Patent JPS6479421A successfully refreshed from Google Patents.
Patent US5749966A successfully refreshed from Google Patents.
US5749966A
Expired / Lapsed
US
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Process for depositing diamond and refractory materials
Assignee: Modular Process Technology Corp
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Filing: 1994-10-14
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Granted: 1998-05-12
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Expires: 2014-10-14
Abstract
Abstract An improved plasma enhanced chemical vapor deposition (CVD) reactor is provided for the synthesis of diamond and other high temperature materials such as boron nitride, boron carbide and ceramics containing oxides, nitrides, carbides and borides, or the like. An aspect of the present method enables a plasma to substrate distance to be optimized for a given surface. This has been found to enable a substantially uniform thin film coating of diamond or like material to be deposited over a substrate.
Inventors
- 👤 Steven C. Shates
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:31
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32192; H01J37/32211; H01J37/3222; C; C23; C23C; C23C16/00; C23C16/44; C23C16/50; C23C16/511; H01J2237/00; H01J2237/32; H01J2237/33; H01J2237/332; H01J2237/3321
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
104 words
A method for forming a thin film layer of material such as a diamond on a substrate surface, comprising the steps of: coupling a source of microwave radiation into a process chamber with an antenna; providing a reactant gas into said process chamber to be ignited by said microwave radiation to form said plasma; swingably rotating said antenna about a pivot axis with respect to said substrate surface to move said plasma to a desired locus of points on said substrate surface; moving said substrate in a vertical direction with respect to said antenna to optimize plasma to substrate contact over said substrate surface.
Claim 2
Independent Claim
104 words
A method for forming a thin film layer of material such as a diamond on a substrate surface, comprising the steps of: coupling a source of microwave radiation into a process chamber with an antenna; providing a reactant gas into said process chamber to be ignited by said microwave radiation to form said plasma; swingably rotating said antenna about a pivot axis with respect to said substrate surface to move said plasma to a desired locus of points on said substrate surface; moving said substrate in a vertical direction with respect to said antenna to optimize plasma to substrate contact over said substrate surface.
Claim 3
Dependent Claim
78 words
A method according to claim 1 wherein said step of swingably rotating said antenna about a pivot axis further includes the steps of: imaging said substrate surface to determine an optimal path for scanning said plasma across said substrate surface and producing output signals representative of said imaged surface; moving said antenna about a pivot axis with at least two degrees of freedom in response to said output signals to optimize plasma to substrate contact over said surface.
Claim 4
Dependent Claim
36 words
A method according to claim 2 further comprising the step of moving said substrate in a vertical direction with respect to said antenna in order to further optimize plasma to substrate contact on said substrate surface.
Claim 5
Independent Claim
72 words
A method for using a CVD plasma to form a uniform coating of a material such as a diamond over the surface of a substrate comprising; providing a stable resonant cavity for formation of a plasma; holding a substrate in said resonant cavity for coating a surface thereof; rotating a coupling antenna about a pivot axis with respect to said substrate for directing said plasma into optimal contact with said substrate surface.
Claim 6
Independent Claim
72 words
A method for using a CVD plasma to form a uniform coating of a material such as a diamond over the surface of a substrate comprising; providing a stable resonant cavity for formation of a plasma; holding a substrate in said resonant cavity for coating a surface thereof; rotating a coupling antenna about a pivot axis with respect to said substrate for directing said plasma into optimal contact with said substrate surface.
Claim 7
Dependent Claim
46 words
A method according to claim 4 further comprising the step of moving said substrate in a vertical direction with respect to said antenna for optimizing the contact between said plasma and said substrate surface for forming a uniform layer of said material over said substrate surface.
Claim 8
Dependent Claim
34 words
A method according to claim 4 further including the steps of providing beneath said substrate a transparent window; and irradiating said substrate through transparent window to form a nucleation layer on said substrate surface.
