US4425537A
Expired / Lapsed
US
⏱️ 0.0 years remaining
X-Y Addressable workpiece positioner and mask aligner using same
Assignee: Axcelis Technologies Inc
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Filing: 1980-10-20
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Granted: 1984-01-10
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Expires: 2000-10-20
Abstract
Abstract In an X-Y addressable workpiece positioner the workpiece to be positioned, such as a semiconductive wafer to be aligned with a mask image, is coupled to move with a work stage moveable in the X-Y direction and having a two-dimensional array of positioning indicia affixed thereto for movement therewith. An enlarged image of a portion of the positioning array is projected onto a relatively stationary sensor stage to derive an output determinative of the X and Y coordinates of the positioning array relative to the position of the sensor. The sensed X and Y coordinates of the positioning array are compared with the X and Y coordinates of a reference positioning address to derive an error output. The work stage is moved in response to the error output for causing the workpiece to be positioned to the reference address. In a preferred embodiment of a mask aligner, the approximately stationary sensing stage is moved relative to the enlarged image of the positioning array for interpolating the X and Y coordinates of the sensed address. A viewing system is arranged for permitting the operator to superimpose the image of a pattern on the reference addressed position of the semiconductive wafer with a mask image. The sensing stage is moved by the operator to obtain precise registration of the images, thereby zeroing the reference position address to the interpolated value. The machine then sequentially steps the interpolated (zeroed) reference position address by predetermined increments, related to the size mask pattern to be projected onto the wafer, to cause the wafer to be sequentially exposed to the mask pattern in different regions thereof.
Inventors
- 👤 Edward H. Phillips
- 👤 Karl-Heinz Johannsmeier
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 18:08
CPC Classifications
G; G06; G06T; G06T3/00; G06T3/14; G03; G03F; G03F9/00; G03F9/70
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
182 words
A servo control system comprising: stage means movable along orthogonal axes for positioning a workpiece relative to a work apparatus; first and second drive means respectively responsive to first and second drive signals and operative to drive said stage means along said axes; position detector means for monitoring the position of said stage means relative to the work apparatus and including a reference substrate carried by said stage means and having orthogonal dimension position related indicia disposed thereupon, and means for sensing said indicia and developing first and second actual position signals corresponding to the positioning of said substrate along said axes; input means for generating first and second desired position signals corresponding to positions along said axes to which said stage means is to be driven; and first and second position control means for respectively comparing said first and second desired position signals to said first and second actual position signals and for developing said first and second drive signals for application to said first and second drive means respectively to cause said workpiece to be driven to a desired position.
Claim 2
Dependent Claim
182 words
A servo control system comprising: stage means movable along orthogonal axes for positioning a workpiece relative to a work apparatus; first and second drive means respectively responsive to first and second drive signals and operative to drive said stage means along said axes; position detector means for monitoring the position of said stage means relative to the work apparatus and including a reference substrate carried by said stage means and having orthogonal dimension position related indicia disposed thereupon, and means for sensing said indicia and developing first and second actual position signals corresponding to the positioning of said substrate along said axes; input means for generating first and second desired position signals corresponding to positions along said axes to which said stage means is to be driven; and first and second position control means for respectively comparing said first and second desired position signals to said first and second actual position signals and for developing said first and second drive signals for application to said first and second drive means respectively to cause said workpiece to be driven to a desired position.
Claim 3
Dependent Claim
32 words
A servo control system as recited in claim 1 wherein said indicia are embodied in a plurality of uniformly configured reflective surface areas of said substrate uniformly arrayed in rows and columns.
Claim 4
Dependent Claim
21 words
A servo control system as recited in claim 1 or 2 wherein each element of said indicia is rectangular in configuration.
Claim 5
Dependent Claim
19 words
A servo control system as recited in claim 1 wherein said substrate is translucent and said indicia are opaque.
Claim 6
Dependent Claim
26 words
A servo control system as recited in claim 1, 2 or 4 wherein said means for sensing said indicia includes light source means and photodetector means.
Claim 7
Dependent Claim
200 words
A servo control system as recited in claim 1 wherein said position detector means includes an optical system for casting an image of at least a portion of said reference substrate onto an apertured reticle, and photodetection means disposed behind the apertures of said reticle and operative to generate electrical outputs from which said first and second actual position signals are developed, said control system further comprising: third drive means responsive to a third drive signal and operative to move said reticle in a first direction relative to said optical system; fourth drive means responsive to a fourth drive signal and operative to move said reticle in a second direction relative to said optical system; first reticle follower means for developing a first reticle position signal; second reticle follower means for developing a second reticle position signal; first reticle position control means including a first servo system responsive to a first input adjust signal and said first reticle position signal and operative to generate said third drive signal; and second reticle position control means including a second servo system responsive to a second input adjust signal and said second reticle position signal and operative to generate said fourth drive signal.
Claim 8
Dependent Claim
60 words
A servo control system as recited in claim 1 wherein said position detector means includes an optical system for casting an image of at least a portion of said reference substrate onto an apertured reticle, and photodetection means disposed to receive said image and operative to generate electrical signals from which said first and second actual position signals are developed.
Claim 9
Dependent Claim
32 words
A servo control system as recited in claim 7 wherein the indicia contained on said reference substrate include a plurality of like, rectangularly-shaped reflective surface areas arrayed in orderly rows and columns.
Claim 10
Dependent Claim
26 words
A servo control system as recited in claim 8 wherein said reference substrate includes a reference strip comprising a reflective band circumscribing said reflective surface areas.
Claim 11
Dependent Claim
32 words
A servo control system as recited in claim 7 wherein the indicia contained on said reference substrate include a plurality of like, rectangularly-shaped opaque surface areas arrayed in orderly rows and columns.
Claim 12
Dependent Claim
26 words
A servo control system as recited in claim 10 wherein said reference substrate includes a reference strip comprising an opaque band circumscribing said opaque surface areas.
Claim 13
Dependent Claim
34 words
A servo control system as recited in claim 1 wherein said position detector means includes means for illuminating said indicia and photosensitive means for detecting movement of said indicia relative to said photosensitive means.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-01-09 | 1987-07-11 | 1988-01-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-01-09 | 1991-07-11 | 1992-01-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-01-09 | 1995-07-11 | 1996-01-10 | $7700.00 | Window Closed / Lapsed |