US5745331A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electrostatic chuck with conformal insulator film
Assignee: Applied Materials Inc
•
Filing: 1995-01-31
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Granted: 1998-04-28
•
Expires: 2015-01-31
Abstract
Abstract An electrostatic chuck (20) for holding a substrate (75) comprises (i) a base (80) having an upper surface (95) with grooves (85) therein, the grooves (85) sized and distributed for holding coolant for cooling a substrate (75), and (ii) a substantially continuous insulator film (45) conformal to the grooves (85) on upper surface (95) of the base (80). The base (80) can be electrically conductive and capable of serving as the electrode (50) of the chuck (20), or the electrode (50) can be embedded in the insulator film (45). The insulator film (45) has a dielectric breakdown strength sufficiently high that when a substrate (75) placed on the chuck (20) and electrically biased with respect to the electrode (50), electrostatic charge accumulates in the substrate (75) and in the electrode (50) forming an electrostatic force that attracts and holds the substrate (75) to the chuck (20). Preferably the chuck (20) is fabricated using a pressure forming process, and more preferably using a pressure differential process.
Inventors
- 👤 Shamouil Shamouilian
- 👤 Sasson Somekh
- 👤 Hyman J. Levinstein
- 👤 Manoocher Birang
- 👤 Semyon Sherstinsky
- 👤 John F. Cameron
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 19:36
CPC Classifications
H; H10; H10P; H10P95/00; H10P72/00; H10P72/70; H10P72/72; H02; H02N; H02N13/00; H10P72/722
Claims Analysis
Total Claims: 47
Claim 1
Independent Claim
68 words
An electrostatic chuck for holding substrates, the chuck comprising: (a) a base having an upper surface with spaced apart first grooves therein; and (b) a substantially continuous electrical insulator film conformal to the first grooves on the upper surface of the base to provide second grooves sized and distributed for holding coolant for cooling the substrate held on the chuck, the insulator film comprising an electrode embedded therein.
Claim 2
Dependent Claim
68 words
An electrostatic chuck for holding substrates, the chuck comprising: (a) a base having an upper surface with spaced apart first grooves therein; and (b) a substantially continuous electrical insulator film conformal to the first grooves on the upper surface of the base to provide second grooves sized and distributed for holding coolant for cooling the substrate held on the chuck, the insulator film comprising an electrode embedded therein.
Claim 3
Dependent Claim
13 words
The electrostatic chuck of claim 1, wherein the first grooves comprise microscopic grooves.
Claim 4
Dependent Claim
52 words
The electrostatic chuck of claim 2, wherein the microscopic first grooves are sized sufficiently small that coolant held in the second grooves provides heat transfer rates from the substrate which are substantially equivalent to the heat transfer rates provided by the coolant between the upper surface of the base and the substrate.
Claim 5
Dependent Claim
32 words
The electrostatic chuck of claim 3, wherein the first grooves are distributed on the base so that coolant held in the second grooves can uniformly cool the substrate held on the chuck.
Claim 6
Dependent Claim
27 words
The electrostatic chuck of claim 1, wherein the first grooves in the base are at least about 5 μm wide and at least about 10 μm deep.
Claim 7
Dependent Claim
17 words
The electrostatic chuck of claim 1, wherein the insulator film comprises a plurality of electrodes embedded therein.
Claim 8
Dependent Claim
57 words
The electrostatic chuck of claim 1, wherein the electrode comprises at least one of the following: (a) a metal selected from the group consisting of copper, nickel, chromium, aluminum, tungsten, iron, and alloys thereof; (b) a segmented electrically conductive layer disposed between the second grooves; or (c) a continuous electrically conductive layer conformal to the first grooves.
Claim 9
Dependent Claim
115 words
The electrostatic chuck of claim 1, wherein the insulator film on the chuck comprises at least one of the following characteristics: (a) a dielectric breakdown strength sufficiently high that when a substrate placed on the chuck and electrically biased with respect to the electrode, electrostatic charge can accumulate in the substrate and in the electrode; (b) a dielectric breakdown strength of at least about 4 volts/micron; (c) a dielectric constant of at least about 2; (d) a thermal conductivity of at least about 0.10 Watts/m/K; or (e) a polymer selected from the group consisting of polyimides, polyketones, polysulfones, polycarbonates, polystyrenes, nylons, polyvinylchlorides, polypropylenes, polyetherketones, polyethersulfones, polyethylene terephthalate, fluoroethylene propylene copolymers, cellulose, triacetates, silicon and rubber.
