Low-current probe card with reduced triboelectric current generating cables

Claim 2

A probe card for probing a test device comprising: (a) a dielectric board forming an opening; (b) a plurality of probing devices for probing a corresponding plurality of probing sites on said test device, each probing device including a dielectric substrate having first and second sides, an elongate conductive path on said first side and an elongate probing element connected to one end of said elongate conductive path so as to extend in a cantilevered manner beyond said substrate, said probing devices being edge-mounted in radial arrangement about said opening so that said probing elements terminate below said opening in a pattern suitable for probing said sites; and (c) a plurality of cables for connecting each probing device to a corresponding channel of a test instrument, each cable including an inner conductor, an inner dielectric and an outer conductor, each inner conductor being electrically connected to a corresponding one of said conductive paths, each cable further including an inner layer of material between said inner dielectric and said outer conductor of suitable composition for reducing triboelectric current generation between said inner dielectric and said outer conductor to less than that which would occur were said inner dielectric and said outer conductor to directly adjoin each other.

Claim 3

The probe card of claim 1 wherein each probing device includes a conductive surface on said second side, each outer conductor is electrically connected to a corresponding one of said conductive surfaces, and said probing devices are arranged so that said conductive surfaces alternate with said conductive paths in a circumferential sequence.

Claim 4

The probe card of claim 2 wherein said dielectric board includes a plurality of inner conductive areas surrounding said opening in circumferentially spaced relationship to each other, and each conductive surface is electrically connected to a corresponding one of said inner conductive areas.

Claim 5

The probe card of claim 1 further including a conductive cover positioned over said dielectric board.

Claim 6

The probe card of claim 4 wherein said dielectric board includes an outer conductive area surrounding a plurality of inner conductive areas in spaced relationship thereto, and said cover includes a lower edge along which said cover is connected electrically to said outer conductive area.

Claim 7

The probe card of claim 4 wherein each cable includes a lead-in portion leading to said board, said lead-in portion including a shielding conductor surrounding said outer conductor in radially spaced relationship thereto, said shielding conductors being connected electrically to said cover.

Claim 8

The probe card of claim 6 further including a cable connector through which said cables pass directly into a shielded enclosure formed by said cover, said cable connector providing an electrical connection path interconnecting said shielding conductors and said cover.

Claim 9

The probe card of claim 1 wherein said dielectric board includes a plurality of inner conductive areas surrounding said opening in circumferentially spaced relationship to each other, each probing device being mounted so that each elongate conductive path is positioned above a corresponding one of said inner conductive areas, each outer conductor being directly connected to a corresponding one of said inner conductive areas.

Claim 10

The probe card of claim 1 wherein said dielectric board is principally composed of glass-epoxy material.

Claim 11

A probe card for probing a test device comprising: (a) a dielectric board forming an opening; (b) a plurality of probing devices for probing a corresponding plurality of probing sites on said test device, each probing device including a dielectric substrate having first and second sides, an elongate conductive path on said first side and an elongate probing element connected to one end of said elongate conductive path so as to extend in a cantilevered manner beyond said substrate, said probing devices being edge-mounted in radial arrangement about said opening so that said probing elements terminate below said opening in a pattern suitable for probing said sites; (c) a plurality of cables for connecting each probing device to a corresponding channel of a test instrument, each cable including an inner conductor, an inner dielectric and an outer conductor, each inner conductor being electrically connected to a corresponding one of said conductive paths, each cable further including an inner layer of material between said inner dielectric and said outer conductor of suitable composition for reducing triboelectric current generation between said inner dielectric and said outer conductor to less than that which would occur were said inner dielectric and said outer conductor to directly adjoin each other; (d) a conductive cover positioned over said dielectric board; and (e) said dielectric board includes an outer conductive area surrounding a plurality of inner conductive areas in spaced relationship thereto, and said cover includes a lower edge along which said cover is connected electrically to said outer conductive area.

Claim 12

A probe card for probing a test device comprising: (a) a dielectric board forming an opening; (b) a plurality of probing devices for probing a corresponding plurality of probing sites on said test device, each probing device including a dielectric substrate having first and second sides, an elongate conductive path on said first side and an elongate probing element connected to one end of said elongate conductive path so as to extend in a cantilevered manner beyond said substrate, said probing devices being edge-mounted in radial arrangement about said opening so that said probing elements terminate below said opening in a pattern suitable for probing said sites; (c) a plurality of cables for connecting each probing device to a corresponding channel of a test instrument, each cable including an inner conductor, an inner dielectric and an outer conductor, each inner conductor being electrically connected to a corresponding one of said conductive paths, each cable further including an inner layer of material between said inner dielectric and said outer conductor of suitable composition for reducing triboelectric current generation between said inner dielectric and said outer conductor to less than that which would occur were said inner dielectric and said outer conductor to directly adjoin each other; (d) a conductive cover positioned over said dielectric board; and (e) said dielectric board includes an outer conductive area surrounding a plurality of inner conductive areas in spaced relationship thereto, and said cover includes a lower edge along which said cover is connected electrically to said outer conductive area.

