US5726548A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Moving stage apparatus and system using the same
Assignee: Canon Inc
•
Filing: 1996-01-29
•
Granted: 1998-03-10
•
Expires: 2016-01-29
Abstract
Abstract A movable stage apparatus and an exposure system including a moving stage apparatus, includes a movable member capable of being driven by a driving mechanism, and first and second sets of fluid bearings. The first set of fluid bearings supports the movable member. The second set of fluid bearings is connected to a plurality of driving elements. The plurality of driving elements are connected to the movable member and are displaceable in a direction in which the movable member is supported by the first set of fluid bearings. The second set of fluid bearings supports the movable member. Also provided is a controller for applying a voltage to the plurality of driving elements so as to compensate for the postutre of the movable member when the posture of the movable member changes in response to being driven by the driving mechanism. The system further includes an exposure apparatus for exposing an object to be exposed which is mounted on the movable member.
Inventors
- 👤 Shinichi Chiba
- 👤 Kotaro Akutsu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 14:43
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; G03F7/70716
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
95 words
A stage apparatus comprising: a movable member capable of being moved along a reference surface; first fluid bearing means, connected to said movable member, opposed to the reference surface for supporting said movable member on the reference surface; second fluid bearing means, different from the first fluid bearing means, opposed to the reference surface and connected to said movable member; a driving element, fixed to said second fluid bearing means, displacing the second fluid bearing means in a direction perpendicular to the reference surface; and a controller for controlling the displacement of said driving element.
Claim 2
Dependent Claim
95 words
A stage apparatus comprising: a movable member capable of being moved along a reference surface; first fluid bearing means, connected to said movable member, opposed to the reference surface for supporting said movable member on the reference surface; second fluid bearing means, different from the first fluid bearing means, opposed to the reference surface and connected to said movable member; a driving element, fixed to said second fluid bearing means, displacing the second fluid bearing means in a direction perpendicular to the reference surface; and a controller for controlling the displacement of said driving element.
Claim 3
Dependent Claim
23 words
An apparatus according to claim 1, wherein said controller controls the displaceable means based on a driving signal for driving the movable member.
Claim 4
Dependent Claim
39 words
An apparatus according to claim 1, further comprising an acceleration detector for detecting the acceleration of said movable member in a moving direction, wherein said controller controls the displaceable means based on a detection output of said acceleration detector.
Claim 5
Dependent Claim
43 words
An apparatus according to claim 1, further comprising a displacement detector for detecting the displacement of said movable member in a direction perpendicular to the reference surface, wherein said controller controls the displaceable means based on a detection output of said displacement detector.
Claim 6
Dependent Claim
20 words
An apparatus according to claim 1, further comprising a linear motor for moving the movable stage along the reference surface.
Claim 7
Dependent Claim
21 words
An apparatus according to claim 1, wherein said first fluid bearing means supports substantially the entire weight of said movable member.
Claim 8
Dependent Claim
14 words
An apparatus according to claim 1, wherein said displaceable means comprises a piezoelectric element.
Claim 9
Dependent Claim
21 words
An apparatus according to claim 1, further comprising exposure means for exposing a substrate mounted on the movable member with radiation.
Claim 10
Dependent Claim
23 words
An apparatus according to claim 8, wherein the substrate is a wafer on which the pattern of a mask is to be transferred.
References Cited (Backward Citations)
US4080009A
Cited
US4425537A
Cited
US4977361A
Cited
US4442388A
Cited
US4687980A
Cited
JPS5825637A
Cited
US4496239A
Cited
US4563820A
Cited
US4766465A
Cited
US4506205A
Cited
US4485339A
Cited
US4507597A
Cited
US4506204A
Cited
US4562392A
Cited
US4748477A
Cited
US4749867A
Cited
US4654571A
Cited
US4742286A
Cited
US4744675A
Cited
JPS63101515A
Cited
US4993696A
Cited
US4814680A
Cited
US4928030A
Cited
US5043621A
Cited
US5184055A
Cited
US5153494A
Cited
JPH0427218A
Cited
US5382095A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-03-09 | 2001-09-08 | 2002-03-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-03-09 | 2005-09-08 | 2006-03-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-03-09 | 2009-09-08 | 2010-03-10 | $7700.00 | Window Closed / Lapsed |