US5742174A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Membrane for holding a probe tip in proper location
Assignee: Nidec SV Probe Pte Ltd
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Filing: 1995-11-03
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Granted: 1998-04-21
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Expires: 2015-11-03
Abstract
Abstract A method and device for accurately mounting a probe in a probe card and for maintaining correct location of the probe tip as the probe is used for electronic testing of an IC pad. A membrane having a slot is attached to a support structure of a probe card. The probe tip is inserted into the slot and the probe is affixed to the membrane at the edges of the slot using silicon rubber. The probe is then mounted in the support structure which has a groove for receiving the probe. A distal end of the probe is bonded to the walls of the groove so that the probe is free to move vertically in the groove, but constrained from moving laterally to prevent side-buckling. The membrane and silicon rubber hold the probe tip in proper location during thermal treating of the probe card assembly. Once mounted in the probe card by this method, the probe and probe tip will maintain proper location as they are used for electronic testing of an IC pad. During testing, the probe tip and attached membrane are deflected from their initial position by force of contact with the IC pad. Upon completion of the test, the contact force is removed from the probe tip. The elasticity of the membrane causes the membrane and the attached probe tip to return to their initial position, ensuring that the probe tip is in the proper location for the next test.
Inventors
- 👤 January Kister
- 👤 Jerzy Lobacz
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 15:49
CPC Classifications
G; G01; G01R; G01R1/00; G01R1/02; G01R1/06; G01R1/067; G01R1/073; G01R1/07307; G01R1/07342; G01R1/06711; G01R1/06733
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
131 words
A device for electronic testing, the device comprising: a) a cantilever probe having an arm, a tip, and a distal end opposite the tip; b) a support structure for supporting the probe, the probe being attached to the support structure at the distal end; c) a membrane for positioning the tip, the membrane being attached to the support structure and the membrane having a slot through which the tip is inserted; and d) a means for attaching the probe to the membrane such that the tip, the arm, and the membrane move from an initial position to a deflected position when an overdrive is applied to the tip and such that the tip, the arm, and the membrane return to the initial position when the overdrive is removed from the tip.
Claim 2
Independent Claim
131 words
A device for electronic testing, the device comprising: a) a cantilever probe having an arm, a tip, and a distal end opposite the tip; b) a support structure for supporting the probe, the probe being attached to the support structure at the distal end; c) a membrane for positioning the tip, the membrane being attached to the support structure and the membrane having a slot through which the tip is inserted; and d) a means for attaching the probe to the membrane such that the tip, the arm, and the membrane move from an initial position to a deflected position when an overdrive is applied to the tip and such that the tip, the arm, and the membrane return to the initial position when the overdrive is removed from the tip.
Claim 3
Dependent Claim
19 words
The device of claim 1, wherein the means for attaching the probe to the membrane comprises a silicon rubber.
Claim 4
Dependent Claim
25 words
The device of claim 1, wherein the probe has a knee section and wherein the probe is attached to the membrane at the knee section.
Claim 5
Dependent Claim
19 words
The device of claim 1, wherein the probe is attached to the membrane at an edge of the slot.
Claim 6
Dependent Claim
11 words
The device of claim 1, wherein the membrane comprises a polyimide.
Claim 7
Dependent Claim
11 words
The device of claim 1, wherein the membrane comprises a ceramic.
Claim 8
Dependent Claim
19 words
The device of claim 1, wherein the membrane has a thickness in the range of 10 to 50 μm.
Claim 9
Dependent Claim
45 words
The device of claim 1, wherein the support structure has a groove for receiving the probe and wherein the probe is mounted in the groove such that the probe is free to move vertically in the groove and constrained from moving laterally in the groove.
Claim 10
Dependent Claim
29 words
The device of claim 1, wherein the support structure has a flat top surface for supporting the probe and wherein the probe is attached to the flat top surface.
Claim 11
Dependent Claim
12 words
The device of claim 1, wherein the support structure comprises a ceramic.
Claim 12
Independent Claim
68 words
A method for positioning a cantilever probe having an arm, a tip, and a distal end opposite the tip, the method comprising the following steps: a) attaching a membrane to a support structure; b) cutting in the membrane a slot for receiving the tip; c) inserting the tip through the slot; d) attaching the probe to the membrane; and e) attaching the distal end to the support structure.
Claim 13
Independent Claim
68 words
A method for positioning a cantilever probe having an arm, a tip, and a distal end opposite the tip, the method comprising the following steps: a) attaching a membrane to a support structure; b) cutting in the membrane a slot for receiving the tip; c) inserting the tip through the slot; d) attaching the probe to the membrane; and e) attaching the distal end to the support structure.
Claim 14
Dependent Claim
20 words
The method of claim 11, wherein the probe is attached to the membrane at a knee section of the probe.
Claim 15
Dependent Claim
16 words
The method of claim 11, wherein the probe is attached to the membrane with silicon rubber.
Claim 16
Dependent Claim
19 words
The method of claim 11, wherein the probe is attached to the membrane at an edge of the slot.
Claim 17
Dependent Claim
11 words
The method of claim 11, wherein the membrane comprises a polyimide.
Claim 18
Dependent Claim
11 words
The method of claim 11, wherein the membrane comprises a ceramic.
Claim 19
Dependent Claim
19 words
The method of claim 11, wherein the membrane has a thickness in the range of 10 to 50 μm.
Claim 20
Dependent Claim
56 words
The method of claim 11, wherein the support structure has a groove for receiving the probe and wherein the step of attaching the distal end to the support structure comprises mounting the probe in the groove such that the probe is free to move vertically in the groove and constrained from moving laterally in the groove.
Claim 21
Dependent Claim
26 words
The method of claim 11, wherein the support structure has a flat top surface and wherein the distal end is attached to the flat top surface.
Claim 22
Dependent Claim
12 words
The method of claim 11, wherein the support structure comprises a ceramic.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-04-20 | 2001-10-20 | 2002-04-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-04-20 | 2005-10-20 | 2006-04-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-04-20 | 2009-10-20 | 2010-04-21 | $7700.00 | Window Closed / Lapsed |