US5736455A
Expired / Lapsed
US
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Method for passivating the sidewalls of a tungsten word line
Assignee: Micron Technology Inc
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Filing: 1995-12-22
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Granted: 1998-04-07
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Expires: 2015-12-22
Abstract
Abstract This invention embodies a process for passivating the edges of a tungsten metal layer within a word line stack. After the word line stack is patterned (i.e., formed by masking and etching the stack of globally-deposited layers) as shown in FIG. 1, a conformal silicon film is blanket deposited. Deposition of the silicon film may be accomplished by any available technique, such as chemical vapor deposition or plasma-enhanced chemical vapor deposition. The wafer is then heated so that the tungsten in contact with the silicon film is converted to tungsten silicide. In a preferred embodiment of the invention, only a portion of the silicon film is allowed to react with the edge of the tungsten layer. The remainder of the silicon film is converted to silicon dioxide by subjecting the wafer O 2 in a furnace or rapid thermal processing chamber. Alternatively, the remainder of the silicon film may be converted to silicon dioxide by subjecting the wafer to O 2 or O 3 in a plasma reactor. In an alternative but equivalent embodiment of the process, the tungsten metal is converted to tungsten silicide and the remainder of the silicon film is converted to silicon dioxide using a single piece of equipment. This is done by first heating the wafer in a nitrogen-containing ambiance, and then ramping the temperature upward and replacing the nitrogen-containing ambiance with an oxidizing ambiance.
Inventors
- 👤 Ravi Iyer
- 👤 Pai Hung Pan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 19:31
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/064; H10W20/066; H10D; H10D64/00; H10D64/01; H10D64/013; H10D64/01302; H10D64/01304; H10D64/01306; H10D64/01308; H10D64/01312
Claims Analysis
Total Claims: 30
Claim 1
Independent Claim
122 words
A method for passivating the edges of a metal layer within a word line stack, said stack having been fabricated on a silicon substrate on which had been formed a gate dielectric layer, said stack having a conductively-doped polycrystalline silicon layer overlying and in contact with the gate dielectric layer, and the metal layer overlying and in electrical contact with the polycrystalline silicon layer, and a dielectric capping layer overlying the metal layer, said stack having sidewalls formed from an edge of each of the constituent layers, said method comprising the steps of: (a) depositing a silicon film on the sidewalls of the word line stack; and (b) converting metal atoms on the edge of the metal layer to a metal silicide.
Claim 2
Independent Claim
122 words
A method for passivating the edges of a metal layer within a word line stack, said stack having been fabricated on a silicon substrate on which had been formed a gate dielectric layer, said stack having a conductively-doped polycrystalline silicon layer overlying and in contact with the gate dielectric layer, and the metal layer overlying and in electrical contact with the polycrystalline silicon layer, and a dielectric capping layer overlying the metal layer, said stack having sidewalls formed from an edge of each of the constituent layers, said method comprising the steps of: (a) depositing a silicon film on the sidewalls of the word line stack; and (b) converting metal atoms on the edge of the metal layer to a metal silicide.
Claim 3
Dependent Claim
11 words
The method of claim 1, wherein said silicon film is polycrystalline.
Claim 4
Dependent Claim
11 words
The method of claim 1, wherein said silicon film is amorphous.
Claim 5
Dependent Claim
28 words
The method of claim 1, wherein said metal is a refractory metal selected from the group consisting of tungsten, titanium, platinum, paladium, cobalt, molybdenum, nickel, rhodium and iridium.
Claim 6
Dependent Claim
35 words
The method of claim 1, wherein said metal is an alloy comprising at least one of the refractory metals selected from the group consisting of tungsten, titanium, platinum, paladium, cobalt, molybdenum, nickel, rhodium and iridium.
Claim 7
Dependent Claim
36 words
The method of claim 1, wherein the step of converting metal atoms on the edges of the metal layer to metal silicide is accomplished by subjecting the film-covered stack to elevated temperature in an inert ambiance.
Claim 8
Dependent Claim
25 words
The method of claim 6, wherein the inert ambiance comprises at least one gas selected from the group consisting of diatomic nitrogen, argon, and helium.
Claim 9
Dependent Claim
22 words
The method of claim 1, wherein said gate dielectric layer is thermally-grown silicon dioxide and the capping layer is predominantly silicon dioxide.
Claim 10
Dependent Claim
25 words
The method of claim 1, which further comprises the step of converting a remaining portion of the polycrystalline silicon film to a silicon dioxide film.
Claim 11
Dependent Claim
43 words
The method of claim 9, wherein the step of converting a remaining portion to a silicon dioxide film is accomplished by subjecting the film-covered stack to elevated temperature within a range of 700° to 1,000° C. in the presence of an oxidizing ambiance.
Claim 12
Dependent Claim
28 words
The method of claim 7, which further comprises the step of removing the silicon dioxide film which was formed from silicon atoms in the deposited polycrystalline silicon film.
