US4860229A
Expired / Lapsed
US
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Wafer flatness station
Assignee: ADE Corp
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Filing: 1988-12-09
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Granted: 1989-08-22
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Expires: 2008-12-09
Abstract
Abstract An automatic wafer flatness station is disclosed for obtaining a flatness profile of a semiconductor wafer or other sample from thickness data. The sample to be flatness profiled is supported so that it maintains its natural shape. A processor coupled to a capacitive thickness sensing head and to the support medium is operative to successively position each of a plurality of preselected points of the sample into proximity with the capacitive thickness sensing head for measuring the thickness of the sample at the corresponding point. An analog-to-digital converter converts the thickness measurement into data that is stored in a data table in system memory, the individual addresses of which correspond to the spacial location on the sample of each such preselected point. The processor is operative after the data table is compiled for each sample to compute the flatness profile of one surface therefrom relative to a selectable plane. That plane typically maps the other surface of the sample into a plane, for example, simulating the condition where the sample is held in an ideal vacuum chuck for semiconductor processing at which point surface flatness is needed. Other planes may be defined by least squares analysis and 3-point techniques, among others.
Inventors
- 👤 Robert C. Abbe
- 👤 Noel S. Poduje
- 👤 Neil H. Judell
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 18:48
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/06; H10P72/0611; G; G01; G01B; G01B7/00; G01B7/34; G01B7/345
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
112 words
Apparatus for obtaining a flatness profile of a sample to be profiled, comprising: sample support means for holding the sample such that a preselected region of the sample to be profiled extends freely in space; means for obtaining first data representative of thickness of a plurality of preselected discrete points of the sample selected to substantially cover the preselected spatial region of the wafer to be profiled; and means defining a two-dimensional (2-D) reference surface and responsive to the first data for providing second data representative of the two-dimensional flatness of the sample relative to said two-dimensional reference surface, whereby thickness information is converted to flatness information relative to said reference surface.
Claim 2
Dependent Claim
112 words
Apparatus for obtaining a flatness profile of a sample to be profiled, comprising: sample support means for holding the sample such that a preselected region of the sample to be profiled extends freely in space; means for obtaining first data representative of thickness of a plurality of preselected discrete points of the sample selected to substantially cover the preselected spatial region of the wafer to be profiled; and means defining a two-dimensional (2-D) reference surface and responsive to the first data for providing second data representative of the two-dimensional flatness of the sample relative to said two-dimensional reference surface, whereby thickness information is converted to flatness information relative to said reference surface.
Claim 3
Dependent Claim
37 words
The invention of claim 1, wherein said first data obtaining means includes a thickness sensing head, and means for moving the sample to position successive ones of said plurality of preselected points in said thickness sensing head.
Claim 4
Dependent Claim
18 words
The invention of claim 2, wherein said thickness sensing head includes first and second spaced apart capacitive probes.
Claim 5
Dependent Claim
13 words
The invention of claim 2, wherein said moving means includes a vacuum chuck.
Claim 6
Dependent Claim
93 words
The invention of claim 4, wherein said vacuum chuck is rotatable about its axis θ radians and translatable along orthogonal X and Z axes in response to θ, X, and Z control signals; wherein said thickness sensing head is positioned adjacent said vacuum chuck; and further including means for producing θ, X, and Z control signals to controllably manipulate said vacuum chuck to bring said successive ones of said plurality of preselected points selected to substantially cover the spacial region of the sample to be profiled into proximity with said thickness sensing head.
Claim 7
Dependent Claim
26 words
The invention of claim 1, wherein said second data providing means includes a processor operative in response to said first data to calculate said flatness profile.
Claim 8
Dependent Claim
174 words
A sample flatness station, comprising: means for removably holding a sample for rotation about an axis θ radians, and for translating the sample along orthogonal X and Z axes in response to θ, X, and Z control signals; a sensor having a thickness measuring head; means having memory compled to said thickness measuring head and to said holding means operative to product θ, X, and Z control signals that controllably rotate and translate said holding means to successively bring each of a plurality of preselected discrete points of said sample into said thickness measuring head selected to cover substantially the entire spatial extent of the sample and to store data representative of said thickness for each such point in said memory in a data table having preselected address locations that respectively correspond to the location of each such point of the sample; and means defining a two-dimensional (2-D) reference surface and responsive to said data in said data table for computing a selected 2-D flatness profile relative to said 2-D reference to said sample.
Claim 9
Dependent Claim
174 words
A sample flatness station, comprising: means for removably holding a sample for rotation about an axis θ radians, and for translating the sample along orthogonal X and Z axes in response to θ, X, and Z control signals; a sensor having a thickness measuring head; means having memory compled to said thickness measuring head and to said holding means operative to product θ, X, and Z control signals that controllably rotate and translate said holding means to successively bring each of a plurality of preselected discrete points of said sample into said thickness measuring head selected to cover substantially the entire spatial extent of the sample and to store data representative of said thickness for each such point in said memory in a data table having preselected address locations that respectively correspond to the location of each such point of the sample; and means defining a two-dimensional (2-D) reference surface and responsive to said data in said data table for computing a selected 2-D flatness profile relative to said 2-D reference to said sample.