Claim 9
Independent Claim
93 words
A method for forming a thin film layer such as diamond or other material over a substrate surface comprising; providing a process chamber having walls, a top and a base for forming a stable resonant cavity for formation of a plasma; holding said substrate in a substrate holder disposed within said stable resonant cavity; forming said plasma by coupling microwave radiation into said stable resonant cavity with a coupling antenna; swiveling said coupling antenna about an axis of rotation to scan said plasma in an X-Y plane with respect to said substrate surface.
Claim 10
Independent Claim
93 words
A method for forming a thin film layer such as diamond or other material over a substrate surface comprising; providing a process chamber having walls, a top and a base for forming a stable resonant cavity for formation of a plasma; holding said substrate in a substrate holder disposed within said stable resonant cavity; forming said plasma by coupling microwave radiation into said stable resonant cavity with a coupling antenna; swiveling said coupling antenna about an axis of rotation to scan said plasma in an X-Y plane with respect to said substrate surface.
Claim 11
Dependent Claim
31 words
A method according to claim 7 further comprising the step of moving said substrate holder in a Z axis with respect to said X-Y plane for optimizing plasma to substrate contact.
Claim 12
Independent Claim
124 words
A method of using a plasma CVD process for depositing a layer of material such as a diamond on a substrate surface comprising: coupling a microwave source into a process chamber having a transparent base and a top and side walls for forming a stable resonant cavity; holding a substrate in a substrate holder disposed in said stable resonant cavity; irradiating said substrate through said base to form a nucleation layer on a surface of said substrate; swiveling said coupling antenna about an axis of rotation in an X-Y plane to direct said plasma to maximum coverage of said substrate surface area; moving said substrate in a Z axis relative to said X-Y plane to optimize plasma to substrate contact over said substrate surface.
Claim 13
Independent Claim
124 words
A method of using a plasma CVD process for depositing a layer of material such as a diamond on a substrate surface comprising: coupling a microwave source into a process chamber having a transparent base and a top and side walls for forming a stable resonant cavity; holding a substrate in a substrate holder disposed in said stable resonant cavity; irradiating said substrate through said base to form a nucleation layer on a surface of said substrate; swiveling said coupling antenna about an axis of rotation in an X-Y plane to direct said plasma to maximum coverage of said substrate surface area; moving said substrate in a Z axis relative to said X-Y plane to optimize plasma to substrate contact over said substrate surface.
Claim 14
Independent Claim
132 words
A method for forming a thin film layer such as diamond or other material over a substrate surface comprising: providing a process chamber having walls, a top and a base for forming a stable resonant cavity for formation of a plasma; holding said substrate in a substrate holder disposed within said stable resonant cavity; forming said plasma by coupling microwave radiation into said stable resonant cavity with a coupling antenna; providing in said base of said process chamber a window transparent to a source of synergistic stimulation such as heat energy having a temperature sufficient to create a nucleation layer on said substrate surface; and applying said source of synergistic stimulation through said window to form said nucleation layer for enhancing the formation of said thin film layer of said substrate surface.
Claim 15
Independent Claim
132 words
A method for forming a thin film layer such as diamond or other material over a substrate surface comprising: providing a process chamber having walls, a top and a base for forming a stable resonant cavity for formation of a plasma; holding said substrate in a substrate holder disposed within said stable resonant cavity; forming said plasma by coupling microwave radiation into said stable resonant cavity with a coupling antenna; providing in said base of said process chamber a window transparent to a source of synergistic stimulation such as heat energy having a temperature sufficient to create a nucleation layer on said substrate surface; and applying said source of synergistic stimulation through said window to form said nucleation layer for enhancing the formation of said thin film layer of said substrate surface.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2001-05-11 | 2001-11-10 | 2002-05-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-05-11 | 2005-11-10 | 2006-05-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-05-11 | 2009-11-10 | 2010-05-12 | $7700.00 | Window Closed / Lapsed |