Method and apparatus for detecting positional deviation by using diffraction gratings with a compensation delay determining unit

Claim 1

A deviation measuring system for measuring relative positional deviation between first and second diffraction gratings formed on an object, said system comprising: signal detecting means for detecting a position deviation signal corresponding to the relative positional deviation between the first and second diffraction gratings, said signal detecting means including (i) projecting means for projecting first and second coherent light beams onto the first and second diffraction gratings, (ii) first photoelectric converting means for photoelectrically converting into a first output signal interference light produced as a result of interference between diffraction light of the first coherent light beam and diffraction light of the second coherent light beam being diffracted by the first diffraction grating, (iii) second photoelectric converting means for photoelectrically converting into a second output signal interference light produced as a result of interference between diffraction light of the first coherent light beam and diffraction light of the second coherent light beam being diffracted by the second diffraction grating, (iv) delay means for applying a delay to at least one of said first and second output signals of said first and second photoelectric converting means, and (v) position deviation signal output means for outputting a position deviation signal corresponding to a relative positional deviation on the basis of said at least one output signal delayed by said delay means and the other output signal; compensation delay determining means for causing said signal detecting means to produce a position deviation signal corresponding to a relative positional deviation between third and fourth diffraction gratings formed on the object and having a predetected relative positional deviation, and for determining a compensation amount of delay to be applied by said delay means; and measuring means for causing said delay means to apply a compensation amount of delay determined by said compensation delay determining means, and for causing said signal detecting means to produce a positional deviation signal corresponding to the relative positional deviation between the first and second diffraction gratings on the basis of the position deviation signal produced by said signal detecting means in accordance with the compensation amount of delay determined by said compensation delay determining means.

Claim 6

A method of measuring relative positional deviation between first and second diffraction gratings formed on an object, said method comprising the steps of: detecting, through a signal detecting system, a position deviation signal corresponding to the relative positional deviation between the first and second diffraction gratings, wherein the signal detecting system includes (i) an optical system for projecting first and second coherent light beams onto the first and second diffraction gratings, (ii) a first photoelectric converting device for photoelectrically converting into a first output signal interference light produced as a result of interference between diffraction light of the first coherent light beam and diffraction light of the second coherent light beam being diffracted by the first diffraction grating, (iii) a second photoelectric converting device for photoelectrically converting into a second output signal interference light produced as a result of interference between diffraction light of the first coherent light beam and diffraction light of the second coherent light beam being diffracted by the second diffraction grating, (iv) a delay unit for applying a delay to at least one of said first and second output signals of said first and second photoelectric converting devices, and (v) a position deviation signal output unit for outputting a position deviation signal corresponding to the relative positional deviation on the basis of said at least one output signal delayed by said delay means and the other output signal; determining a compensation amount of delay to be applied by the delay unit, wherein the signal detecting system is caused to produced a position deviation signal corresponding to a relative positional deviation between third and fourth diffraction gratings formed on the object and having a predetermined relative positional deviation, and wherein the compensation amount of delay to be applied by the delay unit is determined on the basis of the position deviation signal; and measuring the relative positional deviation, wherein the delay unit is caused to apply a compensation amount of delay determined in said compensation delay determining step, and wherein the signal detecting system is caused to produce a position deviation signal corresponding to the relative positional deviation between the first and second diffraction gratings on the basis of the position deviation signal produced by said signal detecting means in accordance with the compensation amount of delay determined in the compensation delay determining step.

Claim 7

A method of measuring relative positional deviation between first and second diffraction gratings formed on an object, said method comprising the steps of: detecting, through a signal detecting system, a position deviation signal corresponding to the relative positional deviation between the first and second diffraction gratings, wherein the signal detecting system includes (i) an optical system for projecting first and second coherent light beams onto the first and second diffraction gratings, (ii) a first photoelectric converting device for photoelectrically converting into a first output signal interference light produced as a result of interference between diffraction light of the first coherent light beam and diffraction light of the second coherent light beam being diffracted by the first diffraction grating, (iii) a second photoelectric converting device for photoelectrically converting into a second output signal interference light produced as a result of interference between diffraction light of the first coherent light beam and diffraction light of the second coherent light beam being diffracted by the second diffraction grating, (iv) a delay unit for applying a delay to at least one of said first and second output signals of said first and second photoelectric converting devices, and (v) a position deviation signal output unit for outputting a position deviation signal corresponding to the relative positional deviation on the basis of said at least one output signal delayed by said delay means and the other output signal; determining a compensation amount of delay to be applied by the delay unit, wherein the signal detecting system is caused to produced a position deviation signal corresponding to a relative positional deviation between third and fourth diffraction gratings formed on the object and having a predetermined relative positional deviation, and wherein the compensation amount of delay to be applied by the delay unit is determined on the basis of the position deviation signal; and measuring the relative positional deviation, wherein the delay unit is caused to apply a compensation amount of delay determined in said compensation delay determining step, and wherein the signal detecting system is caused to produce a position deviation signal corresponding to the relative positional deviation between the first and second diffraction gratings on the basis of the position deviation signal produced by said signal detecting means in accordance with the compensation amount of delay determined in the compensation delay determining step.