Claim 10
Dependent Claim
116 words
The electrostatic chuck of claim 1, wherein the insulator film is capable of directly bonding to the base without use of an adhesive, and comprises at least one of the following characteristics: (a) a wettability at elevated temperatures of at least about 30 mJ/m 2 ; (b) a high wettability polymer selected from the group consisting of poly(carbonate), poly(ethylene terephtalate), poly(acrylonitrile), epoxy resins, poly(propylene oxide), poly(ethyl acrylate), and polystyrene; (c) a polymer having reactive surface functional groups capable of bonding to metals and ceramics, the functional groups comprising one or more of oxide, hydroxide, hydroperoxy, phenolics, carboxylic acids, carbonyl, and primary amines; or (d) a polymeric liquid precursor capable of bonding to a metal or ceramic.
Claim 11
Dependent Claim
36 words
The electrostatic chuck of claim 1, wherein the chuck further comprises an electrical connector that extends through the insulator film and is connected to the electrode so that a voltage can be applied to the electrode.
Claim 12
Dependent Claim
85 words
An electrostatic chuck for holding substrates, the chuck comprising: (a) a base having an upper surface with spaced apart grooves therein; and (b) a substantially continuous electrically insulative film having an electrode embedded therein, the electrically insulative film disposed upon and conformal to the grooves on the upper surface of the base, wherein the conformal insulative film with the electrode embedded therein provides (i) improved heat flow between the substrate and the base, and (ii) reduced electrical arcing of the embedded electrode in plasma processes.
Claim 13
Dependent Claim
85 words
An electrostatic chuck for holding substrates, the chuck comprising: (a) a base having an upper surface with spaced apart grooves therein; and (b) a substantially continuous electrically insulative film having an electrode embedded therein, the electrically insulative film disposed upon and conformal to the grooves on the upper surface of the base, wherein the conformal insulative film with the electrode embedded therein provides (i) improved heat flow between the substrate and the base, and (ii) reduced electrical arcing of the embedded electrode in plasma processes.
Claim 14
Dependent Claim
27 words
The electrostatic chuck of claim 11, wherein the electrode embedded in the electrically insulative film extends substantially continuously through the film and is conformal to the grooves.
Claim 15
Dependent Claim
26 words
The electrostatic chuck of claim 11, wherein the electrode embedded in the electrically insulative film is patterned with electrode segments disposed on ridges between the grooves.
Claim 16
Dependent Claim
43 words
The electrostatic chuck of claim 11, further comprising an adhesive layer between the electrically insulative film and the base for adhering the insulative film to the pedestal, the adhesive being selected from the group consisting of thermally activated adhesives and pressure sensitive adhesives.
Claim 17
Dependent Claim
22 words
The electrostatic chuck of claim 11, wherein the electrically insulative film has a dielectric breakdown strength of at least about 100 volts/mil.
Claim 18
Dependent Claim
21 words
The electrostatic chuck of claim 11, wherein the electrically insulative film has a thermal conductivity of at least about 0.10 Watts/m/K.
Claim 19
Dependent Claim
40 words
The electrostatic chuck of claim 11, wherein the electrically insulative film comprises a polymer selected from the group consisting of polyimides, polyketones, polysulfones, polycarbonates, polystyrenes, nylons, polyvinylchlorides, polypropylenes, polyetherketones, polyethersulfones, polyethylene terephthalate, fluoroethylene propylene copolymers, cellulose, triacetates, silicone and rubber.
Claim 20
Dependent Claim
28 words
The electrostatic chuck of claim 11, wherein the electrode comprises a metal selected from the group consisting of copper, nickel, chromium, aluminum, iron, and alloys and mixtures thereof.
Claim 21
Dependent Claim
18 words
The electrostatic chuck of claim 11, wherein the electrically insulative film is at least about 1 μm thick.
Claim 22
Dependent Claim
18 words
The electrostatic chuck of claim 19, wherein the electrically insulative film is less than about 100 μm thick.
Claim 23
Dependent Claim
30 words
The electrostatic chuck of claim 11, wherein the grooves in the upper surface of the base are at least about 5 μm wide and at least about 10 μm deep.
Claim 24
Dependent Claim
36 words
The electrostatic chuck of claim 11, wherein the chuck further comprises an electrical connector that extends through the insulative film and is connected to the electrode so that a voltage can be applied to the electrode.
Claim 25
Dependent Claim
61 words
An electrostatic chuck for holding substrates, the chuck comprising: (a) a base having an upper surface with spaced apart grooves therein; and (b) an electrically insulative film having a segmented electrode embedded therein, the electrically insulative film disposed upon and conformal to the grooves on the upper surface of the base, and the electrode segments disposed on ridges between the grooves.