Claim 10
Dependent Claim
64 words
The invention of claim 7, wherein said holding means includes a vacuum chuck fastened to a carriage, a X stepper motor operatively connected to said carriage for translating said carriage along said X axis, a Z actuator fastened to said carriage for translating said chuck along said Z axis, and a θ stepper motor fastened to said carriage for rotating said chuck θ radians.
Claim 11
Dependent Claim
12 words
The invention of claim 7, wherein said sensor is a capacitive sensor.
Claim 12
Dependent Claim
20 words
The invention of claim 9, wherein said thickness measuring head includes first and second capacitive probes in spaced apart relation.
Claim 13
Dependent Claim
25 words
The invention of claim 10, further including means coupled to one of said probes for moving it in relation to the other of said probes.
Claim 14
Dependent Claim
13 words
The invention of claim 7, wherein said means having memory includes a processor.
Claim 15
Dependent Claim
19 words
The invention of claim 7, further including means for delivering wafers to and removing wafers from said holding means.
Claim 16
Independent Claim
73 words
A method for obtaining a selected flatness profile of a sample comprising the steps of: measuring the thickness of the sample sequentially at a plurality of preselected points of the sample; storing the thickness measurements for each such point at a memory location whose address corresponds to the spatial location of each such point on the sample; computing the two-dimensional flatness of the sample at the corresponding address locations for all such points.
Claim 17
Independent Claim
73 words
A method for obtaining a selected flatness profile of a sample comprising the steps of: measuring the thickness of the sample sequentially at a plurality of preselected points of the sample; storing the thickness measurements for each such point at a memory location whose address corresponds to the spatial location of each such point on the sample; computing the two-dimensional flatness of the sample at the corresponding address locations for all such points.
Claim 18
Dependent Claim
78 words
The invention of claim 14, wherein said measuring step includes the steps of supporting the sample at a point remote from its center and successively measuring the thickness of a plurality of preselected discrete points selected at and around the center area of the sample; and supporting the sample at a point proximate its center and successively measuring the thickness of the sample at a plurality of preselected points selected to surround the center area of the sample.
Claim 19
Dependent Claim
30 words
The invention of claim 15, wherein said center area measuring step is accomplished by moving the center area of the sample in a predetermined pattern under a thickness sensing head.
Claim 20
Dependent Claim
13 words
The invention of claim 16, wherein said predetermined pattern includes a "zig-zag" pattern.
Claim 21
Dependent Claim
32 words
The invention of claim 15, wherein said surrounding measuring step is accomplished by moving the sample in a predetermined pattern surrounding the center area of the sample under a thickness sensing head.
Claim 22
Dependent Claim
12 words
The invention of claim 18, wherein said predetermined pattern includes concentric rings.
Claim 23
Dependent Claim
43 words
The invention of claim 14, wherein said storing step includes storing the thickness measurements for each such point in a data table, the corresponding address locations of which respectively correspond to individual ones of said plurality of preselected discrete points of said sample.
Claim 24
Dependent Claim
166 words
A wafer flatness station, comprising: means for removably holding a wafer for rotation about an axis θ radians, and for translating the wafer along orthogonal X and Z axes in response to θ, X, and Z control signals; a capacitive sensor having a capacitive thickness measuring head; means having memory coupled to produce θ, X, and Z control signals that controllably rotate and translate said holding means to successively bring each of a plurality of preselected discrete points of said wafer into said capacitive thickness measuring head selected to cover substantially the entire spatial extent of the wafer and to store data representative of said thickness for each such point in said memory in a data table having preselected address locations that respectively correspond to the location of each such point of the wafer; and means defining a two-dimensional (2-D) reference surface responsive to said data in said data table for computing a selected 2-D flatness profile relative to the 2-D reference surface for said wafer.
Claim 25
Dependent Claim
166 words
A wafer flatness station, comprising: means for removably holding a wafer for rotation about an axis θ radians, and for translating the wafer along orthogonal X and Z axes in response to θ, X, and Z control signals; a capacitive sensor having a capacitive thickness measuring head; means having memory coupled to produce θ, X, and Z control signals that controllably rotate and translate said holding means to successively bring each of a plurality of preselected discrete points of said wafer into said capacitive thickness measuring head selected to cover substantially the entire spatial extent of the wafer and to store data representative of said thickness for each such point in said memory in a data table having preselected address locations that respectively correspond to the location of each such point of the wafer; and means defining a two-dimensional (2-D) reference surface responsive to said data in said data table for computing a selected 2-D flatness profile relative to the 2-D reference surface for said wafer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-08-21 | 1993-02-20 | 1993-08-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-08-21 | 1997-02-20 | 1997-08-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-08-21 | 2001-02-20 | 2001-08-22 | $7700.00 | Window Closed / Lapsed |