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US5750908A Expired / Lapsed US ⏱️ 0.0 years remaining

Testing system with real time/off line functionality allocation

Assignee: ADE Corp
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Filing: 1997-02-25
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Granted: 1998-05-12
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Expires: 2017-02-25
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Abstract

Abstract A testing system with real time/off line functionality allocation is disclosed. The real time functions are limited to movement of objects to be tested through the testing stations, operation of sensors to gather raw data, and storage of the raw data. The off line functions include removing artifacts in the raw data, analyzing the raw data according to various rules, and controlling the sorting of the tested objects according to the analysis. By limiting the real time processing to a few essential elements necessary for operation of the testing line, the testing line can proceed even if the off line functions are not operating.

Inventors

  • 👤 William Drohan

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-02 04:45
CPC Classifications
G; G01; G01M; G01M99/00; H; H10; H10P; H10P74/00; H10P74/23

Claims Analysis

Total Claims: 23
Claim 1
Independent Claim 132 words
A testing system comprising: a plurality of real time applications controlling a plurality of real time functions; a real time controller operative with said plurality of real time applications; a plurality of off line applications controlling a plurality of off line functions independently of said real time functions; a first test station in communication with said plurality of real time applications; and a first database in communication with said plurality of real time applications and said plurality of off line applications, wherein said real time applications are selected from the group consisting of movement of objects being tested to or from said first test station, operation of said first test station for objects being tested, and storage within said first database of data obtained by testing objects on said first test station.
Claim 2
Dependent Claim 132 words
A testing system comprising: a plurality of real time applications controlling a plurality of real time functions; a real time controller operative with said plurality of real time applications; a plurality of off line applications controlling a plurality of off line functions independently of said real time functions; a first test station in communication with said plurality of real time applications; and a first database in communication with said plurality of real time applications and said plurality of off line applications, wherein said real time applications are selected from the group consisting of movement of objects being tested to or from said first test station, operation of said first test station for objects being tested, and storage within said first database of data obtained by testing objects on said first test station.
Claim 3
Dependent Claim 68 words
The testing system of claim 1 wherein said off line applications are selected from the group consisting of analysis of data in said first database, removal of errors in data of said first database, comparison of processed data to a model, update of processing applications, creation of application processes, characterization of objects, sorting of objects, correction of an object fabrication process, and control of an object fabrication process.
Claim 4
Dependent Claim 24 words
The testing system of claim 1 further comprising a second database in communication with at least one of said plurality of off line applications.
Claim 5
Dependent Claim 16 words
The testing system of claim 1 further comprising a network operative with said off line applications.
Claim 6
Dependent Claim 21 words
The test system of claim 1 further comprising a second test station in communication with said plurality of real time applications.
Claim 7
Dependent Claim 25 words
The testing system of claim 1 wherein said movement of objects being tested to or from said first test station comprises a conveyor control system.
Claim 8
Dependent Claim 25 words
The testing system of claim 1 wherein said movement of objects being tested to or from said first test station comprises a robot control system.
Claim 9
Dependent Claim 84 words
A semiconductor wafer testing system comprising: a plurality of real time applications controlling a plurality of real time functions; a real time controller operative with said plurality of real time applications; a plurality of off line applications controlling a plurality of off line functions independently of said real time functions; a first wafer test station in communication with said plurality of real time applications; and a first database in communication with said plurality of real time applications and said plurality of off line applications.
Claim 10
Dependent Claim 84 words
A semiconductor wafer testing system comprising: a plurality of real time applications controlling a plurality of real time functions; a real time controller operative with said plurality of real time applications; a plurality of off line applications controlling a plurality of off line functions independently of said real time functions; a first wafer test station in communication with said plurality of real time applications; and a first database in communication with said plurality of real time applications and said plurality of off line applications.
Claim 11
Dependent Claim 63 words
The semiconductor wafer testing system of claim 8 wherein said real time controller applications are selected from the group consisting of movement of wafers being tested to and from said first wafer test station, operation of said first wafer test station for wafers being tested, and storage within said first database of data obtained by testing wafers at said first wafer test station.
Claim 12
Dependent Claim 28 words
The semiconductor wafer testing system of claim 9 wherein said movement of wafers being tested to or from said first wafer test station comprises a conveyor control system.
Claim 13
Dependent Claim 27 words
The semiconductor wafer testing system of claim 9 wherein said movement of wafers being tested to or from said first test station comprises a robot control system.
Claim 14
Dependent Claim 70 words
The semiconductor wafer testing system of claim 8 wherein said off line applications are selected from the group consisting of analysis of data in said first database, removal of errors in data of said first database, comparison of processed data to a model, update of processing applications, creation of application processes, characterization of wafers, sorting of wafers, correction of a wafer fabrication process, and control of a wafer fabrication process.
Claim 15
Dependent Claim 26 words
The semiconductor wafer testing system of claim 8 further comprising a second database in communication with at least one of said plurality of off line applications.
Claim 16
Dependent Claim 27 words
The semiconductor wafer testing system of claim 8 further comprising: a wafer input station in communication with said real time applications and said first wafer test station.
Claim 17
Dependent Claim 26 words
The semiconductor wafer testing system of claim 8 further comprising an output station in communication with said real time applications and said first wafer test station.
Claim 18
Dependent Claim 23 words
The semiconductor wafer testing system of claim 8 further comprising a wafer storage and sorting system in communication with said real time applications.
Claim 19
Dependent Claim 22 words
The semiconductor wafer testing system of claim 8 further comprising a second wafer test station in communication with said real time applications.
Claim 20
Dependent Claim 21 words
The semiconductor wafer testing system of claim 8 further comprising a corrected data database in communication with said off line applications.
Claim 21
Dependent Claim 20 words
The semiconductor wafer testing system of claim 8 further comprising a characterization database in communication with said off line applications.
Claim 22
Dependent Claim 20 words
The semiconductor wafer testing system of claim 8 further comprising a discrepancy database in communication with said off line applications.
Claim 23
Dependent Claim 18 words
The semiconductor wafer testing system of claim 8 further comprising a network operative with said off line applications.

References Cited (Backward Citations)

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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2001-05-11 2001-11-10 2002-05-12 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2005-05-11 2005-11-10 2006-05-12 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2009-05-11 2009-11-10 2010-05-12 $7700.00 Window Closed / Lapsed

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