Claim 26
Dependent Claim
61 words
An electrostatic chuck for holding substrates, the chuck comprising: (a) a base having an upper surface with spaced apart grooves therein; and (b) an electrically insulative film having a segmented electrode embedded therein, the electrically insulative film disposed upon and conformal to the grooves on the upper surface of the base, and the electrode segments disposed on ridges between the grooves.
Claim 27
Dependent Claim
36 words
The electrostatic chuck of claim 23, wherein the chuck further comprises an electrical connector that extends through the insulative film and is connected to the electrode so that a voltage can be applied to the electrode.
Claim 28
Dependent Claim
26 words
The electrostatic chuck of claim 23, wherein the grooves in the base are at least about 5 μm wide and at least about 10 μm deep.
Claim 29
Dependent Claim
12 words
The electrostatic chuck of claim 23, wherein the grooves comprise microscopic grooves.
Claim 30
Dependent Claim
42 words
The electrostatic chuck of claim 23, further comprising an adhesive layer between the insulative film and the base for adhering the insulative film to the pedestal, the adhesive being selected from the group consisting of thermally activated adhesives and pressure sensitive adhesives.
Claim 31
Dependent Claim
112 words
The electrostatic chuck of claim 23, wherein the insulative film comprises at least one of the following characteristics: (a) a dielectric breakdown strength sufficiently high that when a substrate placed on the chuck and electrically biased with respect to the electrode, electrostatic charge can accumulate in the substrate and in the electrode; (b) a dielectric breakdown strength of at least about 4 volts/micron; (c) a dielectric constant of at least about 2; (d) a thermal conductivity of at least about 0.10 Watts/m/K; or (e) a polymer selected from the group consisting of polyimides, polyketones, polysulfones, polycarbonates, polystyrenes, nylons, polyvinylchlorides, polypropylenes, polyetherketones, polyethersulfones, polyethylene terephthalate, fluoroethylene propylene copolymers, cellulose, triacetates, silicone and rubber.
Claim 32
Dependent Claim
111 words
The electrostatic chuck of claim 23, wherein the insulative film is capable of directly bonding to the base without use of an adhesive, and comprises at least one of the following characteristics: (a) a wettability at elevated temperatures of at least about 30 mJ/m 2 ; (b) a high wettability polymer selected from the group consisting of poly(carbonate), poly(ethylene terephtalate), poly(acrylonitrile), epoxy resins, poly(propylene oxide), poly(ethyl acrylate), and polystyrene; (c) a polymer having reactive surface functional groups capable of bonding to metals and ceramics, the functional groups comprising oxide, hydroxide, hydroperoxy, phenolics, carboxylic acids, carbonyl, and primary amines; or (d) a polymeric liquid precursor capable of bonding directly to the base.
Claim 33
Dependent Claim
56 words
An electrostatic chuck for holding substrates, the chuck comprising: (a) a base having an upper surface with spaced apart grooves therein; and (b) an electrically insulative film having a substantially continuous electrode embedded therein, the electrically insulative film and the continuous electrode disposed upon and conformal to the grooves on the upper surface of the base.
Claim 34
Dependent Claim
56 words
An electrostatic chuck for holding substrates, the chuck comprising: (a) a base having an upper surface with spaced apart grooves therein; and (b) an electrically insulative film having a substantially continuous electrode embedded therein, the electrically insulative film and the continuous electrode disposed upon and conformal to the grooves on the upper surface of the base.
Claim 35
Dependent Claim
112 words
The electrostatic chuck of claim 30, wherein the insulative film comprises at least one of the following characteristics: (a) a dielectric breakdown strength sufficiently high that when a substrate placed on the chuck and electrically biased with respect to the electrode, electrostatic charge can accumulate in the substrate and in the electrode; (b) a dielectric breakdown strength of at least about 4 volts/micron; (c) a dielectric constant of at least about 2; (d) a thermal conductivity of at least about 0.10 Watts/m/K; or (e) a polymer selected from the group consisting of polyimides, polyketones, polysulfones, polycarbonates, polystyrenes, nylons, polyvinylchlorides, polypropylenes, polyetherketones, polyethersulfones, polyethylene terephthalate, fluoroethylene propylene copolymers, cellulose, triacetates, silicone and rubber.
Claim 36
Dependent Claim
42 words
The electrostatic chuck of claim 30, further comprising an adhesive layer between the insulative film and the base for adhering the insulative film to the pedestal, the adhesive being selected from the group consisting of thermally activated adhesives and pressure sensitive adhesives.
