical system, so that the pattern of the first object is projected onto the second object through said projection optical system.