Claim 13
Independent Claim
143 words
A method of fabricating a passivated word line stack on a silicon substrate, said method comprising the steps of: (a) oxidizing the substrate to form a gate dielectric layer on an upper surface of the substrate; (b) depositing a silicon layer on the gate dielectric layer; (c) forming a barrier layer on the polycrystalline silicon layer, said barrier layer being impermeable to both silicon and metal atoms; (d) depositing a metal layer on the barrier layer; (e) depositing a dielectric capping layer on the metal layer; (f) patterning the deposited layers and barrier layer to form an unpassivated word line stack, said stack having sidewalls formed from an edge of each of the constituent layers; (g) depositing a polycrystalline silicon film on the sidewalls of the stack; and (h) converting metal atoms on the edge of the metal layer to a metal silicide.
Claim 14
Independent Claim
143 words
A method of fabricating a passivated word line stack on a silicon substrate, said method comprising the steps of: (a) oxidizing the substrate to form a gate dielectric layer on an upper surface of the substrate; (b) depositing a silicon layer on the gate dielectric layer; (c) forming a barrier layer on the polycrystalline silicon layer, said barrier layer being impermeable to both silicon and metal atoms; (d) depositing a metal layer on the barrier layer; (e) depositing a dielectric capping layer on the metal layer; (f) patterning the deposited layers and barrier layer to form an unpassivated word line stack, said stack having sidewalls formed from an edge of each of the constituent layers; (g) depositing a polycrystalline silicon film on the sidewalls of the stack; and (h) converting metal atoms on the edge of the metal layer to a metal silicide.
Claim 15
Dependent Claim
11 words
The method of claim 12, wherein said silicon film is polycrystalline.
Claim 16
Dependent Claim
11 words
The method of claim 12, wherein said silicon film is amorphous.
Claim 17
Dependent Claim
28 words
The method of claim 12, wherein said metal is a refractory metal selected from the group consisting of tungsten, titanium, platinum, paladium, cobalt, molybdenum, nickel, rhodium and iridium.
Claim 18
Dependent Claim
35 words
The method of claim 12, wherein said metal is an alloy comprising at least one of the refractory metals selected from the group consisting of tungsten, titanium, platinum, paladium, cobalt, molybdenum, nickel, rhodium and iridium.
Claim 19
Dependent Claim
36 words
The method of claim 12, wherein the step of converting metal atoms on the edges of the metal layer to metal silicide is accomplished by subjecting the film-covered stack to elevated temperature in an inert ambiance.
Claim 20
Dependent Claim
22 words
The method of claim 12, wherein said gate dielectric layer is thermally-grown silicon dioxide and the capping layer is predominantly silicon dioxide.
Claim 21
Dependent Claim
25 words
The method of claim 12, which further comprises the step of converting a remaining portion of the polycrystalline silicon film to a silicon dioxide film.
Claim 22
Dependent Claim
27 words
The method of claim 19, which further comprises the step of removing the silicon dioxide layer which was formed from silicon atoms in the deposited polycrystalline film.
Claim 23
Dependent Claim
43 words
The method of claim 19, wherein the step of converting a remaining portion to a silicon dioxide film is accomplished by subjecting the silicon-film-covered stack to elevated temperature within a range of 700° to 1,000° C. in the presence of an oxidizing ambiance.
Claim 24
Dependent Claim
23 words
The method of claim 12, wherein the step of patterning is accomplished using a single masking step and a predominantly anisotropic etch step.
Claim 25
Independent Claim
55 words
A method of passivating an exposed edge of a metal layer sandwiched between an overlying silicon dioxide capping layer and an underlying barrier layer, said method comprising the steps of: (a) covering the exposed edge with deposited silicon atoms; and (b) converting metal atoms on the edge of the metal layer to a metal silicide.
Claim 26
Independent Claim
55 words
A method of passivating an exposed edge of a metal layer sandwiched between an overlying silicon dioxide capping layer and an underlying barrier layer, said method comprising the steps of: (a) covering the exposed edge with deposited silicon atoms; and (b) converting metal atoms on the edge of the metal layer to a metal silicide.
Claim 27
Dependent Claim
30 words
The method of claim 23, wherein said metal layer comprises tungsten, said capping layer comprises silicon dioxide, and said barrier layer is impermeable to both silicon atoms and tungsten atoms.
Claim 28
Dependent Claim
36 words
The method of claim 23, wherein the step of converting metal atoms on the edges of the metal layer to metal silicide is accomplished by subjecting the film-covered stack to elevated temperature in an inert ambiance.
Claim 29
Dependent Claim
22 words
The method of claim 23, which further comprises the step of converting a portion of the deposited silicon atoms to silicon dioxide.
Claim 30
Dependent Claim
21 words
The method of claim 26, which further comprises the step of removing the silicon dioxide formed from the deposited silicon atoms.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2001-04-06 | 2001-10-06 | 2002-04-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-04-06 | 2005-10-06 | 2006-04-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-04-06 | 2009-10-06 | 2010-04-07 | $7700.00 | Window Closed / Lapsed |