Claim 37
Dependent Claim
12 words
The electrostatic chuck of claim 30, wherein the grooves comprise microscopic grooves.
Claim 38
Dependent Claim
26 words
The electrostatic chuck of claim 30, wherein the grooves in the base are at least about 5 μm wide and at least about 10 μm deep.
Claim 39
Dependent Claim
112 words
The electrostatic chuck of claim 30, wherein the insulative film is capable of directly bonding to the base without use of an adhesive, and comprises at least one of the following characteristics: (a) a wettability at elevated temperatures of at least about 30 mJ/m 2 ; (b) a high wettability polymer selected from the group consisting of poly(carbonate), poly(ethylene terephtalate), poly(acrylonitrile), epoxy resins, poly(propylene oxide), poly(ethyl acrylate), and polystyrene; (c) a polymer having reactive surface functional groups capable of bonding to metals and ceramics, the functional groups comprising oxide, hydroxide, hydroperoxy, phenolics, carboxylic acids, carbonyl, and primary amines; or (d) a polymeric liquid precursor capable of bonding to a metal or ceramic.
Claim 40
Dependent Claim
36 words
The electrostatic chuck of claim 30, wherein the chuck further comprises an electrical connector that extends through the insulative film and is connected to the electrode so that a voltage can be applied to the electrode.
Claim 41
Dependent Claim
61 words
An electrostatic chuck for holding substrates, the electrostatic chuck comprising: (a) a base having an upper surface with microscopic grooves therein; and (b) a substantially continuous electrical insulator film conformal to the microscopic grooves on the upper surface of the base, the insulator film having (i) a segmented or continuous electrically conductive layer embedded therein, and (ii) cooling grooves extending therethrough.
Claim 42
Dependent Claim
61 words
An electrostatic chuck for holding substrates, the electrostatic chuck comprising: (a) a base having an upper surface with microscopic grooves therein; and (b) a substantially continuous electrical insulator film conformal to the microscopic grooves on the upper surface of the base, the insulator film having (i) a segmented or continuous electrically conductive layer embedded therein, and (ii) cooling grooves extending therethrough.
Claim 43
Dependent Claim
27 words
The electrostatic chuck of claim 37, wherein the microscopic grooves in the base are at least about 5 μm wide and at least about 10 μm deep.
Claim 44
Dependent Claim
112 words
The electrostatic chuck of claim 37, wherein the insulator film comprises at least one of the following characteristics: (a) a dielectric breakdown strength sufficiently high that when a substrate placed on the chuck and electrically biased with respect to the electrode, electrostatic charge can accumulate in the substrate and in the electrode; (b) a dielectric breakdown strength of at least about 4 volts/micron; (c) a dielectric constant of at least about 2; (d) a thermal conductivity of at least about 0.10 Watts/m/K; or (e) a polymer selected from the group consisting of polyimides, polyketones, polysulfones, polycarbonates, polystyrenes, nylons, polyvinylchlorides, polypropylenes, polyetherketones, polyethersulfones, polyethylene terephthalate, fluoroethylene propylene copolymers, cellulose, triacetates, silicone and rubber.
Claim 45
Dependent Claim
42 words
The electrostatic chuck of claim 37, further comprising an adhesive layer between the insulator film and the base for adhering the insulator film to the base, the adhesive being selected from the group consisting of thermally activated adhesives and pressure sensitive adhesives.
Claim 46
Dependent Claim
116 words
The electrostatic chuck of claim 37, wherein the insulator film is capable of directly bonding to the base without use of an adhesive, and comprises at least one of the following characteristics: (a) a wettability at elevated temperatures of at least about 30 mJ/m 2 ; (b) a high wettability polymer selected from the group consisting of poly(carbonate), poly(ethylene terephtalate), poly(acrylonitrile), epoxy resins, poly(propylene oxide), poly(ethyl acrylate), and polystyrene; (c) a polymer having reactive surface functional groups capable of bonding to metals and ceramics, the functional groups comprising one or more of oxide, hydroxide, hydroperoxy, phenolics, carboxylic acids, carbonyl, and primary amines; or (d) a polymeric liquid precursor capable of bonding to a metal or ceramic.
Claim 47
Dependent Claim
40 words
The electrostatic chuck of claim 37, wherein the chuck further comprises an electrical connector that extends through the insulator film and is connected to the electrically conductive layer so that a voltage can be applied to the electrically conductive layer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-04-27 | 2001-10-27 | 2002-04-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-04-27 | 2005-10-27 | 2006-04-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-04-27 | 2009-10-27 | 2010-04-28 | $7700.00 | Window Closed / Lapsed |