Claim 13

A probe card for probing a test device comprising: (a) a dielectric board forming an opening; (b) a plurality of probing devices for probing a corresponding plurality of probing sites on said test device, each probing device including a dielectric substrate having first and second sides, an elongate conductive path on said first side and an elongate probing element connected to one end of said elongate conductive path so as to extend in a cantilevered manner beyond said substrate, said probing devices being edge-mounted in radial arrangement about said opening so that said probing elements terminate below said opening in a pattern suitable for probing said sites; (c) a plurality of cables for connecting each probing device to a corresponding channel of a test instrument, each cable including an inner conductor, an inner dielectric and an outer conductor, each inner conductor being electrically connected to a corresponding one of said conductive paths, each cable further including an inner layer of material between said inner dielectric and said outer conductor of suitable composition for reducing triboelectric current generation between said inner dielectric and said outer conductor to less than that which would occur were said inner dielectric and said outer conductor to directly adjoin each other; (d) a conductive cover positioned over said dielectric board; and (e) each cable includes a lead-in portion leading to said board, said lead-in portion including a shielding conductor surrounding said outer conductor in radially spaced relationship thereto, said shielding conductors being connected electrically to said cover.

Claim 14

A probe card for probing a test device comprising: (a) a dielectric board forming an opening; (b) a plurality of probing devices for probing a corresponding plurality of probing sites on said test device, each probing device including a dielectric substrate having first and second sides, an elongate conductive path on said first side and an elongate probing element connected to one end of said elongate conductive path so as to extend in a cantilevered manner beyond said substrate, said probing devices being edge-mounted in radial arrangement about said opening so that said probing elements terminate below said opening in a pattern suitable for probing said sites; (c) a plurality of cables for connecting each probing device to a corresponding channel of a test instrument, each cable including an inner conductor, an inner dielectric and an outer conductor, each inner conductor being electrically connected to a corresponding one of said conductive paths, each cable further including an inner layer of material between said inner dielectric and said outer conductor of suitable composition for reducing triboelectric current generation between said inner dielectric and said outer conductor to less than that which would occur were said inner dielectric and said outer conductor to directly adjoin each other; (d) a conductive cover positioned over said dielectric board; and (e) each cable includes a lead-in portion leading to said board, said lead-in portion including a shielding conductor surrounding said outer conductor in radially spaced relationship thereto, said shielding conductors being connected electrically to said cover.

Claim 15

The probe card of claim 11, further including a cable connector through which said cables pass directly into a shielded enclosure formed by said cover, said cable connector providing an electrical connection path interconnecting said shielding conductors and said cover.

Claim 16

A probe card for probing a test device comprising: (a) a dielectric board forming an opening; (b) a plurality of probing devices for probing a corresponding plurality of probing sites on said test device, each probing device including a dielectric substrate having first and second sides, an elongate conductive path on said first side and an elongate probing element connected to one end of said elongate conductive path so as to extend in a cantilevered manner beyond said substrate, said probing devices being edge-mounted in radial arrangement about said opening so that said probing elements terminate below said opening in a pattern suitable for probing said sites; (c) a plurality of cables for connecting each probing device to a corresponding channel of a test instrument, each cable including an inner conductor, an inner dielectric and an outer conductor, each inner conductor being electrically connected to a corresponding one of said conductive paths, each cable further including an inner layer of material between said inner dielectric and said outer conductor of suitable composition for reducing triboelectric current generation between said inner dielectric and said outer conductor to less than that which would occur were said inner dielectric and said outer conductor to directly adjoin each other; and (d) said dielectric board includes a plurality of inner conductive areas surrounding said opening in circumferentially spaced relationship to each other, each probing device being mounted so that each elongate conductive path is positioned above a corresponding one of said inner conductive areas, each outer conductor being directly connected to a corresponding one of said inner conductive areas.

Claim 17

A probe card for probing a test device comprising: (a) a dielectric board forming an opening; (b) a plurality of probing devices for probing a corresponding plurality of probing sites on said test device, each probing device including a dielectric substrate having first and second sides, an elongate conductive path on said first side and an elongate probing element connected to one end of said elongate conductive path so as to extend in a cantilevered manner beyond said substrate, said probing devices being edge-mounted in radial arrangement about said opening so that said probing elements terminate below said opening in a pattern suitable for probing said sites; (c) a plurality of cables for connecting each probing device to a corresponding channel of a test instrument, each cable including an inner conductor, an inner dielectric and an outer conductor, each inner conductor being electrically connected to a corresponding one of said conductive paths, each cable further including an inner layer of material between said inner dielectric and said outer conductor of suitable composition for reducing triboelectric current generation between said inner dielectric and said outer conductor to less than that which would occur were said inner dielectric and said outer conductor to directly adjoin each other; and (d) said dielectric board includes a plurality of inner conductive areas surrounding said opening in circumferentially spaced relationship to each other, each probing device being mounted so that each elongate conductive path is positioned above a corresponding one of said inner conductive areas, each outer conductor being directly connected to a corresponding one of said inner conductive areas.